US4142132A — Method and means for dynamic correction of electr…

Claim 1

Independent Claim 245 words

An electron beam tube electrostatic deflection system comprising an evacuated housing, electron gun means disposed at one end of the evacuated housing for producing a beam of electrons, lens means secured within the evacuated housing intermediate the electron gun means and the opposite end of the housing and disposed along the path of the beam of electrons for focusing and centering the beam of electrons into a finely focused pencil-like beam of electrons, eight-fold deflector means secured within the housing and disposed about the path of the finely focused beam of electrons, said eight-fold deflector means comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around the center electron beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused electron beam to a desired point on a target plane located at an opposite end of the evacuated housing from the electron gun means, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize electron beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 2

Dependent Claim 245 words

An electron beam tube electrostatic deflection system comprising an evacuated housing, electron gun means disposed at one end of the evacuated housing for producing a beam of electrons, lens means secured within the evacuated housing intermediate the electron gun means and the opposite end of the housing and disposed along the path of the beam of electrons for focusing and centering the beam of electrons into a finely focused pencil-like beam of electrons, eight-fold deflector means secured within the housing and disposed about the path of the finely focused beam of electrons, said eight-fold deflector means comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around the center electron beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused electron beam to a desired point on a target plane located at an opposite end of the evacuated housing from the electron gun means, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize electron beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 3

Dependent Claim 419 words

An electron beam tube electrostatic deflection system according to claim 1 wherein the eight-fold deflector members are plate centered with respect to the x and y axes of the projected target plane and the eight-fold deflector members are disposed such that a first deflector member is centered on the x axis and is identified as number 1, and the remaining 7 eight-fold deflector members are evenly annularly spaced about the center beam axis defined by the intersection of the x and y axes and are consecutively numbered 2 through 8 in a counterclockwise direction from the number 1 deflector as viewed in cross section looking toward the target plane; the deflection electric potentials applied to the respective eight-fold deflector members 1-8 starting from number 1 deflector member are respectively given by the values V x , a(V x + V y ), V y , -a(V x - V y ), -V x , -A(V x + V y ), -V y and a(V x - V y ) where a is a constant substantially equal to √2/2, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V.sub. y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; and the quadrupole and octupole correction electric potentials applied to one set of four eight-fold deflector members comprised by deflector members 1, 3, 5 and 7 are given respectively by the values (V 2c - V), (-V 2c - V), (V 2c - V) and -V 2c - V) and the quadrupole and octupole correction potentials applied to the remaining number of 2, 4, 6 and 8 eight-fold deflector members are given respectively by the values (V 2s + V), (-V 2s + V), (V 2s + V) and (-V 2s + V) where the quadrupole correction electric potentials V 2c and V 2s applied to the said respective sets of four eight-fold deflector members are given by the expression V.sub.2c = [A.sub.2c (V.sub.x.sup.2 - V.sub.y.sup.2)]/V.sub.c and V.sub.3s = (2A.sub.2s V.sub.x V.sub.y)/V.sub.c and the octupole correction voltage V applied to all 8 eight-fold deflector members is given by the expression V = [A.sub.4 (V.sub.x.sup.4 - 6V.sub.x.sup.2 V.sub.y.sup.2 + V.sub.y.sup.4)]/4V.sub.c.sup.3 where A 2c , A 2s and A 4 are constants and -V c is the cathode voltage of the electron gun means measured with respect to the voltage of the deflector means when V x = V y = 0.

Claim 4

Dependent Claim 41 words

An electron beam tube electrostatic deflection system according to claim 1 further including means for applying a dynamic focusing electric potential to the lens means in conjunction with the deflection and correction electric potentials being applied to the eight-fold deflector means.

Claim 5

Dependent Claim 79 words

An electron beam electrostatic deflection system according to claim 2 further including means for applying a dynamic focusing electric potential to the lens means in conjunction with the deflection and correction electric potentials applied to the eight-fold deflector means, the dynamic focusing electric potential being given by the value V.sub.OBJ(c) = V.sub.OBJ(0) + A.sub.DF (V.sub.x.sup.2 + V.sub.y.sup.2)/V.sub.c where A DF is a constant and V OBJ (0) is the uncorrected value of the direct current objective lens supply voltage.

Claim 6

Dependent Claim 65 words

An electron beam tube electrostatic deflection system according to claim 2 wherein said means for applying deflection electric potentials and said means for applying correction electric potentials to the respective eight-fold deflector members are comprised by eight-fold deflection-correction voltage generator means for generating both the deflection potentials and correction potentials simultaneously and applying the combined deflection and correction potentials to the respective eight-fold deflector members.

Claim 7

Dependent Claim 257 words

An electron beam tube electrostatic deflection system according to claim 5 wherein said eight-fold deflector voltage generator means is comprised by respective x and y function generator means for converting the respective x axis and y axis electric address signals to corresponding analog voltages having the values v x , -v x , v y , and -v y , quadrupole-octupole correction voltage generator means responsive at least indirectly to the input x and y axis address signals for deriving the output potentials v, -v, v 2c , v 2s and -v 2s , "a" ratio multiplier means responsive to the outputs from said x and y functions generator means for deriving the potentials av y , -av y , av x , and -av x , and mixer means comprising a plurality of interconnected summing amplifiers responsive to the outputs from said x and y function generator means, said quadrupole-octupole correction voltage generator means, and said "a" ratio multiplier means for combining and deriving eight different combined deflection and correction electric potentials v 1 -v 8 for application to the respective eight-fold deflector members 1-8 wherein v.sub.1 = v.sub.x + v.sub.2c - v, v.sub.2 = av.sub.x + av.sub.y + v.sub.2s + v, v.sub.3 = v.sub.y - v.sub.2c - v, v.sub.4 = -av.sub.x + av.sub.y - v.sub.2s + v, v.sub.5 = -v.sub.x + v.sub.2c - v, v.sub.6 = -av.sub.x - av.sub.y + v.sub.2s + v, v.sub.7 = -v.sub.y - v.sub.2c - v and v.sub.8 = av.sub.x - av.sub.y - v.sub.2s + v where "a" is a constant.

Claim 8

Dependent Claim 103 words

An electron beam tube electrostatic deflection system according to claim 6 wherein the voltages applied to the respective eight-fold deflector members 1-8; namely, V.sub.1 = V.sub.x + V.sub.2c - v, V.sub.2 = a(V.sub.x + V.sub.y) + V.sub.2s + V, v.sub.3 = v.sub.y - V.sub.2c - V, v.sub.4 = -1(v.sub.x - V.sub.y) - V.sub.2s + V, v.sub.5 = -v.sub.x + V.sub.2c - V, v.sub.6 = -a(V.sub.x + V.sub.y) + V.sub.2s + V, v.sub.7 = - v.sub.y = V.sub.2c - V, and V.sub.8 = a(V.sub.2 - V.sub.y) - V.sub.2s + V, are derived from the voltages v 1 -v 8 , respectively, by suitable amplification.

Claim 9

Dependent Claim 287 words

An electron beam tube electrostatic deflection system according to claim 7 wherein said quadrupole-octupole correction voltage generator means comprise first multiplier circuit means responsive to the output from the x function generator means for deriving a signal v x 2 , second multiplier circuit means responsive to the output from the y function generator means for deriving a signal v y 2 , first and second summing circuit means both responsive to said v x 2 signal, first and second operational amplifier means having the transfer functions -(3 + 2√2) and -(3 - 2√2), respectively, connected intermediate the output of second multiplier circuit means and respective second summing input terminals of said first and second summing circuit means respectively for deriving two separate signals having the values -(3 + 2√2) v y 2 and -(3 - 2√2) v y 2 respectively, and supplying the same to the respective first and second summing circuit means, said first and second summing circuit means serving to sum together the v x 2 signals with the signals from the respective first and second operational amplifier means to derive two separate signals having the values v x 2 - (3 + 2√2) v y 2 and v x 2 - (3 - 2√2) v y 2 , respectively, third multiplier circuit means responsive to the outputs from the first and second summing circuit means for multiplying together the two outputs thereof and third operational amplifier means responsive to the product from the third multiplier circuit means and having the transfer function 1/4 C 1 3 A 4 for deriving the octupole correction potential v = 1/2 C.sub.1.sup.3 A.sub.4 (v.sub.x.sup.4 - 6v.sub.x.sup.2 v.sub.y.sup.2 + v.sub.y.sup.4) where A 4 and C 1 are constants.

Claim 10

Dependent Claim 270 words

An electron beam tube electrostatic deflection system according to claim 8 wherein said quadrupole-octupole correction voltage generator means further includes fourth multiplier circuit means responsive to the outputs of said x and y function generator means for deriving a signal v x v y , third summing amplifier means having a first summing input terminal connected to the v x 2 output of the first multiplier circuit means, inverter amplifier means connected between the v y 2 output of the second multiplier means and the second summing input terminal of the third summing circuit means for supplying a signal -v y 2 thereto, said third summing amplifier means serving to derive a signal v x 2 - v y 2 , fourth operational amplifier means having a transfer function C 1 A 2c and responsive to the v x 2 - v y 2 signal from the third summing amplifier means for deriving the quardupole correction potential v 2c = C 1 A 2c (v x 2 - v y 2 ), fifth operational amplifier means having the transfer function 2C 1 A 2s and responsive to the v x v y signal from said fourth multiplier circuit means for deriving the quadrupole correction potential v 2s = 2C 1 A 2s v x v y where C 1 , A 2c and A 2s are constants, and second, third and fourth inverter amplifier means connected respectively to the outputs from the third, fourth and fifth operational amplifier means for deriving the -v octupole correction potential, the -v 2c quadrupole correction potential and the -v 2s quadrupole correction potential, respectively.

Claim 11

Dependent Claim 79 words

An electron beam tube electrostatic deflection system according to claim 9 further including means for applying a dynamic focusing potential to the lens means in conjunction with the deflection and correction electric potentials applied to the eight-fold deflector means, the dynamic focusing electric potential being given by the value V.sub.OBJ(c) = V.sub.OBJ(0) + A.sub.DF (V.sub.x.sup.2 + V.sub.y.sup.2)/V.sub.c where A DF is a constant and V OBJ (0) is the uncorrected value of the direct current objective lens supply voltage.

Claim 12

Dependent Claim 68 words

An electron beam tube electrostatic deflection system according to claim 1 wherein said lens means is comprised by condenser lens means maintained at the same potential as the cathode of the electron gun means and an objective lens means excited by the dynamic focusing potential supplied from said dynamic focus generator means, said condenser lens means being disposed intermediate the objective lens means and the electron gun means.

Claim 13

Dependent Claim 98 words

An electron beam tube electrostatic deflection system according to claim 9 wherein said eight-fold deflector means comprises coarse deflector means for a compound fly's-eye type electron beam tube having both an eight-fold coarse deflector system and a fine deflector system disposed between the target plane and the eight-fold coarse deflector system within the evacuated housing, and wherein the lens means comprises a collimating lens assembly disposed intermediate the electron gun means and the eight-fold coarse deflector system and the lens means further includes fly's-eye type objective lens means interposed between the eight-fold coarse deflector system and the target.

Claim 14

Dependent Claim 153 words

An electron beam tube electrostatic deflection system according to claim 12 wherein the eight-fold coarse deflector system is comprised by two eight-fold deflector sections with each eight-fold deflector section comprised of eight elemental deflector members annularly arrayed around the center electron beam path and with the elemental deflector members of the first section interconnected electrically with the 180° opposed deflector members of the second section whereby the V 1 combined deflection and correction potential is applied to the number 1 eight-fold deflector member of the first section and the number 5 deflector of the second section and the V 2 , V 3 , V 4 , V 5 , V 6 , V 7 and V 8 deflection and correction potential are applied to the respective number 2-8 deflector members of the first section and the number 6, 7, 8, 1, 2, 3 and 4 deflector members of the second section, respectively.

Claim 15

Dependent Claim 55 words

An electron beam tube electrostatic deflection system according to claim 1 further including nonlinear, field distortion correction voltage generator means included in said eight-fold deflector voltage generator means for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 16

Dependent Claim 55 words

An electron beam tube electrostatic deflection system according to claim 13 further including nonlinear, field distortion correction voltage generator means included in said eight-fold deflector voltage generator means for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 17

Dependent Claim 141 words

An electron beam tube electrostatic deflection system according to claim 15 wherein the fine deflection system of the electron beam tube is comprised by a planar array of a multiplicity of fine four-fold deflection assemblies with each four-fold deflection assembly being comprised by four separate, electrically isolated deflector members disposed on four opposed sides of a central electron path through each fine four-fold deflector assembly and the system further includes fine four-fold deflection generator means comprising respective x and y function generator means responsive to input fine x, y addresses from a controller for deriving respective output voltages v FX , v FY , -v FX , -v FY for application, following amplification by amplifier means, to the respective deflector members of the respective fine four-fold deflector assemblies in response to the input fine x, y addresses supplied from the controller.

Claim 18

Dependent Claim 99 words

An electron beam tube electrostatic deflection system according to claim 1 wherein said eight-fold deflector means comprises coarse deflector means for a compound fly's-eye type electron beam tube having both an eight-fold coarse deflector system and a fine deflector system disposed between the target plane and the eight-fold coarse deflector system within the evacuated housing, and wherein the lens means comprises a collimating lens assembly disposed intermediate the electron gun means and the eight-fold coarse deflector system and the lens means further includes a fly's-eye type objective lens means interposed between the eight-fold coarse deflector system and the target.

Claim 19

Dependent Claim 153 words

An electron beam tube electrostatic deflection system according to claim 17 wherein the eight-fold coarse deflector system is comprised by two eight-fold deflector sections with each eight-fold deflector section comprised of eight elemental deflector members annularly arrayed around the center electron beam path and with the elemental deflector members of the first section interconnected electrically with the 180° opposed deflector members of the second section whereby the V 1 combined deflection and correction potential is applied to the number 1 eight-fold deflector member of the first section and the number 5 deflector of the second section and the V 2 , V 3 , V 4 , V 5 , V 6 , V 7 and V 8 deflection and correction potential are applied to the respective number 2-8 deflector members of the first section and the number 6, 7, 8, 1, 2, 3 and 4 deflector members of the second section, respectively.

Claim 20

Dependent Claim 65 words

An electron beam tube electrostatic deflection system according to claim 18 further including "b" factor multiplying means interposed in the interconnection to the second section of the eight-fold coarse deflector means for multiplying the voltages applied to the second section eight-fold deflector members by an adjustable factor "b" prior to application to the second section deflector members for fine tuning the eight-fold coarse deflector system.

Claim 21

Dependent Claim 55 words

An electron beam tube electrostatic deflection system according to claim 19 further including nonlinear, field distortion correction voltage generator means included in said eight-fold deflector voltage generator means for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 22

Dependent Claim 141 words

An electron beam tube electrostatic deflection system according to claim 20 wherein the fine deflection system of the electron beam tube is comprised by a planar array of a multiplicity of fine four-fold deflection assemblies with each four-fold deflection assembly being comprised by four separate, electrically isolated deflector members disposed on four opposed sides of a central electron path through each fine four-fold deflector assembly and the system further includes fine four-fold deflection generator means comprising respective x and y function generator means responsive to input fine x, y addresses from a controller for deriving respective output voltages v FX , v FY , -v FX , -v FY for application, following amplification by amplifier means, to the respective deflector members of the respective fine four-fold deflector assemblies in response to the input fine x, y addresses supplied from the controller.

Claim 23

Dependent Claim 55 words

An electron beam tube electrostatic deflection system according to claim 18 further including nonlinear, field distortion correction voltage generator means included in said eight-fold deflector voltage generator means for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 24

Dependent Claim 141 words

An electron beam tube electrostatic deflection system according to claim 22 wherein the fine deflection system of the electron beam tube is comprised by a planar array of a multiplicity of fine four-fold deflection assemblies with each four-fold deflection assembly being comprised by four separate, electrically isolated deflector members disposed on four opposed sides of a central electron path through each fine four-fold deflector assembly and the system further includes fine four-fold deflection generator means comprising respective x and y function generator means responsive to input fine x, y addresses from a controller for deriving respective output voltages v FX , v FY , -v FX , -v FY for application, following amplification by amplifier means, to the respective deflector members of the respective fine four-fold deflector assemblies in response to the input fine x, y addresses supplied from the controller.

Claim 25

Dependent Claim 56 words

An electron beam tube electrostatic deflection system according to claim 7 wherein said quadrupole-octupole correction voltage generator means is digitally operated and has the input digitally coded x axis and y axis address signals supplied thereto directly for digitally deriving the v, -v, v 2c , -v 2c , v 2s , and -v 2s signals.

Claim 26

Dependent Claim 47 words

An electron beam tube electrostatic deflection system according to claim 24 wherein said digitally operated quadrupole-octupole correction voltage generator means comprises a read only memory look-up table having stored therein precalculated values of v, v 2c , and v 2s for each input x-y axes address location.

Claim 27

Dependent Claim 418 words

An electron beam tube electrostatic deflection system according to claim 1 wherein the eight-fold deflector members are gap-centered with respect to the x and y axes of the projected target plane and are disposed such that the gap between the eighth and the first deflector members is centered on the x axis with the first deflector member being located in the first quadrant and identified as number 1 and the remaining 7 eight-fold deflector members are evenly annularly spaced about the electron beam axis defined by the intersection of the x and y axes and are consecutively numbered 2 through 8 in a counterclockwise direction from the number 1 deflector as viewed in cross section looking toward the target plane from the number 1 deflector and the deflection electric potentials applied to the respective eight-fold deflector members 1-8 starting from number 1 deflector are given respectively by the values (V x + aV y ), (aV x + V y ), (-aV x + V y ), (-V x + aV y ), -V x - aV y ), (-aV x - V y ), (aV x - V y ) and (V x - aV y ) where the constant "a" is substantially equal to √2-1, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; the quadrupole and octupole correction electric potentials applied to the eight-fold deflector members are respectively the values (V 2c + V 2s - V), (-V 2c + V 2s + V), (-V 2c - V 2s - V), (V 2c - V 2s + V), (V 2c + V 2s - V), (-V 2c + V 2s + V), (-V 2c - V 2s - V) and (V 2c - V 2s + V) where V 2c is one of the quadrupole correction voltages and is given by the value V.sub.2c = A.sub.2c [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c] and V 2s is the other quadrupole correction voltage and is given by the value v.sub.2s = (2A.sub.2s V.sub.x V.sub.y)/V.sub.c and V is the octupole correction electric potential applied to all of the eight-fold deflector members and is given by the expression V = A.sub.4 V.sub.x V.sub.y [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c.sup.3 ] and A 2c , A 2s and A 4 are constants and -V c is the cathode voltage of the electron gun means.

Claim 28

Dependent Claim 337 words

An electron beam tube electrostatic deflection system according to claim 26 wherein said means for applying deflection electric potentials and said means for applying correction electric potentials to the respective eight-fold deflector members are comprised by eight-fold deflection-correction voltage generator means for generating both the deflection potentials and correction potentials simultaneously and applying the combined deflection and correction potentials to the respective eight-fold deflector members, said eight-fold deflector voltage generator means is comprised by respective x and y function generator means for converting the respective x axis and y axis electric address signals to corresponding analog voltages having the values v x , -v x , v y , and -v y , quadrupole-octupole correction voltage generator means responsive at least indirectly to the input x and y axis address signals for deriving the output potentials v, -v, v 2c , -v 2c , v 2s and -v 2s , "a" ratio multiplier means responsive to the outputs from said x and y functions generator means for deriving the potentials av y , -av y , av x , and -av x , and mixer means comprising a plurality of interconnected summing amplifiers responsive to the outputs from said x and y function generator means, said quadrupole-octupole correction voltage generator means, and said "a" ratio multiplier means for combining and deriving eight different combined deflection and correction electric potentials V 1 -V 8 for application to the respective eight-fold deflector members 1-8 wherein v.sub.1 = v.sub.x + av.sub.y + v.sub.2c + v.sub.2s - v, v.sub.2 = av.sub.x + v.sub.y - v.sub.2c + v.sub.2s + v, v.sub.3 = -av.sub.x + v.sub.y - v.sub.2c - v.sub.2s - v, v.sub.4 = -v.sub.x + av.sub.y + v.sub.2c - v.sub.2s + v, v.sub.5 = -v.sub.x - av.sub.y + v.sub.2c + v.sub.2s - v, v.sub.6 = -av.sub.x - v.sub.y - v.sub.2c + v.sub.2s + v, v.sub.7 = av.sub.x - v.sub.y - v.sub.2c - v.sub.2s - v, and v.sub.8 = v.sub.x - av.sub.y + v.sub.2c - v.sub.2s + v, where "a" is a constant.

Claim 29

Dependent Claim 127 words

An electron beam tube electrostatic deflection system according to claim 27 wherein the voltages applied to the respective eight-fold deflector members 1-8; namely, V.sub.1 = V.sub.x + aV.sub.y + V.sub.2c + V.sub.2s - V, v.sub.2 = aV.sub.x + V.sub.y - V.sub.2c + V.sub.2s + V, v.sub.3 = -aV.sub.x + V.sub.y - V.sub.2c - V.sub.2s - V, v.sub.4 = -v.sub.x + aV.sub.y + V.sub.2c - V.sub.2s + V, v.sub.5 = -v.sub.x - aV.sub.y + V.sub.2c + V.sub.2s - V, v.sub.6 = -aV.sub.x - V.sub.y - V.sub.2c + V.sub.2s + V, v.sub.7 = aV.sub.x - V.sub.y - V.sub.2c - V.sub.2s - V, and V.sub.8 = V.sub.x - aV.sub.y + V.sub.2c - V.sub.2s + V, are derived from the voltages v 1 - v 8 , respectively, by suitable amplification.

Claim 30

Dependent Claim 55 words

An electron beam tube electrostatic deflection system according to claim 28 wherein said quadrupole-octupole correction voltage generator means is digitally operated and has the input digitally coded x axis and y axis address signals supplied thereto directly for digitally deriving the v, -v, v 2c , -v 2c , v 2s and -v 2s signals.

Claim 31

Dependent Claim 46 words

An electron beam tube electrostatic deflection system according to claim 29 wherein said digitally operated quadrupole-octupole correction voltage generator means comprises a read only memory look-up table having stored therein precalculated values of v, v 2c and v 2s for each input x-y axes address location.

Claim 32

Independent Claim 252 words

A method of correcting for electron beam aberrations in an electron beam tube electrostatic deflection system which comprises an evacuated housing, electron gun means disposed at one end of the evacuated housing for producing a beam of electrons, lens means secured within the evacuated housing intermediate the electron gun means and the opposite end of the housing and disposed along the path of the beam of electrons for focusing and centering the beam of electrons into a finely focused pencil-like beam of electrons, eight-fold deflector means secured within the housing and disposed about the path of the finely focused beam of electrons, said eight-fold deflector means comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around the center electron beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused electron beam to a desired point on a target plane located at an opposite end of the evacuated housing from the electron gun means, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize electron beam spot aberration at the target plane; said method of correcting for electron beam aberration otherwise produced during electrostatic deflection of the electron beam comprising applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and applying an octupole correction electric potential to all eight-fold deflector members.

Claim 33

Independent Claim 252 words

A method of correcting for electron beam aberrations in an electron beam tube electrostatic deflection system which comprises an evacuated housing, electron gun means disposed at one end of the evacuated housing for producing a beam of electrons, lens means secured within the evacuated housing intermediate the electron gun means and the opposite end of the housing and disposed along the path of the beam of electrons for focusing and centering the beam of electrons into a finely focused pencil-like beam of electrons, eight-fold deflector means secured within the housing and disposed about the path of the finely focused beam of electrons, said eight-fold deflector means comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around the center electron beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused electron beam to a desired point on a target plane located at an opposite end of the evacuated housing from the electron gun means, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize electron beam spot aberration at the target plane; said method of correcting for electron beam aberration otherwise produced during electrostatic deflection of the electron beam comprising applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and applying an octupole correction electric potential to all eight-fold deflector members.

Claim 34

Dependent Claim 350 words

The method of correcting for aberrations in an electron beam tube electrostatic deflection system according to claim 31 wherein the eight-fold deflector members are plate-centered with respect to the x and y axes of the projected target plane and the eight-fold deflector members are disposed such that a first deflector member is centered on the x axis and the remaining seven eight-fold deflector members are evenly annularly spaced about the center electron beam axis defined by the intersection of the x and y axes; the deflection electric potentials applied to the respective eight-fold deflector members starting from the first deflector member are respectively given by the values V x , a(V x + V y ), V y , -a(V x - V y ), -V x , -a(V x + V y ), -V y and a(V x - V y ) where a is substantially equal to √2/2, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; and the quadrupole and octupole correction electric potentials applied to one set of four eight-fold deflector members are given respectively by the values (V 2c - V), (-V 2c - V), (V 2c - V) and (-V 2c - V) and the quadrupole and octupole correction potentials applied to the remaining eight-fold deflector members are given respectively by the values (V 2s + V), (-V 2s + V), (V 2s + V) and (-V 2s + V) where the quadrupole correction electric potentials V 2c and V 2s applied to the said respective sets of 4 eight-fold deflector members are given by the expression V.sub.2c = [A.sub.2c (V.sub.x.sup.2 - V.sub.y.sup.2)]/V.sub.c and V.sub.2s = (2A.sub.2s V.sub.x V.sub.y)/V.sub.c and the octupole correction voltage V is given by the expression V = [A.sub.4 (V.sub.x.sup.4 - 6V.sub.x.sup.2 V.sub.y.sup.2 + V.sub.y.sup.4)]/4V.sub.c.sup.3 where A 2c , A 2s and A 4 are constants and -V c is the cathode voltage of the electron gun means.

Claim 35

Dependent Claim 85 words

The method of correcting for aberrations in an electron beam tube electrostatic deflection system according to claim 31 further including applying a dynamic focusing electric potential to the lens means in conjunction with the deflection and correction electric potentials applied to the eight-fold deflector means, the dynamic focusing electric potential being given by the value V.sub.OBJ(c) = V.sub.OBJ(O) + A.sub.DF (V.sub.x.sup.2 + V.sub.y.sup.2)/V.sub.c where A DF is a constant and V OBJ (O) is the uncorrected value of the direct current objective lens supply voltage.

Claim 36

Dependent Claim 274 words

The method of correcting for aberrations in an electron beam tube electrostatic deflection system according to claim 31 wherein both the deflection potentials and correction potentials are generated simultaneously and combined for simultaneously applying the combined deflection and correction potentials to the respective eight-fold deflector members and wherein the respective x axis and y axis electric address signals are converted to corresponding analog voltages having the values v x , -v x and v y , -v y , the analog voltages v x and v y are multiplied and processed pursuant to suitable transfer functions to derive the octupole and quadrupole correction potentials v, -v, -v 2c , v 2s and -v 2s , the analog voltages v x , -v x , v y and -v y are multiplied by suitable ratios "a" to derive the potentials av y , -av y , av x and -av x , and the potentials thus obtained suitably combined to derive eight different combined deflection and correction electric potentials v 1 -v 8 for application to the respective eight-fold deflector members wherein v 1 = v x + v 2c - v v 2 = av x + av y + v 2s + v v 3 = v y - v 2c - v v 4 = -av x - av y - v 2s + v v 5 = -v x + v 2c - v v 6 = -av x - av y + v 2s + v v 7 = -v y - v 2c - v and v 8 = av x - av y - v 2s + v

Claim 37

Dependent Claim 185 words

The method of correcting for aberrations in an electron beam tube electrostatic deflection system according to claim 34 wherein the octupole correction potential v is produced by multiplying the v x deflection signal by itself to derive a signal v x 2 , multiplying the v y deflection signal by itself to derive a signal v y 2 , separately multiplying the v y 2 signal by factors -(3 + √2) and -(3 - 2√2) in two separate operations to derive in two separate signals -(3 + √2) v y 2 and -(3 - 2√2) v y 2 , summing each of the last mentioned signals together with the signal v x 2 to derive two signals v x 2 - (3 + 2√2) v y 2 and v x 2 - (3 - 2√2) v y 2 , multiplying the last two mentioned signals together and thereafter multiplying their product times the factor 1/4 C 1 3 A 4 to derive the octupole correction voltage v = 1/4 C.sub.1.sup.3 A.sub.4 (v.sub.x.sup.4 - 6v.sub.x.sup.2 v.sub.y.sup.2 + v.sub.y.sup.4) where A 4 and C 1 are constants.

Claim 38

Dependent Claim 172 words

The method of correcting for aberrations in an electron beam tube according to claim 35 further including the steps of multiplying the v x and v y deflection signals by each other to derive a signal v x v y , multiplying the v x v y signal by a factor 2C 1 A 2s to derive the quadrupole correction potential v.sub.2s = 2C.sub.1 A.sub.2s v.sub.x v.sub.y where A 2s is a constant, inverting the v y 2 signal to derive a signal -v y 2 , summing the signals v x 2 and -v y 2 to derive a signal v x 2 - v y 2 , and multiplying the v x 2 - v y 2 signal by a factor C 1 A 2c to derive the quadrupole correction potentials v.sub.2c = C.sub.1 A.sub.2c (v.sub.x.sup.2 - v.sub.y.sup.2) where A 2c is a constant, and inverting the respective v, v 2s and v 2c potentials to derive the octupole and quadrupole correction potentials -v, -v 2s and -v 2c .

Claim 39

Dependent Claim 381 words

The method of correcting for aberrations in an electron beam tube electrostatic deflection system according to claim 31 wherein the eight-fold deflector members are gap-centered with respect to the x and y axes of the projected target plane and are disposed such that the gap between the eighth and the first deflector members is centered on the x axis and the first deflector member being located in the first quadrant and the remaining seven eight-fold deflector members are evenly annularly spaced about the electron beam axis and defined by the intersection of the x and y axes; the deflection electric potentials applied to the respective eight-fold deflector members starting from the first deflector are given respectively by the values (V x + aV y ), (aV x + V y ), (-aV x + V y ), (-V x + aV y ), (-V x - aV y ), (-aV x - V y ) and (aV x - aV y ) where a is substantially equal to √2-1, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; the quadrupole and octupole correction electric potentials applied to the eightfold deflector members are respectively the values (V 2c + V 2s - V), (-V 2c + V 2s + V), (-V 2c - V 2s - V), (V 2c - V 2s + V), (V 2c + V 2s - V), (-V 2c + V 2s + V), (-V 2c - V 2s - V) and (V 2c - V 2s + V) where V 2c is one of the quadrupole correction voltages and is given by the value V.sub.2c = A.sub.2c [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c ] and V 2s is the other quadrupole correction voltage and is given by the value V.sub.2s = (2A.sub.2s V.sub.x V.sub.y)/V.sub.c and V is the octupole correction electric potential applied to all of the eight-fold deflector members and is given by the expression V = A.sub.4 V.sub.x V.sub.y [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c.sup.3 ] and A 2c , A 2s and A 4 are constants and -V c is the cathode voltage of the electron gun means.

Claim 40

Dependent Claim 46 words

The method of correcting for aberrations in an electron beam tube electrostatic deflection system according to claim 37 further including applying a dynamic focusing electric potential to the lens means in conjunction with the deflection and correction electric potentials being applied to the eight-fold deflector means.

Claim 41

Dependent Claim 315 words

An octupole correction potential signal generator for an electron beam tube electrostatic deflection system comprising first multiplier circuit means responsive to a deflection voltage signal v x for multiplying the v x signal by itself to derive a signal v x 2 , second multiplier circuit means responsive to a deflection voltage signal v y for multiplying the v y signal by itself to derive a signal v y 2 , first and second summing amplifier means both responsive to said v x 2 signal, first and second operational amplifier means having the transfer functions -(3 + 2√2) and -(3 - 2√2) respectively connected intermediate the output of the second multiplier circuit means and the second summing input terminals of said first and second summing circuit means respectively for deriving two separate signals having the values -(3 + 2√2) v y 2 and -(3 - 2√2) v y 2 respectively and supplying the same to the respective first and second summing circuit means, said first and second summing circuit means serving to sum together the v x 2 signals with the signals from the respective first and second operational amplifier means to derive two separate signals having the values v.sub.x.sup.2 - (3 + 2√2) v.sub.y.sup.2 and v.sub.x.sup.2 - (3 - 2√2) v.sub.y.sup.2, third multiplier circuit means responsive to the outputs from the first and second summing circuit means for multiplying together the two outputs thereof and third operational amplifier means responsive to the product from the third multiplier circuit means and having the transfer function 1/4 C 1 3 A 4 for deriving the octupole correction potential v = 1/4 C.sub.1.sup.3 A.sub.4 (v.sub.x.sup.4 - 6v.sub.x.sup.2 v.sub.y.sup.2 + v.sub.y.sup.4) where C 1 = G/V c = gain G of deflection amplifiers divided by the negative of the cathode voltage V c of the electron gun of the electron beam tube and A 4 is a constant.

Claim 42

Dependent Claim 315 words

An octupole correction potential signal generator for an electron beam tube electrostatic deflection system comprising first multiplier circuit means responsive to a deflection voltage signal v x for multiplying the v x signal by itself to derive a signal v x 2 , second multiplier circuit means responsive to a deflection voltage signal v y for multiplying the v y signal by itself to derive a signal v y 2 , first and second summing amplifier means both responsive to said v x 2 signal, first and second operational amplifier means having the transfer functions -(3 + 2√2) and -(3 - 2√2) respectively connected intermediate the output of the second multiplier circuit means and the second summing input terminals of said first and second summing circuit means respectively for deriving two separate signals having the values -(3 + 2√2) v y 2 and -(3 - 2√2) v y 2 respectively and supplying the same to the respective first and second summing circuit means, said first and second summing circuit means serving to sum together the v x 2 signals with the signals from the respective first and second operational amplifier means to derive two separate signals having the values v.sub.x.sup.2 - (3 + 2√2) v.sub.y.sup.2 and v.sub.x.sup.2 - (3 - 2√2) v.sub.y.sup.2, third multiplier circuit means responsive to the outputs from the first and second summing circuit means for multiplying together the two outputs thereof and third operational amplifier means responsive to the product from the third multiplier circuit means and having the transfer function 1/4 C 1 3 A 4 for deriving the octupole correction potential v = 1/4 C.sub.1.sup.3 A.sub.4 (v.sub.x.sup.4 - 6v.sub.x.sup.2 v.sub.y.sup.2 + v.sub.y.sup.4) where C 1 = G/V c = gain G of deflection amplifiers divided by the negative of the cathode voltage V c of the electron gun of the electron beam tube and A 4 is a constant.

Claim 43

Dependent Claim 198 words

A combined quadrupole-octupole correction potential signal generator for an electron beam tube electrostatic deflection system according to claim 39 further including fourth multiplier circuit means responsive to the v x and v y deflection signal potentials for deriving a signal v x v y , third summing amplifier means having a first summing input terminal connected to the v x 2 output of the first multiplier circuit means, inverter amplifier means connected between the v y 2 output of the second multiplier circuit means and the second summing input terminal of the third summing circuit means for supplying a signal -v y 2 thereto, said third summing amplifier means serving to derive a signal v x 2 - v y 2 , fourth operational amplifier means having a transfer function C 1 A 2c and responsive to the v x 2 - v y 2 signal for deriving the quadrupole correction potential v.sub.2c = C.sub.1 A.sub.2c (v.sub.x.sup.2 - v.sub.y.sup.2), fifth operational amplifier means having the transfer function 2C 1 A 2s and responsive to the v x v y signal from said fourth multiplier circuit means for deriving the quadrupole correction potential v.sub.2s = 2C.sub.1 A.sub.2s V.sub.x v.sub.y.

Claim 44

Dependent Claim 51 words

An quadrupole-octupole generator according to claim 40 further including second, third and fourth inverter amplifier means connected respectively to the outputs from the third, fourth and fifth operational amplifier means for deriving the -v octupole corrected potential, the -v 2c quadrupole correction potential and the -v 2s quadrupole correction potential, respectively.

Claim 45

Dependent Claim 194 words

An electron beam tube electrostatic deflection system comprising an eight-fold deflector assembly for securement within an evacuated housing in a manner so as to be disposed about the path of a finely focused beam of electrons, said eight-fold deflector assembly comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around a center axis defining the electron beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused electron beam to a desired point on a target plane located at an opposite end of the evacuated housing from the source of the electron beam, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize electron beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 46

Dependent Claim 194 words

An electron beam tube electrostatic deflection system comprising an eight-fold deflector assembly for securement within an evacuated housing in a manner so as to be disposed about the path of a finely focused beam of electrons, said eight-fold deflector assembly comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around a center axis defining the electron beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused electron beam to a desired point on a target plane located at an opposite end of the evacuated housing from the source of the electron beam, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize electron beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 47

Dependent Claim 70 words

An electron beam tube electrostatic deflection system according to claim 42 wherein said deflector members comprise substantially trapezoidal-shaped members of equal dimension whereby each member occupies an equal proportionate part of the arc of a cross-sectional circle along the axial length of the eight-fold deflector assembly and the assembly is substantially horn-shaped in sectional configuration whereby the outlet end of the assembly is of greater diameter than the inlet end.

Claim 48

Dependent Claim 36 words

An electron beam tube electrostatic deflection system according to claim 43 wherein the deflector members are arcuately-shaped with the center axis defining the electron beam path defining the center of the arc of each deflector member.

Claim 49

Dependent Claim 351 words

An electron beam tube electrostatic deflection system according to claim 44 wherein the eight-fold deflector members are plate centered with respect to the x and y axes of the projected target plane and the eight-fold deflector members are disposed such that a first deflector member is centered on the x axis and the remaining seven eight-fold deflector members are evenly annularly spaced about the center beam axis defined by the intersection of the x and y axes; the deflection electric potentials applied to the respective eight-fold deflector members starting from the first deflector member are respectively given by the values V x , a(V x + V y ), V y , -a(V x - V y ), -V x , -a(V x + V y ), -V y and a(V x - V y ) where a is substantially equal to √2/2, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; and the quadrupole and octupole correction electric potentials applied to one set of four eight-fold deflector members are given respectively by the values (V 2c - V), (-V 2c - V), (V 2c - V) and (-V 2c - V) and the quadrupole and octupole correction potentials applied to the remaining eight-fold deflector members are given respectively by the values (V 2s + V), (-V 2s + V), (V 2s + V) and (-V 2s + V) where the quadrupole correction electric potentials V 2c and V 2s applied to the said respective sets of four eight-fold deflector members are given by the expression V.sub.2c = [(A.sub.2c (V.sub.x.sup.2 - V.sub.y.sup.2))/V.sub.c ] and V.sub.2s = (2A.sub.2s V.sub.x V.sub.y)/V.sub.c and the octupole correction voltage V applied to all 8 eight-fold deflector members is given by the expression V = [A.sub.4 (V.sub.x.sup.4 - 6V.sub.x.sup.2 V.sub.y.sup.2 + V.sub.y.sup.4)]/4V.sub.c.sup.3 where A 2c , A 2s and A 4 are constant and -V c is the cathode voltage of the electron gun means.

Claim 50

Dependent Claim 377 words

An electron beam tube electrostatic deflection system according to claim 44 wherein the eight-fold deflector members are gap-centered with respect to the x and y axes of the projected target plane and are disposed such that the gap between the eighth and the first deflector members is centered on the x axis with the first deflector member being located in the first quadrant and the remaining seven eight-fold deflector members are evenly annularly spaced about the electron beam axis defined by the intersection of the x and y axes and the deflection electric potentials applied to the respective eight-fold deflector members starting from the first deflector are given respectively by the values (V x + aV y ), (aV x + V y ), (-aV x + V y ), (-V x + aV y ), (-V x - aV y ), (-aV x - V y ), (aV x - V y ) and (V x - aV y ) where a is substantially equal to √2-1, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; the quadrupole and octupole correction electric potentials applied to the eight-fold deflector members are respectively the values (V 2c + V 2s - V), (-V 2c + V 2s + V), (-V 2c - V 2s - V), (V 2c - V 2s + V), (V 2c + V 2s - V), (-V 2c + V 2s + V), (V 2c - V 2s - V) and (V 2c - V 2s + V) where V 2c is one of the quadrupole correction voltages and is given by the value V.sub.2c = A.sub.2 [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c ] and V 2s is the other quadrupole correction voltage and is given by the value V.sub.2s = (2A.sub.2 V.sub.x V.sub.y)/V.sub.c and V is the octupole correction electric potential applied to all of the eight-fold deflector members and is given by the expression V = A.sub.4 V.sub.x V.sub.y [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c.sup.3 ] and A 2 and A 4 are constants and -V c is the cathode voltage of the electron gun means.

Claim 51

Dependent Claim 65 words

An electron beam tube electrostatic deflection system according to claim 42 wherein said means for applying deflection electric potentials and said means for applying correction electric potentials to the respective eight-fold deflector members are comprised by eight-fold deflection-correction voltage generator means for generating both the deflection potentials and correction potentials simultaneously and applying the combined deflection and correction potentials to the respective eight-fold deflector members.

Claim 52

Dependent Claim 276 words

An electron beam tube electrostatic deflection system according to claim 47 wherein said eight-fold deflector voltage generator means is comprised by respective x and y function generator means for converting the respective x axis and y axis electric address signals to corresponding analog voltages having the values v x , -v x , v y , and -v y , quadrupole-octupole correction voltage generator means responsive at least indirectly to the input x and y axis address signals for deriving the output potentials v, -v, v 2c , -v 2c , v 2s and -v 2s , "a" ratio multiplier means responsive to the outputs from said x and y functions generator means for deriving the potentials a v y , -av y , av x , and -av x , and mixer means comprising a plurality of interconnected summing amplifiers responsive to the outputs from said x and y function generator means, said quadrupole-octupole correction voltage generator means, and said "a" ratio multiplier means for combining and deriving eight different combined deflection and correction electric potentials v 1 -v 8 for application to the respective eight-fold deflector members wherein v.sub.1 = v.sub.x + v.sub.2c - v, v.sub.2 = av.sub.x + av.sub.y + v.sub.2s + v, v.sub.3 = v.sub.y - v.sub.2c - v, v.sub.4 = -av.sub.x + av.sub.y - v.sub.2s + v, v.sub.5 = -v.sub.x + v.sub.2c - v, v.sub.6 = -av.sub.x - av.sub.y + v.sub.2s + v, v.sub.7 = -v.sub.y - v.sub.2c - v and v.sub.8 = av .sub.x - av.sub.y - v.sub.2s + v where "a" is the ratio of the v x and v y voltage values applied to the even-numbered deflection members.

Claim 53

Dependent Claim 207 words

An electron beam tube electrostatic deflection system according to claim 48 wherein the eight-fold deflector assembly comprises an eight-fold coarse deflector system for a compound fly's-eye type electron beam tube and includes two eight-fold deflector sections with each eight-fold deflector section comprised of eight elemental deflector members annularly arrayed around the center electron beam path and with the elemental deflector members of the first section interconnected electrically with the 180° opposed deflector members of the second section whereby the v 1 voltage is amplified to derive the V 1 combined deflection and correction potential which is applied to the number 1 eight-fold deflector member of the first section and the number 5 deflector of the second section and similarly the v 1 , v 2 , v 3 , v 4 , v 5 , v 6 , v 7 , and v 8 voltages are amplified to derive the V 2 , V 3 , V 4 , V 5 , V 6 , V 7 and V 8 deflection and correction potentials respectively which are applied to the respective number 2-8 deflector members of the first section and the number 6, 7, 8, 1, 2, 3 and 4 deflector members of the second section, respectively.

Claim 54

Dependent Claim 397 words

An electron beam tube electrostatic deflection system according to claim 49 wherein the eight-fold deflector members are plate-centered with respect to the x and y axes of the projected target plane and the eight-fold deflector members are disposed such that a first deflector member is centered on the x axis and is identified as number 1, and the remaining 7 eight-fold deflector members are evenly annularly spaced about the center beam axis defined by the intersection of the x and y axes and are consecutively numbered 2 through 8 in a counter-clockwise direction from the number 1 deflector as viewed in cross section looking toward the target plane; the deflection electric potentials applied to the respective eight-fold deflector members 1-8 starting from number 1 deflector member are respectively given by the values V x , a(V x + V y ), V y , -a(V x - V y ), -V x , -a(V x + V y ), -V y and a(V x - V y ) where a is substantially equal to √2/2, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; and the quadrupole and octupole correction electric potentials applied to one set of four eight-fold deflector members comprised by deflector members 1, 3, 5 and 7 are given respectively by the values (V 2c - V), (-V 2c - V), (V 2c - V) and (-V 2c - V) and the quadrupole and octupole correction potentials applied to the remaining number 2, 4, 6 and 8 eight-fold deflector members are given respectively by the values (V 2s + V), (-V 2s + V), (V 2s + V) and (-V 2s + V) where the quadrupole correction electric potentials V 2c and V 2s applied to the said respective sets of four eight-fold deflector members are given by the expression V.sub.2c = [A.sub.2c (V.sub.x.sup.2 - V.sub.y.sup.2)]/V.sub.c and V.sub.2s = (2A.sub.2s V.sub.x V.sub.y)/V.sub.c and the octupole correction voltage V applied to all 8 eight-fold deflector members is given by the expression V = [A.sub.4 (V.sub.x.sup.4 - 6V.sub.x.sup.2 V.sub.y.sup.2 + V.sub.y.sup.4)]/4V.sub.c.sup.3 where A 2c , A 2s and A 4 are constants and -V c is the cathode voltage of the electron gun means.

Claim 55

Dependent Claim 65 words

An electron beam tube electrostatic deflection system according to claim 50 further including "b" factor multiplying means interposed in the interconnection to the second section of the eight-fold coarse deflector means for multiplying the voltages applied to the second section eight-fold deflector members by an adjustable factor "b" prior to application to the second section deflector members for fine tuning the eight-fold coarse deflector system.

Claim 56

Dependent Claim 60 words

An electron beam tube electrostatic deflection system according to claim 51 further including nonlinear, field distortion correction voltage generator means included with said means for applying correction electric potentials to the respective members for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 57

Dependent Claim 60 words

An electron beam tube electrostatic deflection system according to claim 50 further including nonlinear, field distortion correction voltage generator means included with said means for applying correction electric potentials to the respective members for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 58

Dependent Claim 60 words

An electron beam tube electrostatic deflection system according to claim 48 further including nonlinear, field distortion correction voltage generator means included with said means for applying correction electric potentials to the respective members for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 59

Dependent Claim 343 words

An electron beam tube electrostatic deflection system according to claim 47 wherein said eight-fold deflector voltage generator means is comprised by respective x and y function generator means for converting the respective x axis and y axis electric address signals to corresponding analog voltages having the values v x , -v x , v y , and -v y , quadrupole-octupole correction voltage generator means responsive at least indirectly to the input x and y axis address signals for deriving the output potentials v, -v, v 2c , -v 2c , v 2s and -v 2s , "a" ratio multiplier means responsive to the outputs from said x and y functions generator means for deriving the potentials av y , -av y , av x , and -av x , and mixer means comprising a plurality of interconnected summing amplifiers responsive to the outputs from said x and y function generator means, said quadrupole-octupole correction voltage generator means, and said "a" ratio multiplier means for combining and deriving eight different combined deflection and correction electric potentials v 1 -v 8 for application to the respective eight-fold deflector members wherein v 1 = v x + av y + v 2c + v 2s - v, v 2 = av x + v y - v 2c + v 2s + v, v 3 = -av x + v y - v 2c - v 2s - v, v 4 = -v x + av y + v 2c - v 2s + v, v 5 = -v x - av y + v 2c + v 2s - v, v 6 = -av x - v y - v 2c + v 2s + v, v 7 = av x - v y - v 2c - v 2s - v and v 8 = v x - av y + v 2c - v 2s + v where "a" is the ratio of the v x voltage values applied to the y-deflection members and v y voltage applied to the x-deflection members.

Claim 60

Dependent Claim 207 words

An electron beam tube electrostatic deflection system according to claim 55 wherein the eight-fold deflector assembly comprises an eight-fold coarse deflector system for a compound flys-eye type electron beam tube and includes two eight-fold deflector sections with each eight-fold deflector section comprised of eight elemental deflector members annularly arrayed around the center electron beam path and with the elemental deflector members of the first section interconnected electrically with the 180° opposed deflector members of the second section whereby the V 1 voltage is amplified to derive the V 1 combined deflection and correction potential which is applied to the number 1 eight-fold deflector member of the first section and the number 5 deflector of the second section and similarly the v 1 , v 2 , v 3 , v 4 , v 5 , v 6 , v 7 , and v 8 voltages are amplified to derive the V 2 , V 3 , V 4 , V 5 , V 6 , V 7 and V 8 deflection and correction potentials respectively which are applied to the respective number 2-8 deflector members of the first section and the number 6, 7, 8, 1, 2, 3 and 4 deflector members of the second section, respectively.

Claim 61

Dependent Claim 377 words

An electron beam tube electrostatic deflection system according to claim 56 wherein the eight-fold deflector members are gap-centered with respect to the x and y axes of the projected target plane and are disposed such that the gap between the eighth and the first deflector members is centered on the x axis with the first deflector member being located in the first quadrant and the remaining seven eight-fold deflector members are evenly annularly spaced about the electron beam axis defined by the intersection of the x and y axes and the deflection electric potentials applied to the respective eight-fold deflector members starting from the first deflector are given respectively by the values (V x + aV y ), (aV x + V y ), (-aV x + V y ), (-V x + aV y ), (-V x -aV y ), (-aV x - V y ), (aV x - V y ) and (V x - aV y ) where a is substantially equal to √2-1, V x is the analog deflection voltage value corresponding to a desired x axis address point on the target plane and V y is the analog deflection voltage value corresponding to a desired y axis address point on the target plane; the quadrupole and octupole correction electric potentials applied to the eight-fold deflector members are respectively the values (V 2c + V 2s - V), (-V 2c + V 2s + V), (-V 2c - V 2s - V), (V 2c - V 2s + V) (V 2c + V 2s - V), (- V 2c + V 2s + V), (-V 2c - V 2s - V) and (V 2c - V 2s + V) where V 2c is one of the quadrupole correction voltages and is given by the value V.sub.2c = A.sub.2 [V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c ] and V 2s is the other quadrupole correction voltage and is given by the value V.sub.2s = (2A.sub.2 V.sub.x V.sub.y)/V.sub.c and V is the octupole correction electric potential applied to all of the eight-fold deflector members and is given by the expression V = A.sub.4 V.sub.x V.sub.y [(V.sub.x.sup.2 - V.sub.y.sup.2)/V.sub.c.sup.3 ] and A 2 and A 4 are constants and -V c is the cathode voltage of the electron gun means.

Claim 62

Dependent Claim 65 words

An electron beam tube electrostatic deflection system according to claim 57 further including "b" factor multiplying means interposed in the interconnection to the second section of the eight-fold coarse deflector means for multiplying the voltages applied to the second section eight-fold deflector members by an adjustable factor "b" prior to application to the second section deflector members for fine tuning the eight-fold coarse deflector system.

Claim 63

Dependent Claim 60 words

An electron beam tube electrostatic deflection system according to claim 58 further including nonlinear, field distortion correction voltage generator means included with said means for applying correction electric potentials to the respective members for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 64

Dependent Claim 60 words

An electron beam tube electrostatic deflection system according to claim 57 further including nonlinear, field distortion correction voltage generator means included with said means for applying correction electric potentials to the respective members for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 65

Dependent Claim 60 words

An electron beam tube electrostatic deflection system according to claim 55 further including nonlinear, field distortion correction voltage generator means included with said means for applying correction electric potentials to the respective members for linearizing the actual x and y axis deflection of the electron beam to cause the deflection to be linearly proportional to the x and y addresses.

Claim 66

Dependent Claim 252 words

A charged particle beam tube electrostatic deflection system comprising an evacuated housing, gun means disposed at one end of the evacuated housing for producing a beam of charged particles, lens means secured within the evacuated housing intermediate the gun means and the opposite end of the housing and disposed along the path of the beam of charged particles for focusing and centering the beam of charged particles into a finely focused pencil-like beam of charged particles, eight-fold deflector means secured within the housing and disposed about the path of the finely focused beam of charged particles, said eight-fold deflector means comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around the center charged particle beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused charged particle beam to a desired point on a target plane located at an opposite end of the evacuated housing from the electron gun means, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize charged particle beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to respective ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 67

Dependent Claim 252 words

A charged particle beam tube electrostatic deflection system comprising an evacuated housing, gun means disposed at one end of the evacuated housing for producing a beam of charged particles, lens means secured within the evacuated housing intermediate the gun means and the opposite end of the housing and disposed along the path of the beam of charged particles for focusing and centering the beam of charged particles into a finely focused pencil-like beam of charged particles, eight-fold deflector means secured within the housing and disposed about the path of the finely focused beam of charged particles, said eight-fold deflector means comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around the center charged particle beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused charged particle beam to a desired point on a target plane located at an opposite end of the evacuated housing from the electron gun means, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize charged particle beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to respective ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 68

Dependent Claim 200 words

A charged particle beam tube electrostatic deflection system comprising an eight-fold deflector assembly for securement within an evacuated housing in a manner so as to be disposed about the path of a finely focused beam of charged particles, said eight-fold deflector assembly comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around a center axis defining the charged particle beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused charged particle beam to a desired point on a target plane located at an opposite end of the evacuated housing from the source of the charged particle beam, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize charged particle beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Claim 69

Dependent Claim 200 words

A charged particle beam tube electrostatic deflection system comprising an eight-fold deflector assembly for securement within an evacuated housing in a manner so as to be disposed about the path of a finely focused beam of charged particles, said eight-fold deflector assembly comprising eight electrically conductive spaced-apart members which are electrically isolated one from the other and annularly arranged around a center axis defining the charged particle beam path, means for applying deflection electric potentials to the respective members of the eight-fold deflector means for electrostatically deflecting the finely focused charged particle beam to a desired point on a target plane located at an opposite end of the evacuated housing from the source of the charged particle beam, and means for applying correction electric potentials to the respective members of the eight-fold deflector means in conjunction with the deflection electric potentials to minimize charged particle beam spot aberration at the target plane, said means for applying correction electric potentials to the respective members of the eight-fold deflector means comprising means for applying two different quadrupole correction electric potentials to selected ones of the eight-fold deflector members and means for applying an octupole correction electric potential to all eight deflector members.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1982-02-26	1982-08-28	1983-02-27	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1986-02-26	1986-08-28	1987-02-27	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1990-02-26	1990-08-28	1991-02-27	$7700.00	Window Closed / Lapsed

Method and means for dynamic correction of electrostatic deflector for electron beam tube

Abstract

Inventors

Bibliographic Details

Claims Analysis

References Cited (Backward Citations)

USPTO Annuity & Maintenance Windows

Assigned Categories & Tags

Assign Category Tag