Patent US4733074A successfully refreshed from Google Patents.
US4733074A
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US
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Sample surface structure measuring method
Assignee: Hitachi Ltd
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Filing: 1986-04-16
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Granted: 1988-03-22
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Expires: 2006-04-16
Abstract
Abstract A sample surface structure measuring method using a scanning type electron microscope featured by scanning the sample surface by an electron beam incident from above the sample surface; measuring the amount of the secondary electrons discharged according to the three-dimensional structure of the sample surface by the scanning; and determining the three-dimensional structure of the sample surface from the amount of the secondary electrons measured based on a relation existing between the predetermined three-dimensional structure and the amount of the secondary electrons discharged.
Inventors
- 👤 Makoto Kato
- 👤 Tetsuo Yokoyama
- 👤 Jyuntaro Arima
- 👤 Shimbu Yamagata
- 👤 Mikihiko Oi
- 👤 Toshihiro Furuya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:02
CPC Classifications
G; G01; G01B; G01B15/00; G01B15/04; H; H01; H01J; H01J37/00; H01J37/26; H01J37/28
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
58 words
A side-etching amount measuring method for a scanning type electron microscope comprising the step of measuring a side-etching amount from a width of a bright band observed when an electron beam is applied from above a resist, using a relation between a side-etching amount actually measured for a cut sample beforehand and the width of the bright band.
Claim 2
Dependent Claim
58 words
A side-etching amount measuring method for a scanning type electron microscope comprising the step of measuring a side-etching amount from a width of a bright band observed when an electron beam is applied from above a resist, using a relation between a side-etching amount actually measured for a cut sample beforehand and the width of the bright band.
Claim 3
Dependent Claim
69 words
A sample surface groove depth measuring method using a SEM comprising the steps of: measuring the brightness f A on the outside of a groove and the brightness f B at the center of the groove in an image of a SEM; measuring the width L of the groove on the basis of the image of the SEM; obtaining the depth d of the groove from an equation; ##EQU6##
Claim 4
Dependent Claim
69 words
A sample surface groove depth measuring method using a SEM comprising the steps of: measuring the brightness f A on the outside of a groove and the brightness f B at the center of the groove in an image of a SEM; measuring the width L of the groove on the basis of the image of the SEM; obtaining the depth d of the groove from an equation; ##EQU6##
Claim 5
Dependent Claim
86 words
A side-etching amount measuring method using a SEM comprising the steps of: measuring the width l of a bright band observed in an image of a SEM when an electron beam is applied from above a resist on a sample to be measured; obtaining an amount x of side-etching in the sample from an equation x=al+b, where a and b are constants determined by the relation between the amounts x of side-etching and the widths l of the bright bands actually measured with cut samples beforehand.
Claim 6
Dependent Claim
86 words
A side-etching amount measuring method using a SEM comprising the steps of: measuring the width l of a bright band observed in an image of a SEM when an electron beam is applied from above a resist on a sample to be measured; obtaining an amount x of side-etching in the sample from an equation x=al+b, where a and b are constants determined by the relation between the amounts x of side-etching and the widths l of the bright bands actually measured with cut samples beforehand.
References Cited (Backward Citations)
US3329813A
Cited
US3597607A
Cited
US3876879A
Cited
US4221965A
Cited
US4556797A
Cited
JPS5954160A
Cited
JPS60741A
Cited
WO1985004250A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-22 | 1991-09-21 | 1992-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-22 | 1995-09-21 | 1996-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-22 | 1999-09-21 | 2000-03-22 | $7700.00 | Window Closed / Lapsed |