US4478875A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the preparation of regenerable dielectric layers through polymerization of gases
Assignee: Siemens AG
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Filing: 1983-06-28
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Granted: 1984-10-23
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Expires: 2003-06-28
Abstract
Abstract In the preparation of regenerable dielectric layers through polymerization of gases by means of a glow discharge, a siloxane or a silazane or a mixture of siloxanes and/or silazanes is blown into the region of the glow discharge in addition to monomeric perfluoro-hydrocarbons with the empirical formula (CF 2 ) n and/or the corresponding perfluorized cyclic alkanes.
Inventors
- 👤 Horst Pachonik
- 👤 Gerhard Seebacher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 07:10
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/005; H01G4/015; H01G4/018; H01G4/06; H01G4/14; H01G4/145
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
109 words
Method for the preparation of regenerable dielectric layers through polymerization of gases by means of a glow discharge on a substrate, especially for the preparation of electric multilayer capacitors, in which a monomer selected from the group consisting of monomeric perfluoro-hydrocarbons having the empirical formula (CF 2 ) n , wherein n=2 to 10, and perfluorized cyclic alkanes with 3 to 10 carbon atoms are blown into the glow discharge, the improvement comprising imparting to the dielectric layers resistance to cracking when subjected to immersion soldering by blowing a siloxane or a silazane or a mixture of siloxanes and/or silazanes into the glow discharge region along with the monomers.
Claim 2
Dependent Claim
109 words
Method for the preparation of regenerable dielectric layers through polymerization of gases by means of a glow discharge on a substrate, especially for the preparation of electric multilayer capacitors, in which a monomer selected from the group consisting of monomeric perfluoro-hydrocarbons having the empirical formula (CF 2 ) n , wherein n=2 to 10, and perfluorized cyclic alkanes with 3 to 10 carbon atoms are blown into the glow discharge, the improvement comprising imparting to the dielectric layers resistance to cracking when subjected to immersion soldering by blowing a siloxane or a silazane or a mixture of siloxanes and/or silazanes into the glow discharge region along with the monomers.
Claim 3
Dependent Claim
143 words
Method according to claim 1, wherein the siloxane or the silazane are a compound selected from the group consisting of: CH 3 (CH 3 HSiO) n SiH(CH 3 ) 2 wherein n=2, 3, 4 or 5; (CH 3 ) 3 SiOSi(CH 3 ) 3 ; CH 3 [(CH 3 ) 2 SiO] n Si(CH 3 ) 3 wherein n=2; 3, 4 or 5; (CH 3 ) 3 SiNHCH 3 ; (CH 3 ) 3 SiNHC 2 H 5 ; (CH 3 ) 3 SiN(C 2 H 5 ) 2 ; [(CH 3 ) 3 Si] 2 NH; [(CH 3 ) 3 Si] 2 NCH 3 ; CH 3 [(CH 3 ) 2 SiNH] n Si(CH 3 ) 3 wherein n=2 or 3; [C 2 H 5 (CH 3 ) 2 Si] 2 NH and [(CH 3 ) 3 SiNH]Si(CH 3 ) 2 .
Claim 4
Dependent Claim
30 words
Method according to claim 2, wherein the amount of blown-in siloxane and/or silazane is 3 to 15 volume percent based on the total volume of monomer and siloxane and/or silazane.
Claim 5
Dependent Claim
28 words
Method according to claim 1, wherein a hydrocarbon selected from the group consisting of dienes, alkenes and cycloalkanes are additionally blown into the region of the glow discharge.
Claim 6
Dependent Claim
28 words
Method according to claim 2, wherein a hydrocarbon selected from the group consisting of dienes, alkenes and cycloalkanes are additionally blown into the region of the glow discharge.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-23 | 1988-04-23 | 1988-10-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-23 | 1992-04-23 | 1992-10-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-23 | 1996-04-23 | 1996-10-23 | $7700.00 | Window Closed / Lapsed |