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US4718972A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of removing seed particles from circuit board substrate surface

Assignee: International Business Machines Corp
•
Filing: 1986-01-24
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Granted: 1988-01-12
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Expires: 2006-01-24
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Abstract

Abstract A method of making a printed circuit board is disclosed wherein metallic seed particles are applied to a surface of the substrate. An image of the desired conductor pattern is defined by a maskant layer to permit the subsequent electroless deposition of the conductor material upon the exposed seeded areas of the substrate. Then, the substrate surface is subjected to a plasma discharge to facilitate removal of the seed particles.

Inventors

  • 👤 Suryadevara V. Babu
  • 👤 William F. Herrmann
  • 👤 Joseph G. Hoffarth
  • 👤 Voya Markovich
  • 👤 Robert T. Wiley

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 23:35
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/08; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/184; H05K3/22; H05K3/26; H05K2201/00; H05K2201/07; H05K2201/0753; H05K2201/0761; H05K2203/00; H05K2203/07; H05K2203/0779; H05K2203/0783; H05K2203/09; H05K2203/095; H05K2203/14; H05K2203/1407

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 135 words
A method of making a printed circuit board comprising the steps of: (a) applying metallic seed particles onto a surface of a dielectric substrate; (b) applying a maskant layer onto the substrate surface over the seed particles; (c) selectively removing portions of the maskant layer to expose seeded areas on the substrate desired for conductor formation; (d) electrolessly depositing metallic conductors on the exposed seeded areas on the substrate; (e) removing the remaining maskant; (f) subjecting the substrate surface to a plasma discharge formed from a gaseous mixture comprised of oxygen and a halocarbon to convert the metallic seed particles to their salt forms; and (g) washing the substrate in a solvent which effectively removes said seed particles converted to their salt form from the substrate surface but does not adversely affect the desposited conductors.
Claim 2
Independent Claim 135 words
A method of making a printed circuit board comprising the steps of: (a) applying metallic seed particles onto a surface of a dielectric substrate; (b) applying a maskant layer onto the substrate surface over the seed particles; (c) selectively removing portions of the maskant layer to expose seeded areas on the substrate desired for conductor formation; (d) electrolessly depositing metallic conductors on the exposed seeded areas on the substrate; (e) removing the remaining maskant; (f) subjecting the substrate surface to a plasma discharge formed from a gaseous mixture comprised of oxygen and a halocarbon to convert the metallic seed particles to their salt forms; and (g) washing the substrate in a solvent which effectively removes said seed particles converted to their salt form from the substrate surface but does not adversely affect the desposited conductors.
Claim 3
Dependent Claim 13 words
The method of claim 1 wherein the seed particles comprise palladium and tin.
Claim 4
Dependent Claim 23 words
The method of claim 2 wherein said halocarbon is selected from the group of tetrafluoromethane (CF 4 ) and chlorotrifluoromethane (CClF 3 ).
Claim 5
Dependent Claim 12 words
The method of claim 3 wherein the solvent is an alkaline solvent.
Claim 6
Dependent Claim 22 words
The method of claim 4 wherein the alkaline solvent is selected from the group of caustic soda, potassium hydroxide and sodium silicate.
Claim 7
Independent Claim 176 words
A method of making a printed circuit board comprising the steps of: (a) depositing collodial seed particles of palladium and tin on a surface of an epoxy resin substrate; (b) coating the seeded substrate surface by laminating a photoresist foil onto the surface; (c) selectively removing portions of the photoresist to expose seeded areas on the substrate desired for conductor formation; (d) electrolessly depositing copper onto the exposed seeded areas to thereby form electrical conductors on the substrate surface; (e) removing remaining portions of the photoresist; (f) exposing the substrate to a gaseous plasma formed in a radio frequency field from a mixture consisting of oxygen and a halocarbon for a sufficient period of time to convert the palladium and tin seed particles into their respective salt forms; and (g) washing the substrate in a 5-50% by volume solution of caustic soda to remove the seed particles that have been converted to their salt forms by said plasma whereby the removal of the seed particles substantially decreases the likelihood of electrical shorts occurring between the conductors.
Claim 8
Independent Claim 176 words
A method of making a printed circuit board comprising the steps of: (a) depositing collodial seed particles of palladium and tin on a surface of an epoxy resin substrate; (b) coating the seeded substrate surface by laminating a photoresist foil onto the surface; (c) selectively removing portions of the photoresist to expose seeded areas on the substrate desired for conductor formation; (d) electrolessly depositing copper onto the exposed seeded areas to thereby form electrical conductors on the substrate surface; (e) removing remaining portions of the photoresist; (f) exposing the substrate to a gaseous plasma formed in a radio frequency field from a mixture consisting of oxygen and a halocarbon for a sufficient period of time to convert the palladium and tin seed particles into their respective salt forms; and (g) washing the substrate in a 5-50% by volume solution of caustic soda to remove the seed particles that have been converted to their salt forms by said plasma whereby the removal of the seed particles substantially decreases the likelihood of electrical shorts occurring between the conductors.
Claim 9
Dependent Claim 23 words
The method of claim 6 wherein the halocarbon is selected from the group of tetrafluoromethane (CF 4 ) and chlorotrifluoromethane (CClF 3 ).
Claim 10
Dependent Claim 90 words
In a method of making a printed circuit board wherein metallic conductors are electrolessly deposited on a metallic particle seeded dielectric substrate surface, the improvement comprising the steps of: subjecting the substrate to a gas plasma formed from a mixture consisting of oxygen and a halocarbon to convert the metallic seed particles to their salt forms; and thereafter, washing the substrate in an alkaline solution which effectively removes said seed particles converted to their salt form from the substrate surface between the conductors but does not adversely affect the conductors.
Claim 11
Dependent Claim 90 words
In a method of making a printed circuit board wherein metallic conductors are electrolessly deposited on a metallic particle seeded dielectric substrate surface, the improvement comprising the steps of: subjecting the substrate to a gas plasma formed from a mixture consisting of oxygen and a halocarbon to convert the metallic seed particles to their salt forms; and thereafter, washing the substrate in an alkaline solution which effectively removes said seed particles converted to their salt form from the substrate surface between the conductors but does not adversely affect the conductors.

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-01-11 1991-07-13 1992-01-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-01-11 1995-07-13 1996-01-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-01-11 1999-07-13 2000-01-12 $7700.00 Window Closed / Lapsed

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