US4733074A
Expired / Lapsed
US
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Sample surface structure measuring method
Assignee: Hitachi Ltd
•
Filing: 1986-04-16
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Granted: 1988-03-22
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Expires: 2006-04-16
Abstract
Abstract A sample surface structure measuring method using a scanning type electron microscope featured by scanning the sample surface by an electron beam incident from above the sample surface; measuring the amount of the secondary electrons discharged according to the three-dimensional structure of the sample surface by the scanning; and determining the three-dimensional structure of the sample surface from the amount of the secondary electrons measured based on a relation existing between the predetermined three-dimensional structure and the amount of the secondary electrons discharged.
Inventors
- 👤 Makoto Kato
- 👤 Tetsuo Yokoyama
- 👤 Jyuntaro Arima
- 👤 Shimbu Yamagata
- 👤 Mikihiko Oi
- 👤 Toshihiro Furuya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:26
CPC Classifications
G; G01; G01B; G01B15/00; G01B15/04; H; H01; H01J; H01J37/00; H01J37/26; H01J37/28
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
58 words
A side-etching amount measuring method for a scanning type electron microscope comprising the step of measuring a side-etching amount from a width of a bright band observed when an electron beam is applied from above a resist, using a relation between a side-etching amount actually measured for a cut sample beforehand and the width of the bright band.
Claim 2
Dependent Claim
58 words
A side-etching amount measuring method for a scanning type electron microscope comprising the step of measuring a side-etching amount from a width of a bright band observed when an electron beam is applied from above a resist, using a relation between a side-etching amount actually measured for a cut sample beforehand and the width of the bright band.
Claim 3
Dependent Claim
69 words
A sample surface groove depth measuring method using a SEM comprising the steps of: measuring the brightness f A on the outside of a groove and the brightness f B at the center of the groove in an image of a SEM; measuring the width L of the groove on the basis of the image of the SEM; obtaining the depth d of the groove from an equation; ##EQU6##
Claim 4
Dependent Claim
69 words
A sample surface groove depth measuring method using a SEM comprising the steps of: measuring the brightness f A on the outside of a groove and the brightness f B at the center of the groove in an image of a SEM; measuring the width L of the groove on the basis of the image of the SEM; obtaining the depth d of the groove from an equation; ##EQU6##
Claim 5
Dependent Claim
86 words
A side-etching amount measuring method using a SEM comprising the steps of: measuring the width l of a bright band observed in an image of a SEM when an electron beam is applied from above a resist on a sample to be measured; obtaining an amount x of side-etching in the sample from an equation x=al+b, where a and b are constants determined by the relation between the amounts x of side-etching and the widths l of the bright bands actually measured with cut samples beforehand.
Claim 6
Dependent Claim
86 words
A side-etching amount measuring method using a SEM comprising the steps of: measuring the width l of a bright band observed in an image of a SEM when an electron beam is applied from above a resist on a sample to be measured; obtaining an amount x of side-etching in the sample from an equation x=al+b, where a and b are constants determined by the relation between the amounts x of side-etching and the widths l of the bright bands actually measured with cut samples beforehand.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-22 | 1991-09-21 | 1992-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-22 | 1995-09-21 | 1996-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-22 | 1999-09-21 | 2000-03-22 | $7700.00 | Window Closed / Lapsed |