Abstract A gas scavenger unit educts gases away from semiconductor wafers as they are withdrawn through a plenum in the scavenger from their processing chamber into the atmosphere. The scavenger has a peripheral wall which generally defines a plenum having two open ends. The one end of the plenum communicates with the processing chamber and the other end communicates with the atmosphere. An exhaust port in the peripheral wall communicates with a house gas exhaust system. The plenum is divided into two chambers by an apertured interior wall. The wafers travel through the first chamber, and the second chamber communicates with the house gas exhaust system. The apertures in the interior wall are disposed about the wafer travel path so that gases from the processing chamber and/or the atmosphere are educted into the house exhaust system without flowing across the wafers.
Inventors
👤 Jerry A. Taylor, Sr.
Bibliographic Details
Application Number—
JurisdictionUS
Data Sourcegoogle_patents
Last Synchronized2026-11-05 17:01
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
116 words
A gas scavenger for educting gas away from semiconductor wafers as the wafers are withdrawn from a processing chamber along a path, comprising: a peripheral outer wall defining a plenum having opposite ends, the one end in gas flow communication with the processing chamber and the second end in gas flow communication with the atmosphere, the outer wall having a gas exhaust port in gas flow communication with a gas exhaust system, and an interior wall dividing the plenum into a first chamber through which the wafers travel and a second chamber in gas flow communication with the gas exhaust port in the outer wall, the interior wall having apertures about the path of wafer travel.
Claim 2
Dependent Claim
116 words
A gas scavenger for educting gas away from semiconductor wafers as the wafers are withdrawn from a processing chamber along a path, comprising: a peripheral outer wall defining a plenum having opposite ends, the one end in gas flow communication with the processing chamber and the second end in gas flow communication with the atmosphere, the outer wall having a gas exhaust port in gas flow communication with a gas exhaust system, and an interior wall dividing the plenum into a first chamber through which the wafers travel and a second chamber in gas flow communication with the gas exhaust port in the outer wall, the interior wall having apertures about the path of wafer travel.
Claim 3
Dependent Claim
18 words
The gas scavenger of claim 1 further comprising a damper in operative relation with the apertured interior wall.
Claim 4
Dependent Claim
11 words
The gas scavenger of claim 2 wherein the damper is slidable.
Claim 5
Dependent Claim
11 words
The gas scavenger of claim 2 wherein the damper is rotatable.
Claim 6
Dependent Claim
18 words
The gas scavenger of claim 1 wherein the entire interior wall is spaced apart from the outer wall.
Claim 7
Dependent Claim
24 words
The gas scavenger of claim 1 wherein the ends of the second chamber defined by the interior wall and the outer wall are enclosed.
Claim 8
Dependent Claim
20 words
The gas scavenger of claim 1 wherein the apertures in the interior wall substantially surround the path of wafer travel.
Claim 9
Dependent Claim
35 words
The gas scavenger of claim 1 wherein the total area of the apertures in the interior wall is greater than the cross-sectional area of the end of the first chamber through which the wafers travel.