US4763098A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flip-chip pressure transducer
Assignee: Honeywell Inc
•
Filing: 1985-04-08
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Granted: 1988-08-09
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Expires: 2005-04-08
Abstract
Abstract Disclosed is a pressure transducer comprising a pressure sensitive silicon die having a front side exposing piezoresistive means and comprising means for flip-chip mounting the die to a pressure vessel. The transducer further comprises a pressure vessel having an aperture, the pressure vessel comprising means for flip-chip mounting the die over the aperture. The die is flip-chip mounted over the aperture in the pressure vessel, and there is a hermetic seal between the pressure vessel and the die.
Inventors
- 👤 Max C. Glenn
- 👤 Raymond F. McMullen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:43
CPC Classifications
G; G01; G01L; G01L19/00; G01L19/0061; G01L19/0084; G01L19/0007; G01L19/0038; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0054; Y; Y10; Y10T; Y10T29/00; Y10T29/42; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49103
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
98 words
A pressure transducer comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and comprising means for flip-chip mounting the die to a pressure vessel; a pressure vessel having an aperture, the pressure vessel comprising means for flip-chip mounting the die over the aperture, so that the front side of the die faces the aperture; the die being flip-chip mounted over the aperture in the pressure vessel; a hermetic seal between the pressure vessel and the die; and a substantially flat, optically transparent coverplate, attached to the pressure vessel and positioned opposite said piezoresistive means.
Claim 2
Dependent Claim
98 words
A pressure transducer comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and comprising means for flip-chip mounting the die to a pressure vessel; a pressure vessel having an aperture, the pressure vessel comprising means for flip-chip mounting the die over the aperture, so that the front side of the die faces the aperture; the die being flip-chip mounted over the aperture in the pressure vessel; a hermetic seal between the pressure vessel and the die; and a substantially flat, optically transparent coverplate, attached to the pressure vessel and positioned opposite said piezoresistive means.
Claim 3
Dependent Claim
13 words
The apparatus of claim 1 wherein the pressure vessel comprises a chip carrier.
Claim 4
Dependent Claim
17 words
The apparatus of claim 1 wherein the pressure vessel defines an evacuated interior volume comprising the aperture.
Claim 5
Independent Claim
81 words
A method of fabricating a pressure transducer comprising: providing a pressure sensitive silicon die having a front side exposing poezoresistive means; providing a pressure vessel having an aperture; flip-chip mounting the die over the aperture in the pressure vessel so that the front side of the die faces the aperture; providing a hermetic seal between the pressure vessel and the die; and attaching a substantially flat, optically transparent coverplate to the pressure vessel, the coverplate being positioned opposite the piezoresistive means.
Claim 6
Independent Claim
81 words
A method of fabricating a pressure transducer comprising: providing a pressure sensitive silicon die having a front side exposing poezoresistive means; providing a pressure vessel having an aperture; flip-chip mounting the die over the aperture in the pressure vessel so that the front side of the die faces the aperture; providing a hermetic seal between the pressure vessel and the die; and attaching a substantially flat, optically transparent coverplate to the pressure vessel, the coverplate being positioned opposite the piezoresistive means.
Claim 7
Dependent Claim
17 words
The method of claim 4 wherein: the piezoresistive mens is laser-trimmed following assembly of the pressure transducer.
Claim 8
Dependent Claim
37 words
The method of claim 5 further including: detecting the pressure on said transducer during the laser-trimming; and terminating the laser-trimming when a desired pressure on the transducer is indicated, so that the transducer is calibrated following assembly.
Claim 9
Dependent Claim
122 words
A differential pressure transducer comprising: a pressure sensitive silicon die having a front side exposing piezoresistive mens and comprising means for flip-chip mounting the die to a chip carrier; a chip carrier having an aperture extending through the carrier, the chip carrier comprising means for flip-chip mounting the die over the aperture, the die being flip-chip mounted over the aperture so that the front of the die faces the aperture and wherein the end of the aperture opposite the die is uncovered; and a hermetic seal between the chip carrier and the die, so that the die will flex in respone to a difference in pressure between the pressure in the aperture and the pressure on the back side of the die.
Claim 10
Dependent Claim
122 words
A differential pressure transducer comprising: a pressure sensitive silicon die having a front side exposing piezoresistive mens and comprising means for flip-chip mounting the die to a chip carrier; a chip carrier having an aperture extending through the carrier, the chip carrier comprising means for flip-chip mounting the die over the aperture, the die being flip-chip mounted over the aperture so that the front of the die faces the aperture and wherein the end of the aperture opposite the die is uncovered; and a hermetic seal between the chip carrier and the die, so that the die will flex in respone to a difference in pressure between the pressure in the aperture and the pressure on the back side of the die.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-09 | 1992-02-08 | 1992-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-09 | 1996-02-08 | 1996-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-09 | 2000-02-08 | 2000-08-09 | $7700.00 | Window Closed / Lapsed |