Patent US4720401A successfully refreshed from Google Patents.
US4720401A
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Enhanced adhesion between metals and polymers
Assignee: International Business Machines Corp
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Filing: 1986-10-02
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Granted: 1988-01-19
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Expires: 2006-10-02
Abstract
Abstract A technique is described for increasing the adhesion between metals and organic substrates, where the metals are those which normally only very weakly bond to the substrate. These metals include Ni, Cu, Al, Ag, Au, Ta, Pt, Ir, Rh, Pd, Zn, and Cd. The organic substrates include mylar, polyimides, polyesters, polyethylene, polystyrene, etc. Enhanced adhesion occurs when intermixing between the depositing metal atoms and the substrate is optimized to a depth less than about 1000 angstroms into the substrate. This occurs in a critical substrate temperature range of about (0.6-0.8) Tc, where Tc is the curing temperature of the substrate. The deposition rate of the metal atoms is chosen such that the arrival rate of the metal atoms at the surface of the substrate is comparable to or less than the rate of diffusion of metal atoms into the substrate. This provides optimum intermixing and maximum adhesion.
Inventors
- 👤 Paul S. C. Ho
- 👤 Peter O. Hahn
- 👤 Harry Lefakis
- 👤 Gary W. Rubloff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:09
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/38; H05K3/388; C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/20; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/67; H10W70/69; H10W70/695; H05K2201/00; H05K2201/20; H05K2201/2063; H05K2203/00; H05K2203/11; H05K2203/1105
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
146 words
A method for producing a metal-organic substrate composite with increased adhesion between the metal and the organic substrate, where the metal has only weak intrinsic bonding to the organic substrate, including the steps of: heating the organic substrate to a temperature approximately 0.6-0.8 of its curing temperature T c , and depositing said metal onto said organic substrate while said substrate is heated to a substrate temperature within the range of about (0.6-0.8) T c until at least a few atomic layers of continuous metal are formed on said substrate, said deposition occurring at a rate such that the diffusion of depositing metal atoms into said organic substrate is equal to or greater than the arrival rate of said metal atoms at the surface of said organic substrate, said metal being one which has only weak chemical bonding to the atomic constituents of said organic substrate.
Claim 2
Independent Claim
146 words
A method for producing a metal-organic substrate composite with increased adhesion between the metal and the organic substrate, where the metal has only weak intrinsic bonding to the organic substrate, including the steps of: heating the organic substrate to a temperature approximately 0.6-0.8 of its curing temperature T c , and depositing said metal onto said organic substrate while said substrate is heated to a substrate temperature within the range of about (0.6-0.8) T c until at least a few atomic layers of continuous metal are formed on said substrate, said deposition occurring at a rate such that the diffusion of depositing metal atoms into said organic substrate is equal to or greater than the arrival rate of said metal atoms at the surface of said organic substrate, said metal being one which has only weak chemical bonding to the atomic constituents of said organic substrate.
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein said metal is selected from the group consisting of Ni, Cu, and Al.
Claim 4
Dependent Claim
27 words
The method of claim 1, where said metal deposition rate does not exceed about 1/10 of the diffusion rate of said metal atoms into said organic substrate.
Claim 5
Dependent Claim
28 words
The method of claim 1, where said metals are selected from the group consisting of Ni, Cu, Al, Ag, Au, Ta, Pt, Ir, Rh, Pd, Zn, and Cd.
Claim 6
Dependent Claim
12 words
The method of claim 1, where said substrate is an organic polymer.
Claim 7
Dependent Claim
10 words
The method of claim 1, where said substrate is polyimide.
Claim 8
Independent Claim
154 words
A method for depositing a metal onto an organic polymer substrate in order to maximize the adhesion between the metal and the substrate, including the steps of: heating said organic polymer substrate to a temperature approximately (0.6-0.8) of its curing temperature T c , depositing on said organic polymer substrate a metal selected from the group consisting of Ni, Cu, Al, Au, Ag, Ta, Rh, and Pd, said substrate being heated to a temperature within the approximate range (0.6-0.8) T c during the deposition of said metal thereon at least until a few atomic layers of a continuous metal film are formed on the surface of said substrate, said substrate temperature and the deposition rate of metal atoms onto said substrate being chosen such that intermixing of metal atoms and said substrate is optimized to a distance less than about 1000 angstroms into said substrate to maximize adhesion between said metal and said substrate.
Claim 9
Independent Claim
154 words
A method for depositing a metal onto an organic polymer substrate in order to maximize the adhesion between the metal and the substrate, including the steps of: heating said organic polymer substrate to a temperature approximately (0.6-0.8) of its curing temperature T c , depositing on said organic polymer substrate a metal selected from the group consisting of Ni, Cu, Al, Au, Ag, Ta, Rh, and Pd, said substrate being heated to a temperature within the approximate range (0.6-0.8) T c during the deposition of said metal thereon at least until a few atomic layers of a continuous metal film are formed on the surface of said substrate, said substrate temperature and the deposition rate of metal atoms onto said substrate being chosen such that intermixing of metal atoms and said substrate is optimized to a distance less than about 1000 angstroms into said substrate to maximize adhesion between said metal and said substrate.
Claim 10
Dependent Claim
10 words
The method of claim 7, where said substrate is polyimide.
Claim 11
Dependent Claim
35 words
The method of claim 8, wherein the arrival rate of metal atoms at the surface of said organic polymer substrate does not exceed the diffusion rate of said metal atoms into said organic polymer substrate.
Claim 12
Dependent Claim
15 words
The method of claim 8, where said metal atoms are deposited by evaporation or sputtering.
Claim 13
Independent Claim
141 words
A method for making a metal layer-organic substrate composite having increased adhesion between the metal layer and the organic substrate, including the steps of heating said organic substrate to a temperature approximately (0.6-0.8) of its curing temperature T c , depositing thereon a metal selected from the group consisting of Ni, Cu, Al, Ag, Ta, Pt, Ir, Rh, Pd, Zn, and Cd, said deposition being at a rate sufficiently slow that diffusion of metal atoms into said organic substrate can occur, said organic substrate being heated to a temperature in the approximate range (0.6-0.8) T c during said deposition for a time sufficiently long to allow optimum intermixing between said metal and the atomic constituents of said substrate over a distance less than about 1000 angstroms into said organic substrate in order to maximize adhesion between said metal and said substrate.
Claim 14
Independent Claim
141 words
A method for making a metal layer-organic substrate composite having increased adhesion between the metal layer and the organic substrate, including the steps of heating said organic substrate to a temperature approximately (0.6-0.8) of its curing temperature T c , depositing thereon a metal selected from the group consisting of Ni, Cu, Al, Ag, Ta, Pt, Ir, Rh, Pd, Zn, and Cd, said deposition being at a rate sufficiently slow that diffusion of metal atoms into said organic substrate can occur, said organic substrate being heated to a temperature in the approximate range (0.6-0.8) T c during said deposition for a time sufficiently long to allow optimum intermixing between said metal and the atomic constituents of said substrate over a distance less than about 1000 angstroms into said organic substrate in order to maximize adhesion between said metal and said substrate.
Claim 15
Dependent Claim
11 words
The method of claim 11, where said organic substrate is polyimide.
Claim 16
Dependent Claim
12 words
The method of claim 11, where said substrate is an organic polymer.
Claim 17
Dependent Claim
21 words
The method of claim 13, where said deposition rate is less than the diffusion rate of metal atoms into said substrate.
Claim 18
Dependent Claim
22 words
The method of claim 1, where said substrate is selected from the group consisting of mylar, polyimide, polyesters, polyethylene, epoxies, and polystyrene.
Claim 19
Independent Claim
96 words
A method for producing a metal-polyimide composite having good adhesion between said metal and polyimide, comprising the steps of: depositing a metal selected from group consisting of Cu, Ni, and Al onto said polyimide while said polyimide is heated to a temperature in the range of about (0.6-0.8) T c , where T c is the curing temperature of said polyimide, and adjusting the rate of arrival of atoms of said metal at the surface of said polyimide to be about equal to or less than the diffusion rate of said metal atoms into said substrate.
Claim 20
Independent Claim
96 words
A method for producing a metal-polyimide composite having good adhesion between said metal and polyimide, comprising the steps of: depositing a metal selected from group consisting of Cu, Ni, and Al onto said polyimide while said polyimide is heated to a temperature in the range of about (0.6-0.8) T c , where T c is the curing temperature of said polyimide, and adjusting the rate of arrival of atoms of said metal at the surface of said polyimide to be about equal to or less than the diffusion rate of said metal atoms into said substrate.
Claim 21
Dependent Claim
23 words
The method of claim 16, where said rate of arrival of said metal atoms does not exceed about 0.1 of said diffusion rate.
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