US3727282A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor handling apparatus
Assignee: Unisys Corp
•
Filing: 1970-02-05
•
Granted: 1973-04-17
•
Expires: 1990-02-05
Abstract
Abstract A method and apparatus for handling semiconductor crystals. The method includes securing a large semiconductor wafer to a deformable plastic carrier, scribing and breaking the wafer into a plurality of small crystals, and stretching the carrier to separate the individual crystals while maintaining their orientation. The apparatus includes a hollow cylinder, a piston and a plug seated on the piston; the carrier having the wafer thereon is clamped to the cylinder and the piston and plug are moved vertically to stretch the carrier. Then the carrier may be secured to the plug for further utilization.
Inventors
- 👤 C Neary
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:59
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0442; B; B28; B28D; B28D5/00; B28D5/0005; B28D5/0011; H10P72/0428; Y; Y10; Y10T; Y10T225/00; Y10T225/10; Y10T225/12; Y10T225/30; Y10T225/307; Y10T225/321; Y10T225/325; Y10T29/00; Y10T29/49; Y10T29/49789; Y10T29/4979
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
126 words
Apparatus for handling a plurality of semiconductor dice mounted on a deformable carrier, to be separated from each other while maintaining their relative orientation comprising: a solid member having an aperture therein; means for temporarily securing said deformable carrier to said solid member with said diCe positioned over the aperture; a piston-like member having a plug with grooving about its exterior surface removably secured thereto for advancing through the aperture against said deformable carrier and stretching said carrier to separate said dice from each other while maintaining their relative orientation on the carrier; and an elastic band which fits about said plug and rests in said grooving for attaching said deformable carrier with its dice to said plug after said carrier is stretched by said plug.
Claim 2
Dependent Claim
126 words
Apparatus for handling a plurality of semiconductor dice mounted on a deformable carrier, to be separated from each other while maintaining their relative orientation comprising: a solid member having an aperture therein; means for temporarily securing said deformable carrier to said solid member with said diCe positioned over the aperture; a piston-like member having a plug with grooving about its exterior surface removably secured thereto for advancing through the aperture against said deformable carrier and stretching said carrier to separate said dice from each other while maintaining their relative orientation on the carrier; and an elastic band which fits about said plug and rests in said grooving for attaching said deformable carrier with its dice to said plug after said carrier is stretched by said plug.
Claim 3
Dependent Claim
52 words
Apparatus according to claim 1 wherein said solid member is tubular in configuration and said aperture is an opening at one end of said tubular member, and wherein said piston-like member, including said plug, is located within said tubular member and mounted for movement axially along the interior of said tubular member.
Claim 4
Dependent Claim
25 words
Apparatus according to claim 2 wherein said means for temporarily securing the deformable carrier constitutes means for clamping the deformable carrier to said tubular member.
Claim 5
Dependent Claim
42 words
Apparatus according to claim 2 wherein said tubular member includes two cylindrical portions which are disposed coaxially, and wherein said means for temporarily securing said deformable member constitutes means for clamping said cylindrical sections together with the deformable member disposed between them.
Claim 6
Dependent Claim
34 words
Apparatus according to claim 2 wherein said plug includes a flat contact surface substantially parallel to the surface of said deformable carrier occupied by said dice when said carrier is in an unstretched condition.
Claim 7
Dependent Claim
149 words
Apparatus for handling a plurality of semiconductor dice mounted on a deformable carrier, to be separated from each other while maintaining their relative orientation comprising: a stationary solid member having an aperture therein; means for temporarily securing said deformable carrier to said solid member with said dice positioned over the aperture; a piston-like member for advancing through the aperture; a plug removably attached to said piston-like member for movement with said piston-like member through the aperture, against said deformable carrier, to stretch said carrier and separate said dice from each other while maintaining their relative orientation on the carrier; and means for retaining said deformable carrier bound to said plug, said means being adapted to be applied after said carrier is stretched by said plug; whereby said plug may be detached from the piston-like member and removed from the aperture with the carrier, holding the separated dice, fastened thereto.
Claim 8
Dependent Claim
149 words
Apparatus for handling a plurality of semiconductor dice mounted on a deformable carrier, to be separated from each other while maintaining their relative orientation comprising: a stationary solid member having an aperture therein; means for temporarily securing said deformable carrier to said solid member with said dice positioned over the aperture; a piston-like member for advancing through the aperture; a plug removably attached to said piston-like member for movement with said piston-like member through the aperture, against said deformable carrier, to stretch said carrier and separate said dice from each other while maintaining their relative orientation on the carrier; and means for retaining said deformable carrier bound to said plug, said means being adapted to be applied after said carrier is stretched by said plug; whereby said plug may be detached from the piston-like member and removed from the aperture with the carrier, holding the separated dice, fastened thereto.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-04-16 | 1976-10-16 | 1977-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-04-16 | 1980-10-16 | 1981-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-04-16 | 1984-10-16 | 1985-04-17 | $7700.00 | Window Closed / Lapsed |