US4080696A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making piezoelectric vibrator
Assignee: Seiko Instruments Inc
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Filing: 1977-01-28
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Granted: 1978-03-28
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Expires: 1997-01-28
Abstract
Abstract A piezoelectric vibrator element is shaped by photo-etching techniques from a quartz crystal wafer. Film electrodes and masses for frequency adjustment are applied by first depositing a layer of chromium and then a layer of gold on the element by vacuum depositing or sputtering. The element is then kept in a high vacuum of at least 10 -5 torr and at a high temperature of 300° C to fix the depositions on the element and eliminate distortion. To adjust the frequency, a portion of the metal mass is removed by a laser beam, after which the element is kept in a high vacuum at high temperature to affix securely to the element any bits of metal that may have condensed during the removing step. .
Inventors
- 👤 Hironori Shimatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 21:02
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/21; H03H9/215; G; G04; G04F; G04F5/00; G04F5/04; G04F5/06; G04F5/063; H03H3/00; H03H3/007; H03H3/02; H03H3/04; H03H2003/0414; H03H2003/0492; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
74 words
A method of making a piezoelectric vibrator which comprises shaping a vibrator from a quartz crystal wafer by photo-etching technique, applying film electrodes and masses for frequency adjustment by depositing a layer of chromium and an overlying layer of gold on said vibrator and keeping said vibrator with said deposits thereon in a high vacuum and high temperature environment for a predetermined time sufficient to eliminate distortions caused by said photo-etching and metal deposition.
Claim 2
Independent Claim
74 words
A method of making a piezoelectric vibrator which comprises shaping a vibrator from a quartz crystal wafer by photo-etching technique, applying film electrodes and masses for frequency adjustment by depositing a layer of chromium and an overlying layer of gold on said vibrator and keeping said vibrator with said deposits thereon in a high vacuum and high temperature environment for a predetermined time sufficient to eliminate distortions caused by said photo-etching and metal deposition.
Claim 3
Dependent Claim
26 words
A method according to claim 1, in which the vacuum is at least 10 -5 Torr and the temperature is of the order of 300° C.
Claim 4
Dependent Claim
35 words
A method according to claim 1, in which the time during which said vibrator is kept in a high vacuum and high temperature is sufficient to produce mutual diffusion between said gold and chromium layers.
Claim 5
Dependent Claim
61 words
A method according to claim 1, further comprising the step of removing a portion of said masses with a laser beam to adjust the frequency of the vibrator and thereafter keeping said vibrator in a high vacuum and high temperature environment to affix securely to the vibrator any bits of metal that condense on the vibrator surface during said removing step.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-03-27 | 1981-09-26 | 1982-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-03-27 | 1985-09-26 | 1986-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-03-27 | 1989-09-26 | 1990-03-28 | $7700.00 | Window Closed / Lapsed |