US4715319A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for coating a substrate by means of plasma-CVD or cathode sputtering
Assignee: US Philips Corp
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Filing: 1987-02-27
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Granted: 1987-12-29
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Expires: 2007-02-27
Abstract
Abstract A device for covering a substrate by means of both plasma chemical vapor deposition and by high-frequency cathode sputtering which, as a result of easily exchangeable individual devices to introduce gaseous substances into the reaction space as well as easily exchangeable individual devices for influencing the flow of the process gases within the reaction space, results in a very good uniformity of the layer thickness of the produced layers even when the operation has to be carried out at higher gas pressures and hence higher flow rates.
Inventors
- 👤 Udo Bringmann
- 👤 Klaus Drews
- 👤 Detlef Schon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:47
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/34
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
161 words
A device for providing a coating on a substrate by means of a plasma chemical vapor deposition or cathode sputtering, said device comprising a first angular electrode provided with an aperture extending along a central axis and axially fixed in an evacuatable chamber provided with a second counter sheet electrode spaced from and opposing said first electrode, means for introducing gaseous substances into said chamber, means for applying a voltage to said electrodes to produce plasma in said chamber, and said chamber being further provided with a bipartite insulator block having an upper first portion adjoining said first electrode and provided with a central aperture corresponding to the central aperture of said first electrode and having a second portion immediately adjoining said first portion bearing on the base of said evacuatable chamber and positioned over a conduit means for conducting gaseous material from said chamber to a vacuum pump means, said conduit means extending into the base of said evacuatable chamber.
Claim 2
Independent Claim
161 words
A device for providing a coating on a substrate by means of a plasma chemical vapor deposition or cathode sputtering, said device comprising a first angular electrode provided with an aperture extending along a central axis and axially fixed in an evacuatable chamber provided with a second counter sheet electrode spaced from and opposing said first electrode, means for introducing gaseous substances into said chamber, means for applying a voltage to said electrodes to produce plasma in said chamber, and said chamber being further provided with a bipartite insulator block having an upper first portion adjoining said first electrode and provided with a central aperture corresponding to the central aperture of said first electrode and having a second portion immediately adjoining said first portion bearing on the base of said evacuatable chamber and positioned over a conduit means for conducting gaseous material from said chamber to a vacuum pump means, said conduit means extending into the base of said evacuatable chamber.
Claim 3
Dependent Claim
39 words
A device as claimed in claim 1, characterized in that the first portion (7) of the insulator block comprises at least one further aperture (15) which opens into the central aperture (13) and extends approximately at right angles thereto.
Claim 4
Dependent Claim
34 words
A device as claimed in claim 1, characterized in that when the device is used as an RF cathode sputtering device the electrodes can be provided with screens (51) which are at earth potential.
Claim 5
Dependent Claim
22 words
A device as claimed in claim 1, characterized in that the second portion (99) of the insulator block is a solid plate.
Claim 6
Dependent Claim
29 words
A device as claimed in claim 2, characterized in that the further aperture(s) (15) can be closed on the side to the reaction space of the evacuatable chamber (1).
Claim 7
Dependent Claim
64 words
A device as claimed in claim 1, characterized in that the central aperture (13) of the first portion (7) of the insulator block on its side adjoining the annular electrode (5) has a diameter which correponds to the diameter of the central aperture (11) of the counter sheet electrode, and widens in the direction to the second portion (9, 99) of the insulator block.
Claim 8
Dependent Claim
77 words
A device as claimed in claim 1, characterized in that the second portion (9) of the insulator block has a central aperture (19) which on the side adjoining the first portion (7) of the insulator block has a diameter which corresponds to the diameter of the central aperture (13) of the first portion (7) of the insulator block on said side and which enlarges in the direction to the base plate (37) of the evacuatable chamber (1).
Claim 9
Dependent Claim
46 words
A device as claimed in claim 1, characterized in that the device for introducing gaseous substances into the evacuatable chamber (1) is a multichamber annular distributor (23) in which reaction gases can be introduced from without and can freely reach the reaction space of the chamber.
Claim 10
Dependent Claim
60 words
A device as claimed in claim 2, characterized in that the means for introducing gaseous substances into the evacuatable chamber (1) are gas inlets (45) led through the base of said chamber in a vacuum-tight manner and opening into the further aperture (15) which opens into the central aperture (13) of the insulator block and extends at right angles thereto.
Claim 11
Dependent Claim
66 words
A device as claimed in claim 1, characterized in that a turntable (33) is provided on at least one of the electrodes which can be rotated by a gear wheel (35) which is rigidly connected to the electrode and which can be driven via an electrically insulating intermediate member and a rotary leadthrough (39) introduced into the evacuatable chamber (1) from without in a vacuum-tight manner.
Claim 12
Dependent Claim
102 words
A device as claimed in claim 8, characterized in that the multichamber annular distributor (23) comprises at least one connection (25) for the inlet of process gases from which the process gases reach intercommunicating chamber (27) via apertures in the multichamber annular distributor present above the connection(s), therefrom the process gases reach, via a number of apertures (29), the reaction space of the evacuatable chamber (1) present above the multi-chamber annular distributor and can be drawn out of the evacuatable chamber again via the central aperture (11) in the annular electrode (5) and the central apertures (13, 19) in the insulator block.
Claim 13
Dependent Claim
38 words
A device as claimed in claim 1, characterized in that in at least one of the electrodes a tempering labyrinth system (41) is provided which is connected to a temperature medium circuit via a detachable connection flange (43).
Claim 14
Dependent Claim
33 words
A device as claimed in claim 1, characterized in that a high frequency generator for producing the electric voltage is provided with connections on the annular electrode (5) and/or the sheet electrode (3).
Claim 15
Dependent Claim
26 words
A device as claimed in claim 13, characterized in that the connection flange (43) for the tempering medium is also connected to the high frequency generator.
Claim 16
Dependent Claim
44 words
A device is claimed in claim 4, characterized in that the central aperture (11) on the annular electrode (5) on the side facing the reaction space can be covered with a perforated plate (47) via which the reaction gases flow into the reaction space.
Claim 17
Dependent Claim
27 words
A device as claimed in claim 1, characterized in that both portions of the insulator block consist of an electrically insulating material suitable for high frequency application.
Claim 18
Dependent Claim
22 words
A device as claimed in claim 16, characterized in that both portions (7, 9, 99) of the insulator block consist of polytetrafluoroethylene.
Claim 19
Dependent Claim
42 words
A device as claimed in claim 1, characterized in that the sheet electrode (3) for moving the electrode in the axial direction is connected via an insulator to a sliding lead-through (55) introduced into the evacuatable chamber (1) in a vacuum-tight manner.
Claim 20
Dependent Claim
26 words
A device as claimed in claim 1, characterized in that substrates can be placed both on the annular electrode (5) and on the sheet electrode (3).
Claim 21
Dependent Claim
35 words
A device as claimed in claim 4, characterized in that slots (49) are provided in the second portion (99) of the insulator block via which the reaction gases can be drawn by the vacuum pump.
Claim 22
Dependent Claim
35 words
A device as claimed in claim 10, characterized in that the sliding properties between the turntable(s) (33) and the electrode(s) are improved by a readily heat-conducting lubricant provided between said turntable(s) 33 and said electrodes.
Claim 23
Dependent Claim
41 words
A device as claimed in claim 1, characterized in that as an additional heating means resistance-heated plates (53) may be provided on the annular electrode (5) and on the sheet electrode (3), the heat flow transmission occurring by sliding ring contacts.
Claim 24
Dependent Claim
25 words
A device as claimed in claim 22, characterized in that radiation sheets (57) may be mounted between the turntable(s) (33) and the resistance-heated plate(s) (53).
Claim 25
Dependent Claim
20 words
A device as claimed in claim 19, characterized in that the substrates can be placed on the resistance-heated plates (53).
References Cited (Backward Citations)
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Cited
US4399016A
Cited
US4513021A
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US4512283A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-28 | 1991-06-29 | 1991-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-28 | 1995-06-29 | 1995-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-28 | 1999-06-29 | 1999-12-29 | $7700.00 | Window Closed / Lapsed |