Patent US4716048A successfully refreshed from Google Patents.
US4716048A
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Process for forming deposited film
Assignee: Canon Inc
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Filing: 1986-02-11
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Granted: 1987-12-29
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Expires: 2006-02-11
Abstract
Abstract A process for forming a deposited film comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing germanium and a halogen and an active species (B) formed from a chemical substance for film formation which is reactive with said active species (A) separately form each other, and then allowing both the species to react with each other thereby to form a deposited film on the substrate.
Inventors
- 👤 Shunichi Ishihara
- 👤 Shigeru Ohno
- 👤 Masahiro Kanai
- 👤 Shunri Oda
- 👤 Isamu Shimizu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:54
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/24; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
81 words
A process for forming a deposited film, which comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing germanium and a halogen and an active species (B) formed by decomposition of a chemical substance for film formation which is reactive with said active species (A) separately from each other, and then allowing both the species to react with each other thereby to form a deposited film on the substrate.
Claim 2
Dependent Claim
81 words
A process for forming a deposited film, which comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing germanium and a halogen and an active species (B) formed by decomposition of a chemical substance for film formation which is reactive with said active species (A) separately from each other, and then allowing both the species to react with each other thereby to form a deposited film on the substrate.
Claim 3
Dependent Claim
19 words
A process according to claim 1, wherein said active species (B) is formed from hydrogen and/or a halogen compound.
Claim 4
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a silicon containing compound.
Claim 5
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a carbon containing compound.
Claim 6
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed form a germanium containing compound.
Claim 7
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from an oxygen containing compound.
Claim 8
Dependent Claim
18 words
A process according to claim 1, wherein said active species (B) is formed from a nitrogen containing compound.
Claim 9
Dependent Claim
34 words
A process according to claim 1, wherein said active species (A) is formed by decomposition of a chain or cyclic hydrogenated germanium of which hydrogen atoms are partially or wholly substituted with halogen aotms.
Claim 10
Dependent Claim
19 words
A process according to claim 8, wherein said active species (B) is formed from hydrogen and/or a halogen compound.
Claim 11
Dependent Claim
18 words
A process according to claim 8, wherein said acitve species (B) is formed from a silicon containing compound
Claim 12
Dependent Claim
18 words
A process according to claim 8, wherein said acitve species (B) is formed from a carbon containing compound.
Claim 13
Dependent Claim
18 words
A process according to claim 8, wherein said active apecies (B) is formed form a germanium containing compound.
Claim 14
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from an oxygen containing compound.
Claim 15
Dependent Claim
18 words
A process according to claim 8, wherein said active species (B) is formed from a nitorgen containing compound.
Claim 16
Dependent Claim
47 words
A process according to claim 1, wherein an active species (SX) formed by decomposition of a compound containing silicon and a halogen and/or an active species (CX) formed by decomposition of a compound containing carbon and a halogen is used in addition to said active species (A).
Claim 17
Dependent Claim
19 words
A process according to claim 15, wherein said active species (B) is formed from hydrogen and/or a halogen compound.
Claim 18
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a silicon containing compouns.
Claim 19
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a carbon containing compound.
Claim 20
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a germanium containing compound.
Claim 21
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from an oxygen containing compound.
Claim 22
Dependent Claim
18 words
A process according to claim 15, wherein said active species (B) is formed from a nitrogen containing compound.
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