Implantation method for forming Schottky barrier photodiodes

Claim 1

A method of forming a Schottky barrier photodiode suitable for detection of infrared radiation includes the following sequentially ordered steps of: forming a p-type silicon substrate with a surface area; forming an annular N+ type silicon guard ring in the silicon substrate around a portion of the surface area of the p-type silicon substrate; forming a silicon dioxide layer on top of the p-type silicon substrate including the silicon guard ring; exposing the surface area of the p-type silicon substrate within the silicon guard ring; implanting metal ions into the exposed surface area of the silicon substrate surrounded by the silicon guard ring; annealing the resulting structure to form a silicide of the implanted metal within the silicon substrate; removing a portion of the silicon substrate encircled by the silicon guard ring and between the surface of the silicon substrate and the formed silicide using selective etching; depositing a thin oxide passivating layer on the silicon substrate encircled by the silicon guard ring, depositing a reflective metal layer on said thin oxide passivating layer for reflecting infrared radiation back to the metal silicide; and wherein: the implantation energy of the metal ions is 50 KeV, the metal ion is platinum, and a platinum silcide is formed with a distribution having a maximum concentration at a depth of about 249 angstroms below the silicon surface and having a standard deviation of about 63 angstroms; the p-type silicon substrate has resistivity of about 10-20Ω per centimeter and is boron doped with a concentration of 1×10 15 atoms per cubic centimeter; the implantation energy of the metal ions is 10 KeV and the metal silicide is formed with a distribution having a maximum concentration at a depth of about 85 angstroms; and these steps of forming the silicon guard ring, the silicon dioxide layer, the implantation of metal ions, and annealing are such that the Schottky barrier photodiode formed is suitable for detection of infrared radiation having a wavelength in the 1 to 6 micron range.

Claim 2

A method of forming a Schottky barrier photodiode suitable for detection of infrared radiation includes the following sequentially ordered steps of: forming a p-type silicon substrate with a surface area; forming an annular N+ type silicon guard ring in the silicon substrate around a portion of the surface area of the p-type silicon substrate; forming a silicon dioxide layer on top of the p-type silicon substrate including the silicon guard ring; exposing the surface area of the p-type silicon substrate within the silicon guard ring; implanting metal ions into the exposed surface area of the silicon substrate surrounded by the silicon guard ring; annealing the resulting structure to form a silicide of the implanted metal within the silicon substrate; removing a portion of the silicon substrate encircled by the silicon guard ring and between the surface of the silicon substrate and the formed silicide using selective etching; depositing a thin oxide passivating layer on the silicon substrate encircled by the silicon guard ring, depositing a reflective metal layer on said thin oxide passivating layer for reflecting infrared radiation back to the metal silicide; and wherein: the implantation energy of the metal ions is 50 KeV, the metal ion is platinum, and a platinum silcide is formed with a distribution having a maximum concentration at a depth of about 249 angstroms below the silicon surface and having a standard deviation of about 63 angstroms; the p-type silicon substrate has resistivity of about 10-20Ω per centimeter and is boron doped with a concentration of 1×10 15 atoms per cubic centimeter; the implantation energy of the metal ions is 10 KeV and the metal silicide is formed with a distribution having a maximum concentration at a depth of about 85 angstroms; and these steps of forming the silicon guard ring, the silicon dioxide layer, the implantation of metal ions, and annealing are such that the Schottky barrier photodiode formed is suitable for detection of infrared radiation having a wavelength in the 1 to 6 micron range.