US3942005A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron scanning apparatus
Assignee: Hitachi Ltd
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Filing: 1974-12-12
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Granted: 1976-03-02
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Expires: 1994-12-12
Abstract
Abstract An electron scanning apparatus is capable of two-dimensional scanning of a specimen with a primary electron beam and also capable of radiating the primary electron beam in spot on the specimen. While moving the specimen in a straight line, the two-dimensional scanning with the primary electron beam is selectively alternated with the spot radiation with the primary electron beam, thus making it possible to identify the point of analysis on the specimen in the course of linear analysis of the specimen.
Inventors
- 👤 Tadao Watanabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:23
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/252; H01J37/256
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
90 words
An electron scanning apparatus comprising scanning means for two-dimensionally scanning a specimen with a primary electron beam, means for radiating the surface of said specimen with said primary electron beam in the form of spot, a couple of detector means for detecting information generated from said specimen by said scanning means and said radiating means, display and recording means for displaying and recording said information in response to the output signal from said detector means, and first switching means for selectively alternating between said scanning means and said radiating means.
Claim 2
Dependent Claim
90 words
An electron scanning apparatus comprising scanning means for two-dimensionally scanning a specimen with a primary electron beam, means for radiating the surface of said specimen with said primary electron beam in the form of spot, a couple of detector means for detecting information generated from said specimen by said scanning means and said radiating means, display and recording means for displaying and recording said information in response to the output signal from said detector means, and first switching means for selectively alternating between said scanning means and said radiating means.
Claim 3
Dependent Claim
26 words
An electron scanning apparatus according to claim 1, further comprising a manual mode setting device for manually issuing a switching command to said first switching means.
Claim 4
Dependent Claim
30 words
An electron scanning apparatus according to claim 1, further comprising a switching pulse generator for issuing a switching command to said first switching means repeatedly at regular intervals of time.
Claim 5
Dependent Claim
53 words
An electron scanning apparatus according to claim 2, further comprising a switching pulse generator for issuing a switching command to said first switching means repeatedly at regular intervals of time, and second switching means for selecting at will the signals from said manual mode setting device or those from said switching pulse generator.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-03-02 | 1979-09-01 | 1980-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-03-02 | 1983-09-01 | 1984-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-03-02 | 1987-09-01 | 1988-03-02 | $7700.00 | Window Closed / Lapsed |