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Electrophotographic photosensitive member using microcrystalline silicon

Assignee: Toshiba Corp
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Filing: 1986-06-23
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Granted: 1987-12-15
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Expires: 2006-06-23
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Abstract

Abstract In an electrophotographic photosensitive member according to the present invention, a barrier layer is formed on a conductive substrate, and a photoconductive layer on the barrier layer. The photoconductive layer is formed of a microcrystalline silicon layer, whose crystallinity varies all the way through its thickness. The higher the crystallinity of the microcrystalline silicon layer, the more distinguishable are the crystalline properties, the narrower is the optical band gap, and the higher is the sensitivity to long-wavelength light. If the crystallinity becomes lower, then the amorphous properties are enhanced, and the resistance is increased in proportion. Thus, the chargeability and the sensitivity to long-wavelength light of the microcrystalline silicon layer can be improved by varying its crystallinity in the photoconductive layer.

Inventors

  • 👤 Shuji Yoshizawa
  • 👤 Wataru Mitani
  • 👤 Mariko Yamamoto
  • 👤 Akira Sanjoh
  • 👤 Tatsuya Ikezue

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 16:15
CPC Classifications
G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082; G03G5/08214; G03G5/08235

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 54 words
An electrophotographic photosensitive member comprising: a conductive substrate; a barrier layer provided on the conductive substrate; and a photosensitive layer provided on the barrier layer, at least part of said photosensitive layer being comprised of microcrystalline silicon, the crystallinity of said microcrystalline silicon varying all the way through the thickness of the photosensitive layer.
Claim 2
Dependent Claim 54 words
An electrophotographic photosensitive member comprising: a conductive substrate; a barrier layer provided on the conductive substrate; and a photosensitive layer provided on the barrier layer, at least part of said photosensitive layer being comprised of microcrystalline silicon, the crystallinity of said microcrystalline silicon varying all the way through the thickness of the photosensitive layer.
Claim 3
Dependent Claim 16 words
The electrophotographic photosensitive member according to claim 1, wherein said photosensitive layer is a photoconductive layer.
Claim 4
Dependent Claim 36 words
The electrophotographic photosensitive member according to claim 1, wherein said photosensitive layer includes a charge transfer layer formed on the barrier layer, and a charge generating layer of microcrystalline silicon, formed on the charge transfer layer.
Claim 5
Dependent Claim 18 words
The electrophotographic photosensitive member according to claim 3, wherein said charge transfer layer is comprised of amorphous silicon.
Claim 6
Dependent Claim 20 words
The electrophotographic photosensitive member according to claim 1, wherein said barrier layer is comprised of microcrystalline silicon or amorphous silicon.
Claim 7
Dependent Claim 23 words
The electrophotographic photosensitive member according to claim 1, wherein the crystallinity of said photosensitive layer ranges from 10 to 50 percent by volume.
Claim 8
Dependent Claim 19 words
The electrophotographic photosensitive member according to claim 1, wherein said barrier layer contains 0.1 to 30 atomic percent hydrogen.
Claim 9
Dependent Claim 31 words
The electrophotographic photosensitive member according to claim 1, wherein said photosensitive layer contains 10 -7 to 10 -3 atomic percent of an element included in group III of the periodic table.
Claim 10
Dependent Claim 29 words
The electrophotographic photosensitive member according to claim 1, wherein said photosensitive layer contains at least one element selected from carbon, oxygen, and nitrogen, by 0.1 to 20 atomic percent.
Claim 11
Dependent Claim 22 words
The electrophotographic photosensitive member according to claim 1, wherein said photosensitive layer includes microcrystalline silicon regions and amorphous silicon regions distributed mixedly.
Claim 12
Dependent Claim 25 words
The electrophotographic photosensitive member according to claim 1, wherein said photosensitive layer includes a microcrystalline silicon layer and an amorphous silicon layer stacked for lamination.
Claim 13
Dependent Claim 25 words
The electrophotographic photosensitive member according to claim 5, wherein said barrier layer contains an element included in group III or V of the periodic table.
Claim 14
Dependent Claim 27 words
The electrophotographic photosensitive member according to claim 12, wherein the group-III or -V element content of said barrier layer ranges from 10 -3 to 10 atomic percent.
Claim 15
Dependent Claim 21 words
The electrophotographic photosensitive member according to claim 2, wherein the thickness of said photoconductive layer ranges from 3 to 80 μm.
Claim 16
Dependent Claim 21 words
The electrophotographic photosensitive member according to claim 5, wherein the thickness of said barrier layer ranges from 0.01 to 10 μm.
Claim 17
Dependent Claim 21 words
The electrophotographic photosensitive member according to claim 1, further comprising a surface layer of amorphous silicon formed on said photoconductive layer.
Claim 18
Dependent Claim 23 words
The electrophotographic photosensitive member according to claim 16, wherein said surface layer contains at least one element selected from carbon, oxygen, and nitrogen.
Claim 19
Dependent Claim 34 words
The electrophotographic photosensitive member according to claim 17, wherein the content of the at least one element selected from carbon, oxygen, and nitrogen of said surface layer ranges from 10 to 50 atomic percent.

References Cited (Backward Citations)

US4265991A Cited
US4420546A Cited
US4560634A Cited
US4523214A Cited
US4582773A Cited
EP0668122A1 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-12-14 1991-06-15 1991-12-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-12-14 1995-06-15 1995-12-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-12-14 1999-06-15 1999-12-15 $7700.00 Window Closed / Lapsed

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