Patent US4710260A successfully refreshed from Google Patents.
US4710260A
Expired / Lapsed
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Deposition of silicon at temperatures above its melting point
Assignee: Texas Instruments Inc
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Filing: 1985-08-26
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Granted: 1987-12-01
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Expires: 2005-08-26
Abstract
Abstract Liquid silicon is deposited on a high surface area column of silicon nitride particles, by hydrogen decomposition of trichlorosilane. This is accomplished in an environment heated to a temperature in excess of the melting point of silicon. After deposition, the liquid silicon flows by gravity to a collection point. Preferably a liquid transfer system moves the silicon directly to a crystal pulling operation. The liquid transfer to immediate pulling conserves energy and allows for continual withdrawal of melt from the reactor. The immediate pulling provides additional purification and the crystal thus pulled is preferably used as feedstock for a final crystal pulling operation.
Inventors
- 👤 David E. Witter
- 👤 Mohendra S. Bawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:01
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/03; C30; C30B; C30B15/00; C30B15/02
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
117 words
A method for continuous production of silicon from a silicon bearing gas flow, comprising the steps of: (a) providing a matrix of silicon nitride particles; (b) forcing through a portion of said matrix of silicon nitride particles a stream of a silicon bearing gas mixture; (c) said matrix of silicon nitride particles being heated to above 1300° C. but below the melting point of silicon while said gas flow is forced through said matrix; and (d) periodically heating said matrix of nitride particles during said gas flow to above the melting point of silicon and collecting, at the bottom of said matrix of silicon nitride particles, liquified silicon deposited on said nitride particles from said gas stream.
Claim 2
Independent Claim
117 words
A method for continuous production of silicon from a silicon bearing gas flow, comprising the steps of: (a) providing a matrix of silicon nitride particles; (b) forcing through a portion of said matrix of silicon nitride particles a stream of a silicon bearing gas mixture; (c) said matrix of silicon nitride particles being heated to above 1300° C. but below the melting point of silicon while said gas flow is forced through said matrix; and (d) periodically heating said matrix of nitride particles during said gas flow to above the melting point of silicon and collecting, at the bottom of said matrix of silicon nitride particles, liquified silicon deposited on said nitride particles from said gas stream.
Claim 3
Dependent Claim
35 words
The method of claim 1, wherein: (a) said silicon nitride particles being heated to about 20° C. below the melting point of silicon; and (b) said period heating being ramp ups of about 50° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-11-30 | 1991-06-01 | 1991-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-11-30 | 1995-06-01 | 1995-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-11-30 | 1999-06-01 | 1999-12-01 | $7700.00 | Window Closed / Lapsed |