Patent US4756988A successfully refreshed from Google Patents.
US4756988A
Expired / Lapsed
US
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Multilayer dry-film negative-acting photoresist
Assignee: 3M Co
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Filing: 1982-09-29
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Granted: 1988-07-12
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Expires: 2002-09-29
Abstract
Abstract Dry-film, negative-acting photoresist layers are used in the formation of many articles such as circuit boards, printing plates and the like. Laminable monolayers of photoresist can suffer from slow speeds, brittleness, variable adhesive characteristics, and narrow processing latitude during development and exposure. The use of a crosslinked or crosslinkable integral thermoplastic adhesive laer on the dry-film, negative-acting photoresist layer improves the properties and performance of the photoresist.
Inventors
- 👤 William L. Kausch
- 👤 John P. Vikesland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; G03F7/092; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/184; Y; Y10; Y10S; Y10S430/00; Y10S430/14; Y10S430/162
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
103 words
A dry-film, negative-acting, laminable photoresist of at least two layers comprising: (a) a first layer of a negative-acting photosensitive resist composition comprising (1) an ethylenically unsaturated acrylic or methacrylic polymerizable oligomer, dimer or monomer and (2) a photosensitive free radical generator, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a laminable second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent, wherein said organic polymer comprises an acrylic polymer.
Claim 2
Dependent Claim
103 words
A dry-film, negative-acting, laminable photoresist of at least two layers comprising: (a) a first layer of a negative-acting photosensitive resist composition comprising (1) an ethylenically unsaturated acrylic or methacrylic polymerizable oligomer, dimer or monomer and (2) a photosensitive free radical generator, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a laminable second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent, wherein said organic polymer comprises an acrylic polymer.
Claim 3
Dependent Claim
26 words
The photoresist of claim 1 wherein said second layer comprises (1) an acrylic copolymer or terpolymer and (2) a phenol formaldehyde resin crosslinked with a polyisocyanate.
Claim 4
Dependent Claim
102 words
A dry-film, negative-acting, laminable photoresist of at least two layers comprising: (a) a first layer of a negative-active photosensitive resist composition comprising an ethylenically unsaturated material and a photosensitive free radical generator, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent, wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 5
Dependent Claim
102 words
A dry-film, negative-acting, laminable photoresist of at least two layers comprising: (a) a first layer of a negative-active photosensitive resist composition comprising an ethylenically unsaturated material and a photosensitive free radical generator, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent, wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 6
Dependent Claim
98 words
A dry-film, negative-acting, laminable photoresist of at least two layers comprising: (a) a first layer of a negative-acting photosensitive resist composition, said first layer becoming less soluble in an aqeuous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer crosslinkable by the applicaiton of heat thereto which is soluble in an aqueous alkaline solution or organic solvent, wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 7
Dependent Claim
98 words
A dry-film, negative-acting, laminable photoresist of at least two layers comprising: (a) a first layer of a negative-acting photosensitive resist composition, said first layer becoming less soluble in an aqeuous alkaline solution or organic solvent after exposure to actinic radiation, and (b) a second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer crosslinkable by the applicaiton of heat thereto which is soluble in an aqueous alkaline solution or organic solvent, wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 8
Dependent Claim
105 words
A dry-film negative-acting, laminable photoresist consisting essentially of two layers comprising: (a) on one surface of said photoresist a first layer of a negative-acting photosensitive resist composition, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) on the second surface of said photoresist a laminable second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 9
Dependent Claim
105 words
A dry-film negative-acting, laminable photoresist consisting essentially of two layers comprising: (a) on one surface of said photoresist a first layer of a negative-acting photosensitive resist composition, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, and (b) on the second surface of said photoresist a laminable second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 10
Dependent Claim
102 words
A dry-film, negative-acting, laminable photoresist consisting essential of three layers comprising: (a) a first layer of a negative-acting photosensitive resist composition, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, (b) a laminable second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent, and (c) a strippable carrier layer adhered to said first layer wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 11
Dependent Claim
102 words
A dry-film, negative-acting, laminable photoresist consisting essential of three layers comprising: (a) a first layer of a negative-acting photosensitive resist composition, said first layer becoming less soluble in an aqueous alkaline solution or organic solvent after exposure to actinic radiation, (b) a laminable second layer, adjacent and adhered to a surface of said first layer, of a laminable crosslinked or crosslinkable organic polymer which is soluble in an aqueous alkaline solution or organic solvent, and (c) a strippable carrier layer adhered to said first layer wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 12
Dependent Claim
38 words
The photoresist of claim 5 wherein said photoresist layer comprises an ethylenically unsaturated material and a photosensitive free radical generator and wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
Claim 13
Dependent Claim
33 words
The photoresist of claim 7 wherein said ethylenically unsaturated material comprises an acrylic or methacrylic polymerizable oligomer, dimer or monomer and wherein the organic polymer of said second layer comprises an acrylic polymer.
Claim 14
Dependent Claim
22 words
The photoresist of claim 8 wherein said organic polymer of said second layer comprises a phenol formaldehyde resin and an acrylic polymer.
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