Abstract A method for observing the arrangement of atoms in a thin layer on a surface and an apparatus for employing the method are disclosed. According to the method, a finely converged electron beam is directed to a surface of a sample and the X-ray emitted from the surface is detected at a take-off angle equivalent to, or in the vicinity of, the total reflection angle, thereby avoiding interference from X-rays emitted beneath the surface. The apparatus includes an electron gun, a sample holding means, one or more detectors and devices for storing, processing and displaying the output signal from the detectors. The apparatus also provides for two-dimensional scanning of a surface and for adjustment of the position of the sample and of the detectors.
Inventors
👤 Shozo Ino
👤 Hiroshi Daimon
👤 Shuji Hasegawa
Bibliographic Details
Application Number—
JurisdictionUS
Data Sourcegoogle_patents
Last Synchronized2026-10-27 09:27
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/225
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
80 words
A method of observing the arrangement of atoms on the surface of a sample comprising the steps of: scanning two-dimensionally the surface of a sample by irradiating a finely converged electron beam thereon; detecting the X-ray emitted from said surface of said sample by the irradiation of said electron beam at a take-off angle substantially equivalent to the total reflection angle of said X-ray on said surface of said sample; and forming a scanned image from the detected electromagnetic wave.
Claim 2
Independent Claim
80 words
A method of observing the arrangement of atoms on the surface of a sample comprising the steps of: scanning two-dimensionally the surface of a sample by irradiating a finely converged electron beam thereon; detecting the X-ray emitted from said surface of said sample by the irradiation of said electron beam at a take-off angle substantially equivalent to the total reflection angle of said X-ray on said surface of said sample; and forming a scanned image from the detected electromagnetic wave.
Claim 3
Dependent Claim
31 words
A method of observing the arrangement of atoms on a surface according to claim 1, wherein said take-off angle of said X-ray emitted from said surface of said sample is varied.
Claim 4
Dependent Claim
32 words
A method of observing the arrangement of atoms on a surface according to claim 1, wherein the diameter of said electron beam for scanning two-dimensionally said surface of said sample is varied.