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US4753694A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for forming multilayered ceramic substrate having solid metal conductors

Assignee: International Business Machines Corp
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Filing: 1986-05-02
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Granted: 1988-06-28
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Expires: 2006-05-02
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Abstract

Abstract A multilayered ceramic (MLC) substrate having embedded and exposed conductors suitable for mounting and interconnecting a plurality of electronic devices exterior thereof. The horizontal planar conductors comprise substantially a plurality of solid, non-porous, homogeneous metal patterns, whereas the vertical interplanar connection conductors are substantially porous metal conductors that are formed by methods such as screening. The process to form the MLC substrate involves forming a pattern of solid, nonporous conductors to a backing sheet having a release layer, then transferring the pattern to a ceramic green sheet. Zero X-Y shrinkage sintering processes allow the MLC substrate and solid metal conductors to be densified without distortion of the solid metal patterns or the ceramic.

Inventors

  • 👤 Lester W. Herron
  • 👤 Robert O. Lussow
  • 👤 Robert W. Nufer
  • 👤 Bernard Schwartz
  • 👤 John Acocella
  • 👤 Srinivasa N. Reddy

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 11:30
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H05; H05K; H05K3/00; H05K3/10; H05K3/20; H10W70/01; H10W70/05; H10W70/67; H10W70/68; H10W70/685; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/03; H05K2201/0302; H05K2201/0317; H05K2203/00; H05K2203/01; H05K2203/0147; H05K2203/0156; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 102 words
A method of fabricating a multilayer substrate having exposed and internal solid metal conductors for mounting and interconnecting a plurality of microcircuit devices comprising the steps of: depositing a plurality of patterns of solid metal conductors on backing sheets; transferring each of said plurality of patterns of solid metal conductors to a respective unfired greensheet; laminating said greensheets in aligned relationship with one another; and sintering said greensheets at a temperature less than the melting point of said solid metal conductors but high enough to densify said greensheet, while simultaneously restraining the laminated greensheets from shrinkage in the X and Y directions.
Claim 2
Independent Claim 102 words
A method of fabricating a multilayer substrate having exposed and internal solid metal conductors for mounting and interconnecting a plurality of microcircuit devices comprising the steps of: depositing a plurality of patterns of solid metal conductors on backing sheets; transferring each of said plurality of patterns of solid metal conductors to a respective unfired greensheet; laminating said greensheets in aligned relationship with one another; and sintering said greensheets at a temperature less than the melting point of said solid metal conductors but high enough to densify said greensheet, while simultaneously restraining the laminated greensheets from shrinkage in the X and Y directions.
Claim 3
Dependent Claim 47 words
The method of claim 1, wherein during sintering the laminated greensheets are restrained against lateral shrinkage and transverse nonplanar deformation by sandwiching the laminated greensheets between two porous platens having a sintering temperature higher than that of said greensheets and applying a compressive force to said platens.
Claim 4
Dependent Claim 41 words
The method of claim 2 wherein during sintering the said laminated greensheets are restrained against expansion due to the compression thereof between said platens by means of an encircling structure coextensive with the lateral dimensions of the multi-layer substrate after firing.
Claim 5
Dependent Claim 37 words
The method of claim 2 wherein said greensheets are fabricated from an unfired glass-ceramic material and a binder and said platens are fabricated of an unfired ceramic having a higher sintering temperature than that of the glass-ceramic.
Claim 6
Dependent Claim 17 words
The method of claim 4 wherein said platens are fabricated of a porous aluminum oxide ceramic material.
Claim 7
Independent Claim 70 words
A method of fabricating a ceramic substrate having solid metal conductors comprising the steps of: depositing a pattern of solid metal conductors on a backing sheet; transferring said pattern to an unfired ceramic substrate; and sintering said ceramic substrate at a temperature less than the melting point of said solid metal conductors but high enough to densify the ceramic and form a bond between the ceramic and said metal conductors.
Claim 8
Independent Claim 70 words
A method of fabricating a ceramic substrate having solid metal conductors comprising the steps of: depositing a pattern of solid metal conductors on a backing sheet; transferring said pattern to an unfired ceramic substrate; and sintering said ceramic substrate at a temperature less than the melting point of said solid metal conductors but high enough to densify the ceramic and form a bond between the ceramic and said metal conductors.
Claim 9
Independent Claim 77 words
A method of fabricating a multilayer substrate having exposed and internal solid metal conductors for mounting and interconnecting a plurality of microcircuit devices comprising the steps of: forming a pattern of solid metal conductors; transferring each of said patterns to a respective unfired greensheet; laminating said greensheets in aligned relationship with one another; and sintering said greensheets at a temperature less than the melting point of said solid metal conductors but high enough to densify said greensheets.
Claim 10
Independent Claim 77 words
A method of fabricating a multilayer substrate having exposed and internal solid metal conductors for mounting and interconnecting a plurality of microcircuit devices comprising the steps of: forming a pattern of solid metal conductors; transferring each of said patterns to a respective unfired greensheet; laminating said greensheets in aligned relationship with one another; and sintering said greensheets at a temperature less than the melting point of said solid metal conductors but high enough to densify said greensheets.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-06-28 1991-12-28 1992-06-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-06-28 1995-12-28 1996-06-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-06-28 1999-12-28 2000-06-28 $7700.00 Window Closed / Lapsed

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