US3845312A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Particle accelerator producing a uniformly expanded particle beam of uniform cross-sectioned density
Assignee: Texas Instruments Inc
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Filing: 1972-07-13
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Granted: 1974-10-29
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Expires: 1992-07-13
Abstract
Abstract A particle accelerator useful for ion implantation using a high density ion source is provided with a means for increasing the cross-sectional area of the beam, a means for modifying the cross-sectional density of the beam to achieve a uniform particle density at the target area and a means for modifying particle trajectories and target holder so that the particles strike the substrate with a directed angle within 4* of parallel when they strike the plane of the target area.
Inventors
- 👤 R Allison
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3171; G; G21; G21K; G21K1/00; G21K1/08; G21K1/093; H01J37/3002; H01J37/3007; H05; H05H; H05H5/00
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
119 words
A broad beam particle accelerator comprising: source means for producing a beam of charged particles having a substantially uniform cross-sectional distribution of charged particles, target area means for supporting at least one target in stationary relationship with said beam, separator means for directing particles produced by said source means towards said target area and for separating particles from said beam to produce a beam of charged particles having a selected mass range, means for substantially uniformly expanding the cross-sectional area of said beam having a selected mass range to produce a beam of larger area, and means for causing said larger area beam to have a substantially uniform particle density over the cross-sectional area thereof at said target area.
Claim 2
Dependent Claim
119 words
A broad beam particle accelerator comprising: source means for producing a beam of charged particles having a substantially uniform cross-sectional distribution of charged particles, target area means for supporting at least one target in stationary relationship with said beam, separator means for directing particles produced by said source means towards said target area and for separating particles from said beam to produce a beam of charged particles having a selected mass range, means for substantially uniformly expanding the cross-sectional area of said beam having a selected mass range to produce a beam of larger area, and means for causing said larger area beam to have a substantially uniform particle density over the cross-sectional area thereof at said target area.
Claim 3
Dependent Claim
36 words
The broad beam particle accelerator as claimed in 1 further comprising means for changing the trajectories of the particles of said larger area beam of substantially uniform particle density so that their trajectories are generally parallel.
Claim 4
Dependent Claim
37 words
The broad beam particle accelerator as claimed in claim 2 wherein said means for changing the trajectory of said charged particles comprises a beam rotator solenoid having its polar axis coincident with the axis of said beam.
Claim 5
Dependent Claim
35 words
The broad beam particle accelerator as claimed in claim 2 further comprising means for supplying an electrical current and controlling the voltage thereof connected to said means for changing the trajectory of said charged particles.
Claim 6
Dependent Claim
42 words
The broad beam particle accelerator as claimed in claim 1 wherein said source means for producing a beam of charged particles further comprises means for extracting said charged particles to form said beam having an approximately uniform cross-sectional distribution of charged particles.
Claim 7
Dependent Claim
39 words
The broad beam particle accelerator as claimed in claim 1 wherein said means for expanding said beam comprises means for creating an electrical field defining an accelerating section having its polar axis coincident with the axis of said beam.
Claim 8
Dependent Claim
87 words
The broad beam particle accelerator as claimed in claim 6 wherein said means for creating an electrical field defining an accelerating section comprises a first electrode having an entrance therein adapted to permit said beam of charged particles having a selected mass range to pass through, a second electrode spaced from said first electrode toward said target area along the axis of said beam, and means for applying a voltage to said first and second electrodes and creating an electrical field for accelerating and expanding said beam.
Claim 9
Dependent Claim
37 words
The broad beam particle accelerator as claimed in claim 1 wherein said means for expanding said beam comprises a solenoid having its polar axis coincident with the axis of said beam, and means for energizing said solenoid.
Claim 10
Dependent Claim
70 words
The broad beam particle accelerator as claimed in claim 1, wherein said means for expanding said beam to have a uniform particle density at the target area comprises a plurality of means disposed around the axis of said beam for producing a magnetic field surrounding said beam of charged particles, said means for producing a magnetic field being disposed with their polar axes perpendicular to the axis of said beam.
Claim 11
Dependent Claim
27 words
The broad beam particle accelerator as claimed in claim 9 wherein said means for producing a magnetic field are disposed with adjacent means arranged in opposite polarity.
Claim 12
Dependent Claim
50 words
The broad beam particle accelerator as claimed in claim 1 wherein said means for causing said beam to have a uniform particle density at the target area comprises a plurality of means disposed around the axis of said beam for producing an electrostatic field surrounding said beam of charged particles.
Claim 13
Dependent Claim
28 words
The broad beam particle accelerator as claimed in claim 11 wherein said plurality of means for producing an electrostatic field are disposed with adjacent means having opposite polarity.
Claim 14
Dependent Claim
77 words
The broad beam particle accelerator as claimed in claim 1 further comprising means for supplying an electrical potential and controlling the voltage thereof connected to said source means for producing charged particles, means for supplying an electrical current and controlling the voltage thereof connected to said means for expanding said beam, and means for supplying an electrical current and controlling the voltage thereof connected to said means for causing said beam to have a uniform particle density.
Claim 15
Dependent Claim
28 words
The broad beam particle accelerator as claimed in claim 1 further comprising means for supplying an electrical current and controlling the voltage thereof connected to said separator means.
References Cited (Backward Citations)
US2866902A
Cited
US2941077A
Cited
US3120609A
Cited
US3434894A
Cited
US3547074A
Cited
US3676693A
Cited
US3621327A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-10-28 | 1978-04-29 | 1978-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-10-28 | 1982-04-29 | 1982-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-10-28 | 1986-04-29 | 1986-10-29 | $7700.00 | Window Closed / Lapsed |