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US4725480A Expired / Lapsed US ⏱️ 0.0 years remaining

Hermetically sealed electronic component

Assignee: Fluke Corp
•
Filing: 1985-09-24
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Granted: 1988-02-16
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Expires: 2005-09-24
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Abstract

Abstract A ceramic substrate supports a thin or thick film electronic circuit hermetically enclosed by a vitreous glass covering sealed to the ceramic substrate by a heat fused vitreous sealing glass. The vitreous sealing glass is screened onto the vitreous glass covering in a composition comprising a binder material and a liquifier. The electronic circuit is trimmed by a laser beam directed through the vitreous glass covering as one of the final process steps after completion of those process steps which tend to affect the resistivity of the resistive element; process steps such as high temperature baking and soldering of component parts.

Inventors

  • 👤 I. Macit Gurol

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 23:47
CPC Classifications
H; H01; H01C; H01C13/00; H01C13/02; H01C17/00; H01C17/22; H01C17/24; H01C17/242; H10; H10W; H10W74/00; H10W74/10; H10W74/111; H10W74/114; H10W74/127; H10W74/40; H10W74/47; H10W74/473; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/16; H05K1/167; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/017; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926

Claims Analysis

Total Claims: 27
Claim 1
Independent Claim 43 words
A hermetically sealed device comprising: a substrate providing a base for supporting electronics circuitry thereon; electronic circuitry disposed on said substrate; and a vitreous glass covering disposed over and hermetically sealing said electronic circuitry with said vitreous glass covering sealed onto said substrate.
Claim 2
Dependent Claim 43 words
A hermetically sealed device comprising: a substrate providing a base for supporting electronics circuitry thereon; electronic circuitry disposed on said substrate; and a vitreous glass covering disposed over and hermetically sealing said electronic circuitry with said vitreous glass covering sealed onto said substrate.
Claim 3
Dependent Claim 20 words
The invention as claimed in claim 1 wherein said vitreous glass covering has a sealing temperature below approximately 380° C.
Claim 4
Dependent Claim 22 words
The invention as claimed in claim 2 wherein said vitreous glass covering has a sealing temperature between 370° C. and 375° C.
Claim 5
Dependent Claim 28 words
The invention as claimed in claim 1 wherein the coefficient of thermal expansion between said substrate and said vitreous glass covering is within two millionths (2×10 -6 ).
Claim 6
Dependent Claim 19 words
The invention as claimed in claim 1 wherein said vitreous glass covering is transparent to light at laser frequencies.
Claim 7
Dependent Claim 61 words
The invention as claimed in claim 1 wherein said substrate is selected from a group consisting of alumina, beryllia, steatite, magnesium alumina silicate, titanium dioxide, silicon carbide, and zircon; and said vitreous glass covering is a uniformly dispersed mixture of silica, soda ash, and lime combined with metal oxides from the group consisting of boron, calcium, lead, lithium, titanium, and cerium.
Claim 8
Dependent Claim 69 words
A hermetically sealed device comprising: a substrate providing a base for supporting electronic circuitry thereon; electronic circuitry disposed on said substrate; a covering disposed over said electronic circuitry; and a vitreous glass seal disposed around said electronic circuitry fused to said covering and said substrate to hermetically seal said electronic circuitry wherein said vitreous glass seal hs a fusion temperature below approximately 380° at pressures above approximately 100 psi.
Claim 9
Dependent Claim 69 words
A hermetically sealed device comprising: a substrate providing a base for supporting electronic circuitry thereon; electronic circuitry disposed on said substrate; a covering disposed over said electronic circuitry; and a vitreous glass seal disposed around said electronic circuitry fused to said covering and said substrate to hermetically seal said electronic circuitry wherein said vitreous glass seal hs a fusion temperature below approximately 380° at pressures above approximately 100 psi.
Claim 10
Dependent Claim 35 words
The invention as claimed in claim 7 wherein said covering is a vitreous glass having a softening temperature at least 50° C. above the fusion temperature of said vitreous glass seal at the same pressures.
Claim 11
Dependent Claim 33 words
The invention as claimed in claim 8 wherein the difference in the coefficient of thermal expansion between said vitreous glass covering and said vitreous glass seal is within two millionths (2×10 -6 ).
Claim 12
Dependent Claim 19 words
The invention as claimed in claim 9 wherein said vitreous glass covering is transparent to light at laser frequencies.
Claim 13
Dependent Claim 34 words
The invention as claimed in claim 1 wherein said substrate is a ceramic comprised of material selected from the group consisting of alumina, beryllia, steatite, titanium dioxide, magnesium alumina silicate, silicon carbide, and zircon.
Claim 14
Dependent Claim 34 words
The invention as claimed in claim 11 wherein said covering is a ceramic comprised of material selected from the group consisting of alumina, beryllia, steatite, titanium dioxide, magnexium alumina silicate, silicon carbide, and zircon.
Claim 15
Dependent Claim 44 words
The invention as claimed in claim 12 wherein said substrate and covering are of the same material and the coefficient of thermal expansion of the material is within two millionths (2×10 -6 ) of the coefficient of thermal expansion of said vitreous glass seal.
Claim 16
Dependent Claim 39 words
The invention as claimed in claim 7 wherein said vitreous glass seal is a uniformly dispersed mixture of silica, soda ash, and lime combined with metal oxides from the group consisting of boron, calcium, lead, lithium, titanium, and cerium.
Claim 17
Dependent Claim 18 words
The invention as claimed in claim 14 wherein said covering is of the same material as said seal.
Claim 18
Dependent Claim 54 words
A hermetically sealed device comprising: a ceramic substrate providing a base for supporting electronic circuitry thereon; electronic circuitry deposited on said substrate; a vitreous glass covering disposed over said electronic circuitry; and a vitreous glass seal disposed around said electronic circuitry fused to said covering and said substrate to hermetically seal said electronic circuitry.
Claim 19
Dependent Claim 54 words
A hermetically sealed device comprising: a ceramic substrate providing a base for supporting electronic circuitry thereon; electronic circuitry deposited on said substrate; a vitreous glass covering disposed over said electronic circuitry; and a vitreous glass seal disposed around said electronic circuitry fused to said covering and said substrate to hermetically seal said electronic circuitry.
Claim 20
Dependent Claim 26 words
The invention as claimed in claim 16 wherein said vitreous glass seal has a fusion temperature between 370° C. and 375° C. at substantially 200 psi.
Claim 21
Dependent Claim 25 words
The invention as claimed in claim 17 wherein said covering is a vitreous glass having a softening temperature above 420° C. at substantially 200 psi.
Claim 22
Dependent Claim 33 words
The invention as claimed in claim 18 wherein the difference in the coefficient of thermal expansion between said vitreous glass covering and said vitreous glass seal is within one millionth (1×10 -6 )
Claim 23
Dependent Claim 24 words
The invention as claimed in claim 19 wherein said vitreous glass covering is a borosilicate glass and is transparent to light at laser frequencies.
Claim 24
Dependent Claim 51 words
The invention as claimed in claim 16 wherein said substrate is a ceramic comprised of alumina, and has a coefficient of thermal expansion within one millionth (1×10 -6 ) of the coefficient of thermal expansion of said vitreous glass seal and two millionths (2×10 -6 ) of said vitreous glass covering.
Claim 25
Dependent Claim 25 words
The hermetically sealed device as recited in claim 1, wherein electronic circuitry is a resistive element tending to become unstable at temperatures above 380° C.
Claim 26
Dependent Claim 25 words
The hermetically sealed device as recited in claim 7, wherein electronic circuitry is a resistive element tending to become unstable at temperatures above 380° C.
Claim 27
Dependent Claim 25 words
The hermetically sealed device as recited in claim 17, wherein electronic circuitry is a resistive element tending to become unstable at temperatures above 380° C.

References Cited (Backward Citations)

GB1014735A Cited
GB1098752A Cited
GB1015549A Cited
US3859126A Cited
US3964920A Cited
US4025669A Cited
US4147835A Cited
US4481708A Cited
US4537863A Cited
US4621064A Cited
US4622433A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-02-15 1991-08-17 1992-02-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-02-15 1995-08-17 1996-02-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-02-15 1999-08-17 2000-02-16 $7700.00 Window Closed / Lapsed

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