Device for measuring the thickness of thin metallic layers deposited on a conductive support

Claim 1

A device for measuring the thickness of a thin metallic layer disposed on a conductive support comprising: a magnetic sensor, said sensor including a magnetic core having a shape selected from the group consisting of a U shape, an E shape and an H shape, said sensor having an excitation winding and a measurement winding on said core and said sensor arranged adjacent to the thin metallic layer disposed on a conductive support; an excitation source connected to said excitation winding for causing said excitation winding to generate a magnetic flux, said measurement winding being arranged so as to generate a measurement signal having both in-phase and quadrature components and corresponding to a measured flux which is a portion of said flux generated by said excitation winding; a magnetic shielding means arranged so as to enclose said magnetic sensor and the thin metallic layer disposed on a conductive support so as to channel said magnetic flux generated by said excitation winding and so as to isolate said magnetic sensor from interference; a synchronous detector connected to said measurement winding and said excitation source for generating a quadrature component signal of said measurement signal having a magnitude which corresponds to the thickness of the thin metallic layer and for generating an in-phase component signal of said measurement signal having a magnitude which corresponds to the distance between said sensor and said metallic layer; a processing means for receiving said in-phase component signal of said measurement signal and quadrature component signal of said measurement signal from said synchronous detector and for generating an indication of the thickness of the thin metallic layer in accordance with the quadrature component signal and the distance between the thin metallic layer and said magnetic sensor in accordance with the in-phase component signal.

Claim 2

A device for measuring the thickness of a thin metallic layer disposed on a conductive support comprising: a magnetic sensor, said sensor including a magnetic core having a shape selected from the group consisting of a U shape, an E shape and an H shape, said sensor having an excitation winding and a measurement winding on said core and said sensor arranged adjacent to the thin metallic layer disposed on a conductive support; an excitation source connected to said excitation winding for causing said excitation winding to generate a magnetic flux, said measurement winding being arranged so as to generate a measurement signal having both in-phase and quadrature components and corresponding to a measured flux which is a portion of said flux generated by said excitation winding; a magnetic shielding means arranged so as to enclose said magnetic sensor and the thin metallic layer disposed on a conductive support so as to channel said magnetic flux generated by said excitation winding and so as to isolate said magnetic sensor from interference; a synchronous detector connected to said measurement winding and said excitation source for generating a quadrature component signal of said measurement signal having a magnitude which corresponds to the thickness of the thin metallic layer and for generating an in-phase component signal of said measurement signal having a magnitude which corresponds to the distance between said sensor and said metallic layer; a processing means for receiving said in-phase component signal of said measurement signal and quadrature component signal of said measurement signal from said synchronous detector and for generating an indication of the thickness of the thin metallic layer in accordance with the quadrature component signal and the distance between the thin metallic layer and said magnetic sensor in accordance with the in-phase component signal.