Electron beam memory system with ultra-compact, high current density electron gun

Claim 2

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass cathode adapted to receive a predetermined first electrical potential to form a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the penetration of said bean into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and said third electrodes.

Claim 3

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass cathode adapted to receive a predetermined first electrical potential and to form a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a tip-to-third-electrode length of no more than about 1 centimeter and a mass no greater than about 20 grams in order to make feasible rapid random accessing of any area of said storage medium.

Claim 4

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass cathode adapted to receive a predetermined first electrical potential and to form a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a tip-to-third-electrode length of no more than about 1 centimeter and a mass no greater than about 20 grams in order to make feasible rapid random accessing of any area of said storage medium.

Claim 5

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at beam current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass cathode, said cathode being adapted to receive a predetermined first electrical potential and forming a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium at a magnification of .5-2.0, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, the said first, second, third and fourth potentials, the thickness and aperture diameters of said electrodes and the interelectrode spacings being such that the electron beam current generated by said gun is in the range of about 10 to 500 nanoamperes, and said beam probe having a diameter in the range of about 200 to 1000 angstroms.

Claim 6

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at beam current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass cathode, said cathode being adapted to receive a predetermined first electrical potential and forming a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium at a magnification of .5-2.0, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, the said first, second, third and fourth potentials, the thickness and aperture diameters of said electrodes and the interelectrode spacings being such that the electron beam current generated by said gun is in the range of about 10 to 500 nanoamperes, and said beam probe having a diameter in the range of about 200 to 1000 angstroms.

Claim 7

The apparatus defined by claim 3 wherein the thickness and aperture radius of said second electrode are approximately equal.

Claim 8

The apparatus defined by claim 4 wherein the thicknesses of said first, second and third electrodes are, respectively, 0.2-0.8 mm, 1.0-1.4 mm, and 0.2-0.8 mm, and the potentials on said first, second and third electrodes are about 0, -5 to -6 and 0 kilovolts, respectively.

Claim 9

The apparatus as defined by claim 3 wherein said first electrode aperture has a radius in the range of 6-20 microns.

Claim 10

The apparatus defined by claim 6 wherein the radii of said second and said third electrode apertures are within about 25% of 1.2 mm and 0.4 mm, respectively.

Claim 11

The apparatus defined by claim 7 wherein the separation of said source and said first electrode is about 3-5 mm, the interelectrode spacings total within about 25% of 2 mm, and the total thickness of said first, said second and said third electrodes is within about 25% of 2 mm, whereby the overall length of the gun from said tip to exit from said third electrode is between about 0.5-1.0 centimeter.

Claim 12

A rapid random accessed electron beam reading or writing system comprising: means supporting a surface to be probed with an electron beam; and an electron gun and means for effecting relative movement between said gun and said surface, said gun having ultracompactness and low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said surface, said gun comprising: a low-mass field emission cathode, said cathode being adapted to receive a predetermined first electrical potential and forming a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said surface, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said first electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, the thickness and aperture radius of said second electrode being approximately equal.

Claim 13

A rapid random accessed electron beam reading or writing system comprising: means supporting a surface to be probed with an electron beam; and an electron gun and means for effecting relative movement between said gun and said surface, said gun having ultracompactness and low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said surface, said gun comprising: a low-mass field emission cathode, said cathode being adapted to receive a predetermined first electrical potential and forming a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said surface, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said first electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, the thickness and aperture radius of said second electrode being approximately equal.

Claim 14

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at beam current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode adapted to receive a predetermined second electrical potential selected in relation to said first potential to effect an extraction of electrons from said tip and having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said first electrode aperture having a radius in the range of 6-20 microns and said second and third electrode apertures having radii of within 25% of 1.2 mm and 0.4 mm, respectively.

Claim 15

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at beam current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode adapted to receive a predetermined second electrical potential selected in relation to said first potential to effect an extraction of electrons from said tip and having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said first electrode aperture having a radius in the range of 6-20 microns and said second and third electrode apertures having radii of within 25% of 1.2 mm and 0.4 mm, respectively.

Claim 16

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at beam current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens for forming a real imge of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential selected in relation to said first potential to effect an extraction of electrons from said tip and having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable, third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, the spacing between said tip and said first electrode being about 3-5 millimeters, the interelectrode spacings totaling within about 100% of 2 millimeters, the total thickness of said first, second and third electrodes being within about 100% of 2 millimeters, and the overall length of the gun from tip to exit from the third electrode is between about 0.5-1.0 centimeter.

Claim 17

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at beam current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens for forming a real imge of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential selected in relation to said first potential to effect an extraction of electrons from said tip and having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable, third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, the spacing between said tip and said first electrode being about 3-5 millimeters, the interelectrode spacings totaling within about 100% of 2 millimeters, the total thickness of said first, second and third electrodes being within about 100% of 2 millimeters, and the overall length of the gun from tip to exit from the third electrode is between about 0.5-1.0 centimeter.

Claim 18

A rapid random accessed electron beam recording or writing system comprising: means supporting a surface to be probed with an electron beam; and an electron gun and means for effecting relative movement between said gun and said surface, said gun having ultracompactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said surface, said gun comprising: a low-mass cathode, said cathode being adapted to receive a predetermined first electrical potential and forming a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said surface, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a mass no greater than about 20 grams in order to make feasible rapid random accessing of any area of said storage medium, the thickness and aperture radius of said second electrode being about equal, said first electrode aperture having a radius in the range of about 6-20 microns, and said second and third electrode apertures being within about 25% of 1.2 mm and 0.4 mm, respectively, the separation of said source and said first electrode being about 3-5 millimeters.

Claim 19

A rapid random accessed electron beam recording or writing system comprising: means supporting a surface to be probed with an electron beam; and an electron gun and means for effecting relative movement between said gun and said surface, said gun having ultracompactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said surface, said gun comprising: a low-mass cathode, said cathode being adapted to receive a predetermined first electrical potential and forming a high brightness electron source; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said surface, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a mass no greater than about 20 grams in order to make feasible rapid random accessing of any area of said storage medium, the thickness and aperture radius of said second electrode being about equal, said first electrode aperture having a radius in the range of about 6-20 microns, and said second and third electrode apertures being within about 25% of 1.2 mm and 0.4 mm, respectively, the separation of said source and said first electrode being about 3-5 millimeters.

Claim 20

The apparatus defined by claim 12 wherein the thicknesses of said first, second and third electrodes are, respectively, about 0.2-0.8 mm, 1.0-1.4 mm and 0.2-0.8 mm.

Claim 21

The apparatus defined by claim 12 wherein the spacing of said source from said first electrode is about 3-5 mm, the interelectrode spacings totals within about 100% of 2 mm, the total thickness of said first, said second, and said third electrodes is within about 100% of 2 mm, and the overall length of the gun from source to exit from said third electrode is between about 0.5-1.0 centimeter.

Claim 22

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential and having a value in the range of 3-10 kilovolts effective to extract electrons from said tip, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having said mass no greater than about 20 grams in order to make feasible rapid random accessing of any area of said storage medium, the said first, second, third and fourth potentials, the thickness and aperture diameters of said electrodes, and the interelectrode spacings being such that said electron beam current generated by said gun is in the range of about 10 to 500 nanoamperes, said beam probe has a diameter in the range of about 200-1000 angstroms, the thicknesses of said first, second and third electrodes are, respectively, 0.2-0.8 mm, 1.0-1.4 mm, and 0.2-0.8 mm, said first electrode has a radius of 6-20 microns, the radii of said second and said third electrode apertures is within about 25% of 1.2 mm and 0.4 mm, respectively, the separation of said tip and said first electrode is about 3-5 mm, the interelectrode spacings total within about 100% of 2 mm, and the overall axial length of the gun from tip to exit from said third electrode is between about 0.5-1.0 centimeter.

Claim 23

A rapid random accessed electron beam memory system comprising: disc means mounted for rotation and supporting an information storage medium; disc rotating means for rotating said disc; and an electron gun and means for moving said gun across said disc, said gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe at current densities appropriate for writing information on or reading information from said medium, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens for forming a real image of said electron source in the vicinity of said recording medium, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential and having a value in the range of 3-10 kilovolts effective to extract electrons from said tip, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam and determining the depth of penetration of said beam into said storage medium, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having said mass no greater than about 20 grams in order to make feasible rapid random accessing of any area of said storage medium, the said first, second, third and fourth potentials, the thickness and aperture diameters of said electrodes, and the interelectrode spacings being such that said electron beam current generated by said gun is in the range of about 10 to 500 nanoamperes, said beam probe has a diameter in the range of about 200-1000 angstroms, the thicknesses of said first, second and third electrodes are, respectively, 0.2-0.8 mm, 1.0-1.4 mm, and 0.2-0.8 mm, said first electrode has a radius of 6-20 microns, the radii of said second and said third electrode apertures is within about 25% of 1.2 mm and 0.4 mm, respectively, the separation of said tip and said first electrode is about 3-5 mm, the interelectrode spacings total within about 100% of 2 mm, and the overall axial length of the gun from tip to exit from said third electrode is between about 0.5-1.0 centimeter.

Claim 24

An electron gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness source at said tip; an electrostatic focus lens for forming a real image of said electron source, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential and having a value effective to extract electrons from said tip, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a mass no greater than about 20 grams, said first electrode aperture having a radius in the range of 6-20 microns, said second and third electrode apertures being within 25% of 1.2 mm and 0.4 respectively, and the separation of said tip and said first electrode being about 3-5 millimeters.

Claim 25

An electron gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam probe, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness source at said tip; an electrostatic focus lens for forming a real image of said electron source, said lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential and having a value effective to extract electrons from said tip, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a mass no greater than about 20 grams, said first electrode aperture having a radius in the range of 6-20 microns, said second and third electrode apertures being within 25% of 1.2 mm and 0.4 respectively, and the separation of said tip and said first electrode being about 3-5 millimeters.

Claim 26

The apparatus defined by claim 16 wherein the thicknesses of said first, second and third electrodes are, respectively, 0.2-0.8 mm, 1.0-1.4 mm and 0.2-0.8 mm.

Claim 27

The apparatus defined by claim 16 wherein said first electrode aperture has a radius of 6-20 microns, and the radii of said second and said third electrode apertures are within about 25% of 1.2 mm and 0.4 mm, respectively.

Claim 28

The apparatus defined by claim 16 wherein the tip-to-first electrode distance is about 3-5 mm, the interelectrode spacings totals within about 100% of 2 mm, and the total thickness of said first, said second and said third electrodes is within about 100% of 2 mm, and the overall length of the gun from tip to exit from said third electrode is between about 0.5-1.0 centimeter.

Claim 29

An electron gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential and having a value in the range of 3-10 kilovolts effective to extract electrons from said tip, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a mass no greater than about 20 grams, the said first, second, third and fourth potentials, the thickness and aperture diameters of said electrodes, and the interelectrode spacings being such that said electron beam current generated by said gun is in the range of about 10-500 nanoamperes, the thicknesses of said first, second and third electrodes are, respectively, about 0.2-0.8 mm, 1.0-1.4 mm and 0.2-0.8 mm, said first electrode aperture having a radius of 6-20 microns, the radii of said second and said third electrode apertures being within about 25% of 1.2 mm and 0.4 mm, respectively, the separation of said tip and said first electrode being about 3-5 mm, the interelectrode spacings totalling within about 100% of 2 mm, and the overall length of the gun from tip to exit from said third electrode is between about 0.5-1.0 centimeter.

Claim 30

An electron gun having ultra-compactness and extremely low mass, yet being capable of developing a finely focused electron beam, said gun comprising: a low-mass field emission cathode, said cathode having an emitting tip and being adapted to receive a predetermined first electrical potential to form a high brightness electron source at said tip; an electrostatic focus lens comprising: a first electrode being adapted to receive a predetermined second electrical potential which is positive relative to said first potential and having a value in the range of 3-10 kilovolts effective to extract electrons from said tip, said electrode having a relatively small aperture for determining the diameter of an electron beam which is formed, a second electrode located downbeam of said first electrode and adapted to receive an adjustable third, focusing, electrical potential which is negative relative to said second electrical potential, said second electrode having an aperture which is larger than said first electrode aperture, and a third electrode located downbeam of said second electrode and adapted to receive a fourth, accelerating, electrical potential which is positive relative to said third potential for accelerating said beam, said third electrode having an aperture which is also larger than said first electrode aperture, said second, third and fourth electrical potentials being selected to establish beam-focusing fields between said first and second and between said second and said third electrodes, said gun having a mass no greater than about 20 grams, the said first, second, third and fourth potentials, the thickness and aperture diameters of said electrodes, and the interelectrode spacings being such that said electron beam current generated by said gun is in the range of about 10-500 nanoamperes, the thicknesses of said first, second and third electrodes are, respectively, about 0.2-0.8 mm, 1.0-1.4 mm and 0.2-0.8 mm, said first electrode aperture having a radius of 6-20 microns, the radii of said second and said third electrode apertures being within about 25% of 1.2 mm and 0.4 mm, respectively, the separation of said tip and said first electrode being about 3-5 mm, the interelectrode spacings totalling within about 100% of 2 mm, and the overall length of the gun from tip to exit from said third electrode is between about 0.5-1.0 centimeter.