US4757208A
Expired / Lapsed
US
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Masked ion beam lithography system and method
Assignee: Raytheon Co
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Filing: 1986-03-07
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Granted: 1988-07-12
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Expires: 2006-03-07
Abstract
Abstract A masked ion beam lithography (MIBL) system and method is disclosed which is considerably more compact and economical than prior ion implantation devices. An H + ion beam is extracted from a source in the form of an angularly expanding beam, and is transmitted through two lenses that sequentially accelerate the ions to energies in the range of 200-300 keV. The first lens focuses the beam so that it emerges from a crossover point with an amplified angular divergence at least three times the divergence of the initial beam, thereby considerably reducing the necessary column length. The second lens collimates the beam so that it can be directed onto a mask to expose resist on an underlying semiconductor substrate. A series of extraction electrodes are used to provide an initial point source beam with a desired angular expansion, and a specially designed sector magnet is positioned between the extraction mechanism and the first lens to remove particles heavier than H + from the beam. Voltage ratios across the lenses and extraction electrodes can be varied in tandem, permitting control over the final beam energy by a simple voltage adjustment. The beam is aligned with the column axis and then steered into alignment with the mask channeling axis by a pair of octupole lenses.
Inventors
- 👤 Charles M. McKenna
- 👤 James E. Wood
- 👤 John L. Bartelt
- 👤 Ross D. Olney
- 👤 J. William Ward
- 👤 Charles W. Slayman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:59
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J37/3174; H01J2237/00; H01J2237/05; H01J2237/055; H01J2237/15; H01J2237/151; H01J2237/1516; H01J2237/30; H01J2237/303; H01J2237/317; H01J2237/3175; H01J2237/31752; H01J2237/31755; H01J2237/31777; H01J2237/31788
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
124 words
A masked ion beam lithographic system, comprising: an ion source, means for extracting ions from the source and forming the ions into an expanding beam, means for substantially collimating the beam with divergences and dimensions suitable for lithographic exposure, means for positioning a crystalline channeling mask at a substantially fixed angular orientation in the beam path, means for aligning a resist coated substrate at a substantially fixed angular orientation with respect to the mask, means for steering the collimated beam into a fixed alignment with the chaneling axis of the fixed mask, and means for adjusting the position of the substrate generally transverse to the beam to compensate for steering of the beam and to maintain a substantially fixed mask image on the substrate.
Claim 2
Dependent Claim
124 words
A masked ion beam lithographic system, comprising: an ion source, means for extracting ions from the source and forming the ions into an expanding beam, means for substantially collimating the beam with divergences and dimensions suitable for lithographic exposure, means for positioning a crystalline channeling mask at a substantially fixed angular orientation in the beam path, means for aligning a resist coated substrate at a substantially fixed angular orientation with respect to the mask, means for steering the collimated beam into a fixed alignment with the chaneling axis of the fixed mask, and means for adjusting the position of the substrate generally transverse to the beam to compensate for steering of the beam and to maintain a substantially fixed mask image on the substrate.
Claim 3
Dependent Claim
137 words
A mask ion beam lithographic system, comprising: an ion source means for extracting ions from the source and forming the ions into an expanding beam, a sector magnet in the extracted ion path, the magnet being adapted to deflect particles in the beam in accordance with the mass of each particle, the magnet deflecting and transmitting ions of a predetermined mass along a desired expanding beam path having a virtual source, means for substantially collimating the beam with divergences and dimensions suitable for lithographic exposure, means for positioning a crystalline channeling mask at a substantially fixed angular orientation in the beam path, means for aligning a resist coated substrate at a substantially fixed angular orientation with respect to the mask, and means for steering the collimated beam into alignment with the channeling axis of the fixed mask.
Claim 4
Dependent Claim
137 words
A mask ion beam lithographic system, comprising: an ion source means for extracting ions from the source and forming the ions into an expanding beam, a sector magnet in the extracted ion path, the magnet being adapted to deflect particles in the beam in accordance with the mass of each particle, the magnet deflecting and transmitting ions of a predetermined mass along a desired expanding beam path having a virtual source, means for substantially collimating the beam with divergences and dimensions suitable for lithographic exposure, means for positioning a crystalline channeling mask at a substantially fixed angular orientation in the beam path, means for aligning a resist coated substrate at a substantially fixed angular orientation with respect to the mask, and means for steering the collimated beam into alignment with the channeling axis of the fixed mask.
Claim 5
Dependent Claim
95 words
The masked ion beam lithographic system of claim 2, said means for forming the extracted ions into an expanding beam comprising means positioned between the ion source and magnet for forming the ions into a beam with an initial angular expansion, and a lens positioned in the ion path between the magnet and the collimating means and adapted to focus the beam to a crossover with an angular convergence substantially greater than the beam's angular expansion upon exiting the magnet, thereby amplifying the angular expansion of the beam delivered from the magnet beyond the crossover.
Claim 6
Dependent Claim
37 words
The masked ion beam lithographic system of claim 2, the means for steering the collimated beam into alignment with the channeling axis of the mask comprising an octupole deflector positioned between the collimating means and the mask.
Claim 7
Dependent Claim
33 words
The masked ion beam lithographic system of claim 2, the beam collimating means comprising a lens positioned in the beam path and adapted to substantially collimate the beam without deleting substantial portions thereof.
Claim 8
Dependent Claim
47 words
The masked ion beam lithographic system of claim 2, further comprising a plurality of electrodes positioned adjacent the beam path between the extraction and collimating means, said electrodes being adapted to deflect the beam away from the mask during beam blanking periods of a substrate exposure sequence.
Claim 9
Dependent Claim
31 words
The masked ion beam lithographic system of claim 6, said electrodes comprising an octupole deflector which is also adapted to shape and align the beam with respect to the collimating means.
Claim 10
Dependent Claim
33 words
The masked ion beam lithographic system of claim 2, further comprising means for moving the substrate in step and repeat movements relative to the beam to replicate the mask pattern on the substrate.
Claim 11
Dependent Claim
213 words
A masked ion beam lithographic system, comprising: an ion source, means for extracting ions from the source and forming the ions into an expanding beam, the extracting means comprising a pair of electrodes spaced in succession from the ion source, and means for applying a first voltage differential across the electrodes with a relatively lower voltage to the electrode nearer the source and a relatively greater voltage to the electrode more distant from the source, the electrode spacings and applied voltages being selected to extract ions from the source past the electrodes and to impart a predetermined energy level to the extracted ions, means for substantially collimating the beam with divergences and dimensions suitable for lithographic exposure, the collimating means including means for processing the beam across a second voltage differential and thereby amplify the ion energy level by a predetermined amount, means for positioning a crystalline channeling mask at a substantially fixed angular orientation in the beam path, means for varying said first and second voltage differentials in substantially the same ratio to control the beam energy, means for aligning a resist coated substrate at a substantially fixed angular orientation with respect to the mask, and means for steering the collimated beam into alignment with the channeling axis of the fixed mask.
Claim 12
Dependent Claim
213 words
A masked ion beam lithographic system, comprising: an ion source, means for extracting ions from the source and forming the ions into an expanding beam, the extracting means comprising a pair of electrodes spaced in succession from the ion source, and means for applying a first voltage differential across the electrodes with a relatively lower voltage to the electrode nearer the source and a relatively greater voltage to the electrode more distant from the source, the electrode spacings and applied voltages being selected to extract ions from the source past the electrodes and to impart a predetermined energy level to the extracted ions, means for substantially collimating the beam with divergences and dimensions suitable for lithographic exposure, the collimating means including means for processing the beam across a second voltage differential and thereby amplify the ion energy level by a predetermined amount, means for positioning a crystalline channeling mask at a substantially fixed angular orientation in the beam path, means for varying said first and second voltage differentials in substantially the same ratio to control the beam energy, means for aligning a resist coated substrate at a substantially fixed angular orientation with respect to the mask, and means for steering the collimated beam into alignment with the channeling axis of the fixed mask.
Claim 13
Dependent Claim
150 words
A beam forming mechanism for use in a masked ion beam lithographic system, comprising: an H + ion beam source adapted to produce an H + ion beam having a substantially point source, a sector magnet positioned in the beam path to deflect particles in the beam in accordance with the mass of each particle, the magnet deflecting H + ions along a desired beam path to exit the magnet as an expanding beam having an virtual source, and deflecting higher mass particles in the beam along other paths, the magnet being substantially characterized as a 20° sector electromagnet with a 1.5 cm. pole gap, a flat entrance pole face at a tilt angle of substantially +8.2°, and a flat exit pole face at a tilt angle of substantially +5.5°, means for processing the deflected beam to demagnify its virtual source, and optical means for substantially collimating the processed beam.
Claim 14
Dependent Claim
150 words
A beam forming mechanism for use in a masked ion beam lithographic system, comprising: an H + ion beam source adapted to produce an H + ion beam having a substantially point source, a sector magnet positioned in the beam path to deflect particles in the beam in accordance with the mass of each particle, the magnet deflecting H + ions along a desired beam path to exit the magnet as an expanding beam having an virtual source, and deflecting higher mass particles in the beam along other paths, the magnet being substantially characterized as a 20° sector electromagnet with a 1.5 cm. pole gap, a flat entrance pole face at a tilt angle of substantially +8.2°, and a flat exit pole face at a tilt angle of substantially +5.5°, means for processing the deflected beam to demagnify its virtual source, and optical means for substantially collimating the processed beam.
Claim 15
Dependent Claim
84 words
The beam forming mechanism of claim 10, the processing means comprising a first lens adapted to focus the exit beam from the magnet to a crossover with an angular convergence substantially greater than the angular divergence of the beam exiting from the magnet, and the optical means comprising a second lens adapted to substantially collimate the beam beyond its crossover point from the first lens, the second lens being positioned in the beam path at a location corresponding to a desired collimated beam diameter.
Claim 16
Dependent Claim
128 words
A beam forming mechanism for use in a masked ion beam lithographic system, comprising: an ion beam source adapted to produce a beam of a desired ion having a predetermined angular divergence, means for removing particles of different mass than the desired ion from the beam and for redirecting the beam with a virtual source image, a first lens positioned in the beam path to focus the beam to a crossover with an angular convergence substantially greater than said predetermined angular divergence and to demagnify the source image of the beam, and a second lens adapted to substantially collimate the beam beyond its crossover point from the first lens, the second lens being positioned in the beam path at a location corresponding to a desired collimated beam diameter.
Claim 17
Dependent Claim
128 words
A beam forming mechanism for use in a masked ion beam lithographic system, comprising: an ion beam source adapted to produce a beam of a desired ion having a predetermined angular divergence, means for removing particles of different mass than the desired ion from the beam and for redirecting the beam with a virtual source image, a first lens positioned in the beam path to focus the beam to a crossover with an angular convergence substantially greater than said predetermined angular divergence and to demagnify the source image of the beam, and a second lens adapted to substantially collimate the beam beyond its crossover point from the first lens, the second lens being positioned in the beam path at a location corresponding to a desired collimated beam diameter.
Claim 18
Dependent Claim
65 words
The beam forming mechanism of claim 12, the first and second lenses each comprising dual cylinder lenses, and further comprising means for establishing predetermined substantially fixed voltage differential ratios across the entrance and exit cylinders of each lens to shape the beam and accelerate the ions in the beam, and means for varying the absolute values of said voltage differentials while retaining said fixed ratios.
Claim 19
Dependent Claim
70 words
The beam forming mechanism of claim 13, the ion beam source including an extraction exit electrode imparting an initial energy level to the beam ions, and further comprising means for maintaining said electrode at the same voltage level as the entrance cylinder for the first lens, and means for maintaining the exit cylinder for the first lens at the same voltage level as the entrance cylinder for the second lens.
Claim 20
Dependent Claim
49 words
The beam forming mechanism of claim 14, wherein the ion source, extraction electrode/first lens entrance cylinder, and first lens exit cylinder/second lens entrance cylinder are maintained at voltages within the approximate ranges of 200-300 kV, 192-288 kV and 160-240 kV, respectively, relative to the second lens exit cylinder voltage.
Claim 21
Dependent Claim
82 words
The beam forming mechanism of claim 13, wherein the angular divergence of the beam at the entrance to the first lens is approximately 10 mr, the first lens amplifies the beam's angular divergence by a factor of at least three beyond the beam crossover point, the diameter of the beam after collimation by the second lens is at least about 1.7 cm., and the total column length from the beam source through the second lens is in the order of one-two meters.
Claim 22
Dependent Claim
34 words
The beam forming mechanism of claim 13, further comprising a beam aperture surrounding the focal point of the first lens, the aperture having a diameter small enough to limit stray ions in the beam.
Claim 23
Dependent Claim
54 words
The beam forming mechanism of claim 12, further comprising a crystalline channeling mask positioned in the collimated beam path, and an octupole deflector positioned in the collimated beam path between the mask and the second lens, the octupole deflector being adapted to steer the beam into alignment with the channeling axis of the mask.
Claim 24
Independent Claim
94 words
A method for producing a beam suitable for use in a lithographic process, comprising the steps of: forming an expanding ion beam, substantially collimating the beam, holding an aligned lithographic mask and target at a substantially fixed predetermined angular position, steering the collimated beam into a predetermined fixed channeling alignment with the fixed mask, illuminating the target with the beam transmitted through the mask, and adjusting the position of the target generally transverse to the beam to compensate for steering of the beam and to maintain a substantially fixed mask image on the target.
Claim 25
Independent Claim
94 words
A method for producing a beam suitable for use in a lithographic process, comprising the steps of: forming an expanding ion beam, substantially collimating the beam, holding an aligned lithographic mask and target at a substantially fixed predetermined angular position, steering the collimated beam into a predetermined fixed channeling alignment with the fixed mask, illuminating the target with the beam transmitted through the mask, and adjusting the position of the target generally transverse to the beam to compensate for steering of the beam and to maintain a substantially fixed mask image on the target.
Claim 26
Dependent Claim
72 words
The method of claim 19, wherein the beam is formed with an initial angular divergence, and further comprising the step of focusing the beam to a crossover with a greater angular convergence than the initial angular divergence to demagnify the beam's source image, whereby the beam after focusing has an amplified angular divergence and reaches a desired beam size beyond the crossover in a shorter distance than with its initial angular divergence.
Claim 27
Dependent Claim
21 words
The method of claim 20, wherein the beam ions are accelerated to higher energy levels during focusing and again during collimation.
Claim 28
Dependent Claim
32 words
The method of claim 20, wherein the beam is collimated by passing it through a collimating lens which is located a distance beyond the beam crossover corresponding to a desired beam size.
Claim 29
Dependent Claim
29 words
The method of claim 19, further comprising the step of blanking the beam by deflecting it away from a path to the mask prior to the beam being collimated.
Claim 30
Dependent Claim
23 words
The method of claim 21, wherein the mask is a channeling mask, and the beam is steered into alignment with its channeling axis.
Claim 31
Independent Claim
162 words
A method for producing a beam suitable for use in a lithographic process, comprising the steps of: forming an expanding ion beam with an initial angular divergence, the beam including H + ions, passing the initial beam through a sector magnet which is adapted to remove particles with masses greater than H + from the beam, and to transmit the beam as an expanding beam with a virtual source, focusing the beam to a crossover with a greater angular convergence than the initial angular divergence to demagnify the beam's source image, whereby the beam after focusing has an amplified angular divergence and reaches a desired beam size beyond the crossover in a shorter distance than with its initial angular divergence, substantially collimating the beam, holding an aligned lithographic mask and target at a substantially fixed predetermined angular position, steering the collimated beam into a predetermined channeling alignment with the fixed mask, and illuminating the target with the beam transmitted through the mask.
Claim 32
Independent Claim
162 words
A method for producing a beam suitable for use in a lithographic process, comprising the steps of: forming an expanding ion beam with an initial angular divergence, the beam including H + ions, passing the initial beam through a sector magnet which is adapted to remove particles with masses greater than H + from the beam, and to transmit the beam as an expanding beam with a virtual source, focusing the beam to a crossover with a greater angular convergence than the initial angular divergence to demagnify the beam's source image, whereby the beam after focusing has an amplified angular divergence and reaches a desired beam size beyond the crossover in a shorter distance than with its initial angular divergence, substantially collimating the beam, holding an aligned lithographic mask and target at a substantially fixed predetermined angular position, steering the collimated beam into a predetermined channeling alignment with the fixed mask, and illuminating the target with the beam transmitted through the mask.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1991-07-12 | 1992-01-11 | 1992-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-12 | 1996-01-11 | 1996-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-12 | 2000-01-11 | 2000-07-12 | $7700.00 | Window Closed / Lapsed |