Separating diced plate material

Claim 1

A device for extending a foil having a semiconductor wafer provided thereon, said wafer being divided into semiconductor elements so that during extension of the foil the semiconductor elements will be slightly spaced apart, comprising a substantially annular scroll plate arranged for rotational movement within a casing about a central axis, a plurality of groove portions arranged symmetrically about a major surface of said scroll plate which is perpendicular to said axis, said groove portions being oriented at an angle with respect to radial lines of the scroll plate, a plurality of jaw members symmetrically arranged about said scroll plate for radial displacement, meAns mounted on said jaw members in engagement with said groove portions so that when said scroll plate is rotated the jaw members will be caused to move in a radial direction in a substantially flat plan while maintaining axial concentricity with respect to each other, means attached to said scroll plate for causing rotation thereof so as to advance said jaw members toward each other, stop means associated with said casing at a position closest to said axis for stopping the inward advance of each jaw member at an exact advance position so that each jaw member is properly located, means connected to the means for causing rotation of the scroll plate for urging with a substantially constant force said plate to rotate in a direction which will cause said jaw members to be withdrawn from the advanced position, and securing means attached to each of said jaw members for securing said jaws to a portion of the periphery of said foil so that when said jaw members are withdrawn in the radial direction as a result of said urging means producing rotation of the scroll plate said foil will be extended and said semiconductor elements separated.

Claim 2

A device for extending a foil having a semiconductor wafer provided thereon, said wafer being divided into semiconductor elements so that during extension of the foil the semiconductor elements will be slightly spaced apart, comprising a substantially annular scroll plate arranged for rotational movement within a casing about a central axis, a plurality of groove portions arranged symmetrically about a major surface of said scroll plate which is perpendicular to said axis, said groove portions being oriented at an angle with respect to radial lines of the scroll plate, a plurality of jaw members symmetrically arranged about said scroll plate for radial displacement, meAns mounted on said jaw members in engagement with said groove portions so that when said scroll plate is rotated the jaw members will be caused to move in a radial direction in a substantially flat plan while maintaining axial concentricity with respect to each other, means attached to said scroll plate for causing rotation thereof so as to advance said jaw members toward each other, stop means associated with said casing at a position closest to said axis for stopping the inward advance of each jaw member at an exact advance position so that each jaw member is properly located, means connected to the means for causing rotation of the scroll plate for urging with a substantially constant force said plate to rotate in a direction which will cause said jaw members to be withdrawn from the advanced position, and securing means attached to each of said jaw members for securing said jaws to a portion of the periphery of said foil so that when said jaw members are withdrawn in the radial direction as a result of said urging means producing rotation of the scroll plate said foil will be extended and said semiconductor elements separated.

Claim 8

A device for extending a foil having a diced semiconductor wafer provided thereon so that the diced elements of the semiconductor will be slightly separated upon extension, said device comprising an annular scroll plate rotatably mounted within a casing, a plurality of symmetrically arranged grooves about one of the major surfaces of said scroll plate which surface is arranged at right angles to the axis of rotation of said scroll plate, said grooves being inclined at an angle of approximately 60* to radial directions of said scroll plate, a plurality of jaw members arranged symmetrically about the surface of said scroll plate, ball bearings mounted on each of said jaw members for co-operation with said grooves so that upon rotation of said scroll plate said jaw members will be caused to be displaced in a radial direction in a substantially flat plane while maintaining their axial concentricity, a trigger attached to said scroll plate for causing rotational movement thereof in a direction so as to cause advancement of said jaw members toward each other, spring means attached to said trigger for urging said scroll plate to rotate in an opposite direction so as to cause said jaw members to move in a radial direction away from each other, an upstanding peg attached to each of said jaw members and extending outside the main body of the casing for securing thereto a peripheral portion of said foil, a flange portion of the casing projecting from the body of the casing toward the axis of rotation so as to form a reflective guard for protecting the jaw members and the periphery of said foil from heat defamation during a heat-treating process in the extension of the foil, a rim of said flange extending therefrom so as to stop the inward advance of the jaw members upon rotation of said scroll plate in the direction for causing advancement, said rim causing the stopping of advancement at an exact advanced position so that each of said jaw members will be properly located with respect to the periphery of said foil for easy attachment of said foil thereto, whereby when said foil is attached to said jaw members by said upstanding pegs and heat has been applied thereto said spring means will urge said scroll plate to rotate in a direction for withdrawing said jaw members from each other so that said foil will be extended and the diced semiconductor elements separated from each other.

Claim 9

A device for extending a foil having a diced semiconductor wafer provided thereon so that the diced elements of the semiconductor will be slightly separated upon extension, said device comprising an annular scroll plate rotatably mounted within a casing, a plurality of symmetrically arranged grooves about one of the major surfaces of said scroll plate which surface is arranged at right angles to the axis of rotation of said scroll plate, said grooves being inclined at an angle of approximately 60* to radial directions of said scroll plate, a plurality of jaw members arranged symmetrically about the surface of said scroll plate, ball bearings mounted on each of said jaw members for co-operation with said grooves so that upon rotation of said scroll plate said jaw members will be caused to be displaced in a radial direction in a substantially flat plane while maintaining their axial concentricity, a trigger attached to said scroll plate for causing rotational movement thereof in a direction so as to cause advancement of said jaw members toward each other, spring means attached to said trigger for urging said scroll plate to rotate in an opposite direction so as to cause said jaw members to move in a radial direction away from each other, an upstanding peg attached to each of said jaw members and extending outside the main body of the casing for securing thereto a peripheral portion of said foil, a flange portion of the casing projecting from the body of the casing toward the axis of rotation so as to form a reflective guard for protecting the jaw members and the periphery of said foil from heat defamation during a heat-treating process in the extension of the foil, a rim of said flange extending therefrom so as to stop the inward advance of the jaw members upon rotation of said scroll plate in the direction for causing advancement, said rim causing the stopping of advancement at an exact advanced position so that each of said jaw members will be properly located with respect to the periphery of said foil for easy attachment of said foil thereto, whereby when said foil is attached to said jaw members by said upstanding pegs and heat has been applied thereto said spring means will urge said scroll plate to rotate in a direction for withdrawing said jaw members from each other so that said foil will be extended and the diced semiconductor elements separated from each other.