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US4732865A
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US
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Self-aligned internal mobile ion getter for multi-layer metallization on integrated circuits
Assignee: Maxim Integrated Products Inc
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Filing: 1986-10-03
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Granted: 1988-03-22
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Expires: 2006-10-03
Abstract
Abstract A multi-layer metallization method and structure that permits the use of sodium-ion contaminated titanium-tungsten (Ti:W) as a barrier metal with gold conductor metal on a silicon substrate, without significant degradation of device characteristics. After depositing the barrier and conductor metal layers, a layer of phosphorous-silicate glass (PSG) is anisotropically-etched to expose the field oxide and top surface of the conductor metal but leave PSG layer on each sidewall of the metallization structure. The circuit is then annealed at 400° C. for 30 minutes. Then, an adhesion layer (Si 3 N 4 ) and an insulative layer (SiO 2 ) are deposited over the metallization structure and field oxide, with the adhesion layer in contact with the top surface of the conductor metal and the gettering composition. The resultant circuit has a field threshold voltage shift comparable to devices made without a metal-ion-contaminated barrier layer and the resultant structure reliably retains the PSG layers in contact with the metallization sidewalls.
Inventors
- 👤 David R. Evans
- 👤 James S. Flores
- 👤 Susan S. Dottarar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:28
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10P; H10P14/00; H10P14/40; H10P14/412; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10W20/064; H10W20/40; H10W20/41; H10W20/425; H10W20/44; H10W20/4403; H10W20/4432; H10W74/10; H10W74/131; H10W74/137
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
239 words
In an integrated circuit fabrication process, a method of making a multi-layer metallization structure including a conductor metal and a barrier metal comprising a composition of titanium-tungsten which includes an amount of contaminant sodium ions, the method comprising: depositing a layer of the barrier metal on a surface of a semiconductor substrate; depositing a layer of the conductor metal on the barrier metal layer, the barrier metal layer separating the conductor metal from said surface; patterning the conductor and barrier metal layers to define said structure along the substrate surface as a predetermined pattern of conductive interconnects and gate contacts having a pair of opposite sidewalls; depositing a layer of a gettering composition over the substrate including in contact with each of the sidewalls of the metallization structure, the gettering composition being selected to react with and bind any of the contaminant sodium ions coming in contact therewith; selectively removing a portion of the gettering composition layer to expose a top surface of the conductor metal layer while leaving a sidewall portion of the gettering composition layer contacting the substrate along each of the sidewalls of the metallization structure; removing a portion of the contaminant sodium ions from the barrier metal so as to reduce the amount of said ions available to contaminate the semiconductor substrate; and depositing and adhering a layer of an insulative material onto the exposed conductor metal and the sidewall layers of the gettering composition.
Claim 2
Dependent Claim
239 words
In an integrated circuit fabrication process, a method of making a multi-layer metallization structure including a conductor metal and a barrier metal comprising a composition of titanium-tungsten which includes an amount of contaminant sodium ions, the method comprising: depositing a layer of the barrier metal on a surface of a semiconductor substrate; depositing a layer of the conductor metal on the barrier metal layer, the barrier metal layer separating the conductor metal from said surface; patterning the conductor and barrier metal layers to define said structure along the substrate surface as a predetermined pattern of conductive interconnects and gate contacts having a pair of opposite sidewalls; depositing a layer of a gettering composition over the substrate including in contact with each of the sidewalls of the metallization structure, the gettering composition being selected to react with and bind any of the contaminant sodium ions coming in contact therewith; selectively removing a portion of the gettering composition layer to expose a top surface of the conductor metal layer while leaving a sidewall portion of the gettering composition layer contacting the substrate along each of the sidewalls of the metallization structure; removing a portion of the contaminant sodium ions from the barrier metal so as to reduce the amount of said ions available to contaminate the semiconductor substrate; and depositing and adhering a layer of an insulative material onto the exposed conductor metal and the sidewall layers of the gettering composition.
Claim 3
Dependent Claim
44 words
A method according to claim 1 including selectively etching the barrier metal after deposition of the conductor metal and patterning so as to form the sidewalls of the metallization structure with a recess adjacent the substrate surface, and chemical vapor depositing the gettering composition.
Claim 4
Dependent Claim
14 words
A method according to claim 1 in which the gettering composition is phosphorus-silicate glass.
Claim 5
Dependent Claim
41 words
A method according to claim 1 in which the step of depositing and adhering an insulative layer includes depositing a layer of silicon nitride upon and in contact with the exposed conductor metal and the sidewall portions of the gettering composition.
Claim 6
Dependent Claim
19 words
A method according to claim 4 including depositing a layer of silicon oxide onto the layer of silicon nitride.
Claim 7
Dependent Claim
18 words
A method according to claim 1 in which the conductor metal is an alloy comprising a noble metal.
Claim 8
Dependent Claim
13 words
A method according to claim 6 in which the noble metal is gold.
Claim 9
Dependent Claim
20 words
A method according to claim 1 in which the step of selectively removing includes anisotropically etching the gettering composition layer.
Claim 10
Dependent Claim
28 words
A method according to claim 1 in which the gettering composition layer is a phosphorus-silicate glass and the step of selectively removing includes reactive ion etching said layer.
Claim 11
Dependent Claim
33 words
A method according to claim 1 in which the removing step includes annealing the circuit to mobilize said metal ions and cause a migration thereof into contact with the gettering composition sidewall layers.
Claim 12
Dependent Claim
20 words
A method according to claim 10 in which the substrate is annealed at about 400° C. for about 30 minutes.
Claim 13
Dependent Claim
248 words
In an integrated circuit fabrication process, a method of making a multi-layer metallization structure including a conductor metal and a barrier metal comprising a composition of titanium-tungsten which includes an amount of contaminant sodium ions, the method comprising: depositing a layer of the barrier metal on a surface of a semiconductor substrate; depositing a layer of the conductor metal on the barrier metal layer, the barrier metal layer separating the conductor metal from said surface; patterning the conductor and barrier metal layers to define said structure along the substrate surface as a predetermined pattern of conductive interconnects and gate contacts having a pair of opposite sidewalls; depositing a layer of a gettering composition over the substrate including in contact with each of the sidewalls of the metallization structure, the gettering composition being selected to react with and bind any of the contaminant sodium ions coming in contact therewith; selectively removing a portion of the gettering composition layer to expose a top surface of the conductor metal layer while leaving a sidewall portion of the gettering composition layer contacting the substrate along each of the sidewalls of the metallization structure; annealing the circuit to mobilize said sodium ions and caues a migration thereof into contact with the gettering composition sidewall portions so as to reduce the amount of sodium ions available to contaminate the semiconductor substrate; and depositing and adhering a layer of an insulative material onto the exposed conductor metal and the sidewall portions of the gettering composition.
Claim 14
Dependent Claim
248 words
In an integrated circuit fabrication process, a method of making a multi-layer metallization structure including a conductor metal and a barrier metal comprising a composition of titanium-tungsten which includes an amount of contaminant sodium ions, the method comprising: depositing a layer of the barrier metal on a surface of a semiconductor substrate; depositing a layer of the conductor metal on the barrier metal layer, the barrier metal layer separating the conductor metal from said surface; patterning the conductor and barrier metal layers to define said structure along the substrate surface as a predetermined pattern of conductive interconnects and gate contacts having a pair of opposite sidewalls; depositing a layer of a gettering composition over the substrate including in contact with each of the sidewalls of the metallization structure, the gettering composition being selected to react with and bind any of the contaminant sodium ions coming in contact therewith; selectively removing a portion of the gettering composition layer to expose a top surface of the conductor metal layer while leaving a sidewall portion of the gettering composition layer contacting the substrate along each of the sidewalls of the metallization structure; annealing the circuit to mobilize said sodium ions and caues a migration thereof into contact with the gettering composition sidewall portions so as to reduce the amount of sodium ions available to contaminate the semiconductor substrate; and depositing and adhering a layer of an insulative material onto the exposed conductor metal and the sidewall portions of the gettering composition.
Claim 15
Dependent Claim
51 words
An integrated circuit process according to claim 12 in which the gettering composition is phosphorus-silicate glass, the depositing and adhering step including depositing an adhesion layer of silicon nitride onto the exposed conductor metal and the phosphorus-silicate glass sidewalls and depositing an insulative silicon dioxide layer onto the silicon nitride layer.
Claim 16
Dependent Claim
41 words
An integrated circuit process according to claim 12 including annealing the substrate for a duration and at a temperature sufficient to reduce field voltage shift to a range less than 500 millivolts per 1000 Å of thickness of the insulative material.
Claim 17
Dependent Claim
24 words
An integrated circuit process according to claim 14 in which the annealing duration is about 30 minutes at a temperature of about 400° C.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-22 | 1991-09-21 | 1992-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-22 | 1995-09-21 | 1996-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-22 | 1999-09-21 | 2000-03-22 | $7700.00 | Window Closed / Lapsed |