US3493155A
Expired / Lapsed
US
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Apparatus and method for separating a semiconductor wafer
Assignee: National Aeronautics and Space Administration
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Filing: 1969-05-05
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Granted: 1970-02-03
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Expires: 1989-05-05
Abstract
No abstract record available.
Inventors
- 👤 Irving Litant
- 👤 Anthony J Scapicchio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:20
CPC Classifications
B; B28; B28D; B28D5/00; B28D5/0005; B28D5/0041; B28D5/0047; H; H10; H10P; H10P52/00; Y; Y10; Y10T; Y10T225/00; Y10T225/10; Y10T225/12; Y10T225/30; Y10T225/307; Y10T225/321; Y10T225/325
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-02-02 | 1973-08-04 | 1974-02-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-02-02 | 1977-08-04 | 1978-02-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-02-02 | 1981-08-04 | 1982-02-03 | $7700.00 | Window Closed / Lapsed |