US4096386A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light reflecting electrostatic electron lens
Assignee: Taylor Kincaid Co
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Filing: 1977-04-04
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Granted: 1978-06-20
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Expires: 1997-04-04
Abstract
Abstract An improved electrostatic electron lens for photoelectron emission microscopes is disclosed, having a planar upper surface on its beam entrance electrode highly polished to a mirror finish for light reflection. The lens is positioned between a light source and a specimen holder such that light may be reflected off the planar upper surface of the entrance electrode onto the specimen for causing photoemission of electrons from such specimen. The lens is constructed to enable expansion of the lens electrodes during heating, such as "bake-out" to remove adsorbed gases, without breaking the insulators between such electrodes. An intermediate electrode is disposed in a spaced, insulated relationship between the beam entrance electrode and an exit electrode by two insulator members. This intermediate electrode is provided with an outer annular shoulder portion circumferentially disposed about its outer periphery cooperating in an abutting and overlapping relationship with an inner annular shoulder projection circumferentially disposed about one insulator, allowing the intermediate electrode to expand radially outward during heating without fracturing the insulators.
Inventors
- 👤 Gertrude F. Rempfer
- 👤 George H. Lesch
- 👤 Osbie Hayes Griffith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 05:52
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/12; H01J37/26; H01J37/285
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
89 words
An electrostatic electron lens apparatus comprising: a plurality of electrically conductive electrodes including an entrance electrode, an exit electrode and an intermediate electrode disposed between said entrance and exit electrodes; insulative support means for mounting said electrodes with their apertures in alignment and for spacing and insulating said intermediate electrode from said entrance electrode and said exit electrode; and said entrance electrode having a substantially planar, front surface with a mirror finish for reflection of light away from the lens to a specimen positioned in front of said lens.
Claim 2
Dependent Claim
89 words
An electrostatic electron lens apparatus comprising: a plurality of electrically conductive electrodes including an entrance electrode, an exit electrode and an intermediate electrode disposed between said entrance and exit electrodes; insulative support means for mounting said electrodes with their apertures in alignment and for spacing and insulating said intermediate electrode from said entrance electrode and said exit electrode; and said entrance electrode having a substantially planar, front surface with a mirror finish for reflection of light away from the lens to a specimen positioned in front of said lens.
Claim 3
Dependent Claim
24 words
Lens apparatus in accordance with claim 1 wherein said front surface of said entrance electrode has a mirror finish of 20 micro-inches or less.
Claim 4
Dependent Claim
48 words
Lens apparatus in accordance with claim 1 in combination with specimen holder means for receiving and holding a specimen to be illuminated with light; and light source means positioned so as to reflect light from said front surface of said entrance electrode and to said specimen holder means.
Claim 5
Dependent Claim
47 words
Lens apparatus in accordance with claim 1 wherein said insulative support means has electrode engaging surfaces disposed radially inward of shoulders on the outer periphery of said electrodes to maintain said spacing and alignment while enabling said electrodes to expand during heating without breaking said support means.
Claim 6
Dependent Claim
67 words
Lens apparatus in accordance with claim 1 wherein said intermediate electrode includes: a shoulder portion disposed about the periphery of said intermediate electrode, and abutting an electrode engaging projection on said insulative support means with the inner surface of said shoulder portion while the outer surface of said shoulder portion is spaced from contact with said insulative support means to enable outward expansion of said intermediate electrode.
Claim 7
Dependent Claim
51 words
Lens apparatus in accordance with claim 5 in combination with specimen holder means for receiving and holding a specimen to be illuminated with light; and light source means positioned so as to reflect light off of said planar reflective front surface of said entrance electrode and onto said specimen holder means.
Claim 8
Dependent Claim
107 words
A photoelectron emission microscope in which the improvement comprises: a plurality of electrically conductive electrodes including an entrance electrode, an exit electrode and an intermediate electrode disposed between said entrance and exit electrodes, each of said electrodes having an aperture for the passage of electrons through said electrodes; insulative support means for mounting said electrodes with their apertures in alignment and for spacing and insulating said intermediate electrode from said entrance electrode and said exit electrode; and said entrance electrode having a substantially planar front surface with a mirror finish for reflection of light away from the lens to a specimen positioned in front of said lens.
Claim 9
Dependent Claim
107 words
A photoelectron emission microscope in which the improvement comprises: a plurality of electrically conductive electrodes including an entrance electrode, an exit electrode and an intermediate electrode disposed between said entrance and exit electrodes, each of said electrodes having an aperture for the passage of electrons through said electrodes; insulative support means for mounting said electrodes with their apertures in alignment and for spacing and insulating said intermediate electrode from said entrance electrode and said exit electrode; and said entrance electrode having a substantially planar front surface with a mirror finish for reflection of light away from the lens to a specimen positioned in front of said lens.
Claim 10
Dependent Claim
25 words
A microscope in accordance with claim 7 in which said front surface of said entrance electrode has a mirror finish of 20 micro-inches or less.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-06-19 | 1981-12-19 | 1982-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-06-19 | 1985-12-19 | 1986-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-06-19 | 1989-12-19 | 1990-06-20 | $7700.00 | Window Closed / Lapsed |