Pressure transducer

Claim 2

A pressure transducer comprising: a pressure sensitive silicon die having a front side providing access to piezoresistive means therein at least through electrical interconnections provided thereto, and having a back side for receiving pressure from a pressure medium; a pressure vessel having an aperture and having therethrough, other than through the aperture, interconnection means which are in electrical contact with the electrical interconnections; and means including a permanent heremetic seal for mounting the die with the front side of the die restrained by the pressure vessel and facing the aperture so that the die is compressed toward the pressure vessel if positive pressure is applied to the back side of the die by the pressure medium.

Claim 3

The apparatus of claim 1 wherein the pressure vessel defines an evacuated interior volume comprising the aperture.

Claim 4

The apparatus of claim 2 wherein the pressure vessel comprises an optically transparent coverplate apposed to the piezoresistive means.

Claim 5

The apparatus of claim 1 wherein the pressure vessel comprises a chip carrier.

Claim 6

A pressure transducer comprising: a pressure sensitive silicon die having a front side providing access to piezoresistive means therein at least through electrical interconnections provided thereto, and having a back side for receiving pressure from a pressure medium; a pressure vessel having an aperture and having therethrough, other than through the aperture, interconnection means which are in electrical contact with the electircal interconnections; and means including a permanent hermetic seal for mounting the die with the piezoresistive means positioned adjacent the aperture, the hermetic seal being located between the pressure vessel and the front side of the die so that the hermetic seal is maintained in compression if positive pressure is applied to the back side of the die by the pressure medium.

Claim 7

A pressure transducer comprising: a pressure sensitive silicon die having a front side providing access to piezoresistive means therein at least through electrical interconnections provided thereto, and having a back side for receiving pressure from a pressure medium; a pressure vessel having an aperture and having therethrough, other than through the aperture, interconnection means which are in electrical contact with the electircal interconnections; and means including a permanent hermetic seal for mounting the die with the piezoresistive means positioned adjacent the aperture, the hermetic seal being located between the pressure vessel and the front side of the die so that the hermetic seal is maintained in compression if positive pressure is applied to the back side of the die by the pressure medium.

Claim 8

The apparatus of claim 5 wherein the pressure vessel defines an evacuated interior volume comprising the aperture.

Claim 9

The apparatus of claim 6 wherein the pressure vessel comprises an optically transparent coverplate apposed to the piezoresistive means.

Claim 10

The apparatus of claim 5 wherein the pressure vessel comprises a chip carrier.

Claim 11

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a washer-like support member having first and second end surfaces, the first end surface comprising means for hermetically bonding the member to the front side of the die, the washer-like support member having a central aperture substantially in register with the piezoresistive means, the washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a pressure vessel having an aperture, the pressure vessel having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; and means for mounting the second end surface of the washer-like support member to the pressure vessel so that the apertures are substantially in register and so that the die is compressed toward the pressure vessel when positive pressure is applied to the back side of the die by the pressure medium, the means for mounting comprising a hermetic seal between the pressure vessel and the second end surface of the washer-like support member.

Claim 12

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a washer-like support member having first and second end surfaces, the first end surface comprising means for hermetically bonding the member to the front side of the die, the washer-like support member having a central aperture substantially in register with the piezoresistive means, the washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a pressure vessel having an aperture, the pressure vessel having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; and means for mounting the second end surface of the washer-like support member to the pressure vessel so that the apertures are substantially in register and so that the die is compressed toward the pressure vessel when positive pressure is applied to the back side of the die by the pressure medium, the means for mounting comprising a hermetic seal between the pressure vessel and the second end surface of the washer-like support member.

Claim 13

The apparatus of claim 9 wherein the pressure vessel defines an evacuated interior volume comprising the aperture.

Claim 14

The apparatus of claim 10 wherein the pressure vessel comprises an optically transparent coverplate apposed to the piezoresistive means.

Claim 15

The apparatus of claim 9 wherein the pressure vessel comprises means for providing electrical connection to the piezoresistive means.

Claim 16

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a washer-like support member having first and second end surfaces, the first end surface facing the front side of the die, the washer-like support member having a central aperture substantially in register with the piezoresistive means, the washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a hermetic seal between the first end surface of the washer-like support member and the front side of the die; a pressure vessel having a surface facing the second end surface of the washer-like support member, the pressure vessel having an aperture substantially in register with the aperture of the washer-like support member, the pressure vessel having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a hermetic seal between the pressure vessel and the second end surface of the washer-like support member; and the hermetic seals being maintained in compression when positive pressure is applied to the back side of the die by a pressure medium.

Claim 17

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a washer-like support member having first and second end surfaces, the first end surface facing the front side of the die, the washer-like support member having a central aperture substantially in register with the piezoresistive means, the washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a hermetic seal between the first end surface of the washer-like support member and the front side of the die; a pressure vessel having a surface facing the second end surface of the washer-like support member, the pressure vessel having an aperture substantially in register with the aperture of the washer-like support member, the pressure vessel having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a hermetic seal between the pressure vessel and the second end surface of the washer-like support member; and the hermetic seals being maintained in compression when positive pressure is applied to the back side of the die by a pressure medium.

Claim 18

The apparatus of claim 13 wherein the pressure vessel defines an evacuated interior volume comprising the aperture.

Claim 19

The apparatus of claim 14 wherein the pressure vessel comprises an optically transparent coverplate apposed to the piezoresistive means.

Claim 20

The apparatus of claim 13 wherein the pressure vessel comprises means for providing electrical connection to the piezoresistive means.

Claim 21

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a first washer-like support member having first and second end surfaces, one end surface comprising means for hermetically bonding the first member to the front side of the die, the first washer-like support member having a central aperture substantially in register with the piezoresistive means, the first washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a second washer-like support member having first and second end surfaces, one end surface comprising means for hermetically bonding the second member to the other surface of the first washer-like support member, the second washer-like support member having a central aperture substantially in register with the aperture of the first washer-like support member, a portion of the other surface of the second washer-like support member supporting a thin-film metal conductor, the second washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; means for connecting the thin-film metal conductor to the piezoresistive means; a third washer-like support member having first and second end surfaces, one end surface comprising means for hermetically bonding the third member to a portion of the other surface of the second washer-like support member, the third washer-like support member having a central aperture substantially in register with the apertures of the first and second washer-like support members, the third washer like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die, the third washer-like support member further comprising an additional aperture substantially in register with the thin film metal conductor on the other surface of the second washer-like support member; electrical terminal means passing through the additional aperture and connected to the thin film metal conductor in register with the aperture; and means hermetically sealing the additional aperture.

Claim 22

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a first washer-like support member having first and second end surfaces, one end surface comprising means for hermetically bonding the first member to the front side of the die, the first washer-like support member having a central aperture substantially in register with the piezoresistive means, the first washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; a second washer-like support member having first and second end surfaces, one end surface comprising means for hermetically bonding the second member to the other surface of the first washer-like support member, the second washer-like support member having a central aperture substantially in register with the aperture of the first washer-like support member, a portion of the other surface of the second washer-like support member supporting a thin-film metal conductor, the second washer-like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die; means for connecting the thin-film metal conductor to the piezoresistive means; a third washer-like support member having first and second end surfaces, one end surface comprising means for hermetically bonding the third member to a portion of the other surface of the second washer-like support member, the third washer-like support member having a central aperture substantially in register with the apertures of the first and second washer-like support members, the third washer like support member having a thermal coefficient of expansion substantially matching the thermal coefficient of expansion of the die, the third washer-like support member further comprising an additional aperture substantially in register with the thin film metal conductor on the other surface of the second washer-like support member; electrical terminal means passing through the additional aperture and connected to the thin film metal conductor in register with the aperture; and means hermetically sealing the additional aperture.

Claim 23

The apparatus of claim 17 wherein the surfaces hermetically bonded together have a flatness within approximately four millionths of an inch.

Claim 24

The apparatus of claim 18 wherein the surfaces hermetically bonded together comprise no series of pits separated by three pit diameters or less that, when combined, cross the entire surface in a radial direction, the surfaces hermetically bonded together further being free of scratches that cross the entire surface in a radial direction.

Claim 25

The apparatus of claim 17 wherein the third washer-like support member supports a cover plate hermetically sealed to the other side of the third washer-like support member, the central apertures in the first, second and third washer-like support members, together with the die and cover plate, forming an evacuated pressure reference chamber.

Claim 26

The apparatus of claim 20 wherein the cover plate is optically transparent.

Claim 27

The apparatus of claim 17 wherein: the front side of the die comprises a mounting portion flat within approximately four millionths of an inch; and the end surface of the first washer-like support member hermetically bonded to the front surface of the die is flat within approximately four millionths of an inch.

Claim 28

The apparatus of claim 22 wherein the surfaces having a flatness within approximately four millionths of an inch comprise no series of pits separated by three pit diameters or less that, when combined, cross the entire surface in a radial direction, the surfaces having a flatness within approximately four millionths of an inch also being free of scratches that cross the entire surface in a radial direction.

Claim 29

The apparatus of claim 17 wherein the other end surface of the first washer-like support member and both end surfaces of the second and third washer-like support members are flat within approximately 0.0002 inch.

Claim 30

The apparatus of claim 24 wherein the surfaces having a flatness within approximately 0.0002 inch have a surface finish of 8 microinch and are free of scratches larger than 8 microinch.

Claim 31

The apparatus of claim 17 wherein the first washer-like support member comprises borosilicate glass and the second and third washer-like support members comprise silicon.

Claim 32

The apparatus of claim 17 wherein the first washer-like support member comprises borosilicate glass and the second and third washer-like support members comprise silicon nitride.

Claim 33

The apparatus of claim 17 wherein the first, second and third washer-like support members each comprise a material selected from the group consisting of borosilicate glass, silicon, and, silicon nitride.

Claim 34

The apparatus of claim 17 wherein: the other surface of the second washer-like support member supports a plurality of thin film metal conductors; the die comprises a plurality of piezoresistive means; the means for connecting comprises a plurality of wire bonds, there being a wire bond connected between each thin film metal conductor and a different one of the piezoresistive means; the central aperture in the third washer-like support member has a diameter larger than the diameter of the central aperture in the second washer-like support member so that the central aperture in the third washer-like support member surrounds the wire bond connections with the thin film metal conductors; the third washer-like support member comprises a plurality of additional apertures each substantially in register with a different thin film metal conductor on the other surface of the second washer-like support member; each additional aperture surrounding electrical terminal means connected to the thin film metal conductor in register with the aperture; and means hermetically sealing each additional aperture.

Claim 35

The apparatus of claim 29 wherein the third washer-like support member supports a coverplate hermetically sealed to the other side of the third washer-like support member, the central apertures in the first, second and third washer-like support members, together with the die in the coverplate, forming an evacuated pressure reference chamber.

Claim 36

The apparatus of claim 30 wherein the cover plate is optically transparent.

Claim 37

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a borosilicate glass washer-like support member having first and second end surfaces, one end surface being hermetically bonded to the front side of the die, the glass washer-like support member having a central aperture substantially in register with the piezoresistive means; a thin-film metal conductor recessed into and substantially level with the other end surface of the glass support member; means for connecting the thin-film metal conductor to the piezoresistive means; a silicon washer-like support member having first and second end surfaces, one end surface being hermetically bonded to the other end surface of the glass support member, the silicon support member having a central aperture substantially in register with the central aperture of the glass support member, the silicon support member further comprising an additional aperture substantially in register with the thin-film metal conductor recessed into the other end surface of the glass support member; electrical terminal means passing through the additional aperture and connected to the thin film metal conductor in register with the aperture; and means hermetically sealing the additional aperture.

Claim 38

A pressure transducer, comprising: a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium; a borosilicate glass washer-like support member having first and second end surfaces, one end surface being hermetically bonded to the front side of the die, the glass washer-like support member having a central aperture substantially in register with the piezoresistive means; a thin-film metal conductor recessed into and substantially level with the other end surface of the glass support member; means for connecting the thin-film metal conductor to the piezoresistive means; a silicon washer-like support member having first and second end surfaces, one end surface being hermetically bonded to the other end surface of the glass support member, the silicon support member having a central aperture substantially in register with the central aperture of the glass support member, the silicon support member further comprising an additional aperture substantially in register with the thin-film metal conductor recessed into the other end surface of the glass support member; electrical terminal means passing through the additional aperture and connected to the thin film metal conductor in register with the aperture; and means hermetically sealing the additional aperture.

Claim 39

The apparatus of claim 32 wherein the silicon support member supports a borosilicate glass coverplate hermetically bonded to the other side of the silicon support member, the central apertures in the glass and silicon washer-like support members, together with the die and the coverplate forming an evacuated pressure reference chamber.

Claim 40

The apparatus of claim 32 wherein: a plurality of thin-film metal conductors are separately recessed into and substantially level with the other surface of the glass support member; the die comprises a plurality of piezoresistive means; the means for connecting comprises a plurality of wire bonds, there being a wire bond connected between each thin-film metal conductor and a different one of the piezoresistive means; the central aperture in the silicon washer-like support member has a diameter larger than the diameter of the central aperture in the glass washer-like support member so that the central aperture in the silicon washer-like support member surrounds the wire bond connections with the thin-film metal conductors; the silicon washer-like support member comprises a plurality of additional apertures, each substantially in register with a different thin-film metal conductor recessed into the other surface of the glass washer-like support member; each additional aperture surrounding electrical terminal means connected to the thin-film metal conductor in register with the aperture; and means hermetically sealing each additional aperture.

Claim 41

The apparatus of claim 34 wherein the silicon washer-like support member supports a borosilicate glass coverplate hermetically sealed to the other side of the silicon washer-like support member, the central apertures in the glass and silicon washer-like support members, together with the die and the coverplate, forming an evacuated pressure reference chamber.

Claim 42

The apparatus of claim 32 wherein the surfaces that are hermetically bonded are bonded by an electrostatic bonding process.

Claim 45

The method of claim 37 wherein: the pressure vessel comprises an optically transparent coverplate apposed to the piezoresistive means; and the piezoresistive means are lazer-trimmed after assembly of the transducer.