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US4744221A
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Zeolite based arsine storage and delivery system
Assignee: Advanced Technology Materials Inc
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Filing: 1987-06-29
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Granted: 1988-05-17
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Expires: 2007-06-29
Abstract
Abstract An arsine storage and delivery system, and, more specifically, an improved system for storing arsine on zeolite while providing delivery of the arsine as needed.
Inventors
- 👤 Karl O. Knollmueller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:38
CPC Classifications
F; F17; F17C; F17C11/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
86 words
A method of storing and subsequently delivering arsine which comprises the steps of: (a) contacting arsine at a temperature of between about -30° C. and about +30° C. with a zeolite having a pore size of between about 5 and about 15 angstroms to provide arsine-adsorbed zeolite suitable to be stored, and (b) heating said arsine-adsorbed zeolite to an elevated temperature of no greater than about 175° C. for a time sufficient to release at least a portion of said adsorbed arsine to provide free arsine.
Claim 2
Independent Claim
86 words
A method of storing and subsequently delivering arsine which comprises the steps of: (a) contacting arsine at a temperature of between about -30° C. and about +30° C. with a zeolite having a pore size of between about 5 and about 15 angstroms to provide arsine-adsorbed zeolite suitable to be stored, and (b) heating said arsine-adsorbed zeolite to an elevated temperature of no greater than about 175° C. for a time sufficient to release at least a portion of said adsorbed arsine to provide free arsine.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said pore size is between about 10 and about 15 angstroms.
Claim 4
Dependent Claim
17 words
The method of claim 1 wherein said pore size is between about 12 and about 15 angstroms.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein said zeolite has an aluminum to silicon ratio of between 0.6 and 0.9 to 1.
Claim 6
Dependent Claim
20 words
The method of claim 1 wherein said temperature of step (a) is between about -30° C. and about 0° C.
Claim 7
Dependent Claim
20 words
The method of claim 1 wherein said temperature of step (a) is between about -30° C. and about -10° C.
Claim 8
Dependent Claim
19 words
The method of claim 1 wherein said elevated temperature of step (b) is no greater than about 125° C.
Claim 9
Dependent Claim
19 words
The method of claim 1 wherein said elevated temperature of step (b) is no greater than about 110° C.
Claim 10
Dependent Claim
16 words
The method of claim 1 wherein said time ranges between a few seconds and several hours.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-17 | 1991-11-16 | 1992-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-17 | 1995-11-16 | 1996-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-17 | 1999-11-16 | 2000-05-17 | $7700.00 | Window Closed / Lapsed |