US4744550A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum wafer expander apparatus
Assignee: ASM America Inc
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Filing: 1986-04-24
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Granted: 1988-05-17
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Expires: 2006-04-24
Abstract
Abstract A vacuum wafer expander apparatus and method of wafers for use in electrical circuitry. A plurality of electronic semiconductor devices being connected to a flexible member means suitable for are mounted on a brace or bracket frame member means. The brace or bracket frame member means is suitable for being removably mounted on a bracket mounting means having a groove therearound for accommodating a vacuum therein to allow an abutting portion of the flexible material to be pushed in said groove; thus expanding the flexible member means as well as the plurality of electronic semiconductor devices thereon. The electronic semiconductor devices can thereafter be optically inspected and individually picked up from the flexible member means for processing.
Inventors
- 👤 Ivan W. Oglesbee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:50
CPC Classifications
H; H10; H10P; H10P50/00; B; B28; B28D; B28D5/00; B28D5/0005; B28D5/0052; H10P52/00; Y; Y10; Y10T; Y10T225/00; Y10T225/10; Y10T225/12; Y10T225/30; Y10T225/307; Y10T225/321; Y10T29/00; Y10T29/49; Y10T29/49789; Y10T29/4979; Y10T29/53; Y10T29/53961; Y10T29/53974
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
154 words
A vacuum wafer expander apparatus for mounting onto a wafer inspection and processing apparatus, comprising: a planar substantially ring-shaped brace frame member having at least one indented portion around a circumference thereof for accommodating a pin therein and having an aperture substantially centered therethrough; flexible member means for receiving electronic semiconductor wafers, said flexible member means being attached to said planar substantially ring-shaped brace and subtending said aperture substantially centered therethrough; substantially planar mounting bracket member means having an upper portion for mounting said brace frame member means thereon and downwardly protruding member integral thereto, said upper portion having groove means therein for accommodating a portion of said flexible member means and having adjustment means operably coupled thereto for adjusting said upper portion relative to said mounting bracket member means; and a vacuum-producing apparatus operably joined to said upper portion of said mounting bracket member means for creating a vacuum in said groove means.
Claim 2
Dependent Claim
154 words
A vacuum wafer expander apparatus for mounting onto a wafer inspection and processing apparatus, comprising: a planar substantially ring-shaped brace frame member having at least one indented portion around a circumference thereof for accommodating a pin therein and having an aperture substantially centered therethrough; flexible member means for receiving electronic semiconductor wafers, said flexible member means being attached to said planar substantially ring-shaped brace and subtending said aperture substantially centered therethrough; substantially planar mounting bracket member means having an upper portion for mounting said brace frame member means thereon and downwardly protruding member integral thereto, said upper portion having groove means therein for accommodating a portion of said flexible member means and having adjustment means operably coupled thereto for adjusting said upper portion relative to said mounting bracket member means; and a vacuum-producing apparatus operably joined to said upper portion of said mounting bracket member means for creating a vacuum in said groove means.
Claim 3
Dependent Claim
19 words
The vacuum wafer expander apparatus as in claim 1 wherein said flexible member is made of mylar film material.
Claim 4
Dependent Claim
46 words
The vacuum wafer expander apparatus as in claim 1 wherein said vacuum-producing apparatus is operably joined into said upper portion of said mounting bracket means by a tubular member fitted onto a spout member means integrally coupled to said upper portion of said mounting bracket means.
Claim 5
Dependent Claim
19 words
The vacuum wafer expander apparatus as in claim 1 wherein said adjusting means further comprises an adjusting screw member.
Claim 6
Dependent Claim
20 words
The vacuum wafer expander apparatus as in claim 4 wherein said brace frame member is made of a flexible metal.
Claim 7
Dependent Claim
18 words
The vacuum wafer expander apparatus as in claim 5 wherein said brace frame member is made of aluminum.
Claim 8
Dependent Claim
28 words
The vacuum wafer expander apparatus as in claim 4 wherein said mounting bracket member means is made of metal selected from the group of aluminum and stainless steel.
Claim 9
Dependent Claim
20 words
The vacuum wafer expander apparatus as in claim 4 wherein said mounting bracket member means is made of hard plastic.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-17 | 1991-11-16 | 1992-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-17 | 1995-11-16 | 1996-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-17 | 1999-11-16 | 2000-05-17 | $7700.00 | Window Closed / Lapsed |