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US4728591A
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Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures
Assignee: TRUSTEES OF BOSTON UNIVERSITY 147 BAY STATE ROAD BOSTON MASSACHUSETTS 02215 A CORP OF MASSACHUSETTS
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Filing: 1986-03-07
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Granted: 1988-03-01
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Expires: 2006-03-07
Abstract
Abstract Articles exhibiting fabricated structures with nanometer size scale features (nanostructures), typically a device comprising nanostructures of a functional material on or in a substrate of dissimilar material, are produced by a method employing a substrate base or coating and a thin layer serving as a lithographic mask or template, consisting of a self-assembled ordered material array, typically a periodic array of molecules such as undenatured proteins, exhibiting holes, thickness or density variations. It is possible to produce complex structures containing large numbers of nanometers scale elements through a small number of simple steps.
Inventors
- 👤 Noel A. Clark
- 👤 Kenneth Douglas
- 👤 Kenneth J. Rothschild
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:57
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; B; B82; B82Y; B82Y30/00; G03F7/038; G03F7/039; B01; B01J; B01J2219/00; B01J2219/00274; B01J2219/00277; B01J2219/00279; B01J2219/00306; B01J2219/00313; B01J2219/00315; B01J2219/00317; B01J2219/00583; B01J2219/00603; B01J2219/00605; B01J2219/00612; B01J2219/00614; B01J2219/00621; B01J2219/00632; B01J2219/00635; B01J2219/00637; B01J2219/00659; B01J2219/00718; B01J2219/0072; B01J2219/00725; C; C40; C40B; C40B40/00; C40B40/04; C40B40/10; C40B60/00; C40B60/14; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/261; Y10T428/31504; Y10T428/31678; Y10T428/31681; Y10T428/31855; Y10T428/31942
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
89 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variation, said pattern having a characteristic dimension of 1-50 nanometers; a patterned layer formed on said array and having a pattern which is determined by said spatial pattern of said array; and at least one electrode coupled to at least one of said patterned layer and said array.
Claim 2
Dependent Claim
89 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variation, said pattern having a characteristic dimension of 1-50 nanometers; a patterned layer formed on said array and having a pattern which is determined by said spatial pattern of said array; and at least one electrode coupled to at least one of said patterned layer and said array.
Claim 3
Dependent Claim
92 words
A nanosubstrate for the production of patterns and structures on a nanometer scale comprising: a substrate base; a plurality of projections disposed in a pattern on said base, said pattern having a characteristic dimension of 1-50 nanometers and corresponding to a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations in a self-assembled two-dimensional array; and a layer of material disposed on said base and between said projections, said material of said layer being different than material of said projections, said material not forming said pattern naturally.
Claim 4
Dependent Claim
92 words
A nanosubstrate for the production of patterns and structures on a nanometer scale comprising: a substrate base; a plurality of projections disposed in a pattern on said base, said pattern having a characteristic dimension of 1-50 nanometers and corresponding to a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations in a self-assembled two-dimensional array; and a layer of material disposed on said base and between said projections, said material of said layer being different than material of said projections, said material not forming said pattern naturally.
Claim 5
Dependent Claim
63 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations, said pattern having a characteristic dimension of 1-50 nanometers; and means for determining the state of selected portions of said array.
Claim 6
Dependent Claim
63 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations, said pattern having a characteristic dimension of 1-50 nanometers; and means for determining the state of selected portions of said array.
Claim 7
Dependent Claim
19 words
A nanosubstrate as in claim 3 wherein said determining means includes a plurality of electrodes coupled to said array.
Claim 8
Dependent Claim
60 words
A microsubstrate for the production of patterns on a nanometer scale comprising: a substrate base; and a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of one of thickness variations, density variations and holes, said pattern having a characteristic dimension of 1-50 nanometers, said substrate base having depressions therein corresponding to said holes.
Claim 9
Dependent Claim
60 words
A microsubstrate for the production of patterns on a nanometer scale comprising: a substrate base; and a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of one of thickness variations, density variations and holes, said pattern having a characteristic dimension of 1-50 nanometers, said substrate base having depressions therein corresponding to said holes.
Claim 10
Dependent Claim
73 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of holes, said pattern having a characteristic dimension of 1-50 nanometers; and a patterned layer disposed on said array, and substantially not on said substrate base and having a pattern of holes which is determined by said spatial pattern of said array.
Claim 11
Dependent Claim
73 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of holes, said pattern having a characteristic dimension of 1-50 nanometers; and a patterned layer disposed on said array, and substantially not on said substrate base and having a pattern of holes which is determined by said spatial pattern of said array.
Claim 12
Dependent Claim
75 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations, said pattern having a characteristic dimension of 1-50 nanometers; and a patterned layer disposed on said array, and having a pattern of holes which is determined by said spatial pattern of said array.
Claim 13
Dependent Claim
75 words
A nanosubstrate for the production of patterns on a nanometer scale comprising: a substrate base; a self-assembled two-dimensional array overlying said substrate base, said two-dimensional array forming a two-dimensional spatial pattern of at least one of thickness, density and chemical reactivity variations, said pattern having a characteristic dimension of 1-50 nanometers; and a patterned layer disposed on said array, and having a pattern of holes which is determined by said spatial pattern of said array.
Claim 14
Dependent Claim
17 words
A nanosubstrate as in claim 1, 3 or 5 wherein said array includes spatially ordered nondenatured proteins.
Claim 15
Dependent Claim
15 words
A nanosubstrate as in claim 8 wherein said spatial array includes S-layer from Sulfolobus acidocaldarius.
Claim 16
Dependent Claim
15 words
A nanosubstrate as in claim 8 wherein said array includes purple membrane from HALOBACTERIUM HALOBIUM.
Claim 17
Dependent Claim
11 words
A nanosubstrate as in claim 8 wherein said array includes rhodopsin.
Claim 18
Dependent Claim
12 words
A nanosubstrate as in claim 8 wherein said array includes cytochrome oxidase.
Claim 19
Dependent Claim
14 words
A nanosubstrate as in claim 8 wherein said array includes E. coli matrix porin.
Claim 20
Dependent Claim
13 words
A nanosubstrate as in claim 8 wherein said array includes tight gap junctions.
Claim 21
Dependent Claim
21 words
A nanosubstrate as in claim 1, 3 or 5 wherein said array includes a surface layer of a three-dimensionally ordered crystal.
Claim 22
Dependent Claim
17 words
A nanosubstrate as in claim 15 wherein said three-dimensionally ordered crystal includes a three-dimensionally ordered protein crystal.
Claim 23
Dependent Claim
20 words
A nanosubstrate as in claim 1, 3 or 5 wherein said array contains spatially ordered holes 1-50 nanometers in dimension.
Claim 24
Dependent Claim
26 words
A nanosubstrate as in claim 1 or 3 wherein said array forms two-dimensional spatial pattern of chemical reactivity variations having a characteristic dimension of 1-50 nanometers.
Claim 25
Dependent Claim
18 words
A nanosubstrate as in claim 1, 2 or 5 wherein said substrate base includes a plurality of layers.
Claim 26
Dependent Claim
37 words
A nanosubstrate as in claim 1, or 5 wherein said substrate base includes material containing a heterogenous surface which is spatially differentiated, said pattern of said array being aligned in a predetermined manner with said substrate heterogeneity.
Claim 27
Dependent Claim
34 words
A nanosubstrate as in claim 1 or 5 wherein said substrate base includes material containing a heterogeneous surface which is spatially differentiated, said pattern of said array not being aligned with said substrate heterogeneity.
Claim 28
Dependent Claim
16 words
A nanosubstrate as in claim 1, 2 or 5 wherein said substrate base includes a liquid.
Claim 29
Dependent Claim
15 words
A nanosubstrate as in claim 1 wherein said patterned layer includes a plurality of layers.
Claim 30
Dependent Claim
15 words
A nanosubstrate as in claim 1 wherein said patterned layer is heterogeneous and spatially differentiated.
Claim 31
Dependent Claim
35 words
A nanosubstrate as in claim 2 further comprising a patterned layer disposed adjacent said projections and said layer of material, said patterned layer having a pattern which is determined by said pattern of said projections.
Claim 32
Dependent Claim
19 words
A nanosubstrate as in claim 24 wherein said patterned layer includes at least one electrode coupled to said projections.
Claim 33
Dependent Claim
19 words
A nanosubstrate as in claim 2 wherein said projections are made of at least one type of biological molecule.
Claim 34
Dependent Claim
27 words
A nanosubstrate as in claim 2 wherein said projections are from at least one of the group consisting of ferritin and ferritin conjugated with another biological molecule.
Claim 35
Dependent Claim
14 words
A nanosubstrate as in claim 28 wherein said another biological molecule is an antibody.
Claim 36
Dependent Claim
13 words
A nanostructure as in claim 27 wherein said biological molecule has catalytic activity.
Claim 37
Dependent Claim
18 words
A nanostructure as in claim 2 wherein said layer of material between said projections includes a conducting polymer.
Claim 38
Dependent Claim
25 words
A nanostructure as in claim 31 wherein a plurality of molecules of said conducting polymer each make contact with more than one of said projections.
Claim 39
Dependent Claim
29 words
A nanostructure as in claim 2 wherein said layer of material includes a self-assembled two-dimensional array forming a two-dimensional spatial pattern of holes corresponding to said pattern of projections.
Claim 40
Dependent Claim
15 words
A nanosubstrate as in claim 5 further comprising material filling said depressions in said substrate.
Claim 41
Dependent Claim
13 words
A nanostructure as in claim 34 wherein said material includes a biological molecule.
Claim 42
Dependent Claim
28 words
A nanosubstrate as in claim 35 wherein said material is made of at least one of the group consisting of ferritin and ferritin conjugated to another biological molecule.
Claim 43
Dependent Claim
15 words
A nanosubstrate as in claim 36 wherein said material includes ferritin conjugated with an antibody.
Claim 44
Dependent Claim
13 words
A nanosubstrate as in claim 35 wherein said biological molecule has catalytic activity.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-01 | 1991-08-31 | 1992-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-01 | 1995-08-31 | 1996-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-01 | 1999-08-31 | 2000-03-01 | $7700.00 | Window Closed / Lapsed |