Patent US4710030A successfully refreshed from Google Patents.
US4710030A
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Optical generator and detector of stress pulses
Assignee: Brown University Research Foundation Inc
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Filing: 1985-05-17
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Granted: 1987-12-01
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Expires: 2005-05-17
Abstract
Abstract An optical stress pulse generation and detection system for non-destructively measuring physical properties of a sample, which uses a pump beam having short duration radiation pulses having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample and directs the non-destructive pump beam to a surface of the sample to generate the stress pulse. The optical stress pulse generation and detection system also uses a probe radiation beam and guides the probe beam to a location at the sample to intercept the stress pulse. The change in optical constants induced by the stress pulse is detected by observing the probe beam after it intercepts the stress pulse.
Inventors
- 👤 Jan Tauc
- 👤 Humphrey J. Maris
- 👤 Christian Thomsen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:30
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/1702; G01N29/00; G01N29/04; G01N29/06; G01N29/0654; G01N29/0681; G01N29/22; G01N29/24; G01N29/2418; G01N2021/1738; G01N2021/1742; G01N2021/178; G01N2021/1782; G01N21/84; G01N21/8422; G01N2021/8438
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
135 words
An optical stress pulse generation and detection system for non-destructively measuring physical properties of a sample, comprising: a radiation source for providing a pulsed pump beam having at least one short duration radiation pulse having a duration of 0.01 to 100 psec, and having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample; a radiation source for providing a probe beam; means for directing said pump beam to a surface of a sample to generate said stress pulse in said sample; means for guiding said probe beam to a location at said sample to intercept said stress pulse; and means for detecting a change in an optical parameter of said probe beam representative of the change in optical constants induced by said stress pulse in said sample.
Claim 2
Dependent Claim
135 words
An optical stress pulse generation and detection system for non-destructively measuring physical properties of a sample, comprising: a radiation source for providing a pulsed pump beam having at least one short duration radiation pulse having a duration of 0.01 to 100 psec, and having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample; a radiation source for providing a probe beam; means for directing said pump beam to a surface of a sample to generate said stress pulse in said sample; means for guiding said probe beam to a location at said sample to intercept said stress pulse; and means for detecting a change in an optical parameter of said probe beam representative of the change in optical constants induced by said stress pulse in said sample.
Claim 3
Dependent Claim
27 words
The optical stress pulse generation and detection system of claim 1 in which said means for detecting includes means for measuring the intensity of said probe beam.
Claim 4
Dependent Claim
82 words
The optical stress pulse generation and detection system of claim 2 in which said pump beam and said probe beam are derived from the same source beam having a plurality of short duration pulses and said optical stress pulse generation and detection system further includes beam splitting means for directing a first portion of said source beam to form said pump beam having said plurality of pulses and directing a second portion to form said probe beam having said plurality of pulses.
Claim 5
Dependent Claim
22 words
The optical stress pulse generation and detection system of claim 3 in which said source beam has a single direction of polarization.
Claim 6
Dependent Claim
46 words
The optical stress pulse generation and detection system of claim 4 further including means for rotating the direction of polarization of said probe beam and means, disposed between said test sample and said means for detecting, for transmitting only radiation at said rotated direction of polarization.
Claim 7
Dependent Claim
24 words
The optical stress pulse generation and detection system of claim 3 further including chopper means for modulating said pump beam at a predetermined frequency.
Claim 8
Dependent Claim
40 words
The optical stress pulse generation and detection system of claim 6 in which said means for detecting includes amplifier means, responsive to said chopper means, for amplifying only the output of said means for measuring corresponding to said predetermined frequency.
Claim 9
Dependent Claim
47 words
The optical stress pulse generation and detection system of claim 3 in which said means for guiding includes means for setting a predetermined time delay between the impingement of a said pulse of said pump beam and a said pulse of said probe beam upon said sample.
Claim 10
Dependent Claim
46 words
The optical stress pulse generation and detection system of claim 8 in which said means for detecting includes means for averaging the output of said means for measuring for a plurality of pulse detections while the delay between impingements remains set at said predetermined time delay.
Claim 11
Dependent Claim
44 words
The optical stress pulse generation and detection system of claim 9 in which said means for setting sequentially changes said predetermined time delay and said means for averaging successively averages the output of said means for measuring during each successive predetermined time delay setting.
Claim 12
Dependent Claim
24 words
The optical stress pulse generation and detection system of claim 3 in which said pump beam receives 50 to 99% of said source beam.
Claim 13
Dependent Claim
26 words
The optical stress pulse generation and detection system of claim 11 in which said source beam has an average power of 10 μW to 1 kW.
Claim 14
Dependent Claim
24 words
The optical stress pulse generation and detection system of claim 3 in which said source beam includes wavelengths from 100 Angstroms to 100 microns.
Claim 15
Dependent Claim
34 words
The optical stress pulse generation and detection system of claim 1 in which said sample includes a substrate and a film to be examined disposed on said substrate to define a boundary between them.
Claim 16
Dependent Claim
36 words
The optical stress pulse generation and detection system of claim 14 in which said film is optically opaque and said pump beam and said probe beam impinge upon the surface of said film opposite said boundary.
Claim 17
Dependent Claim
40 words
The optical stress pulse generation and detection system of claim 14 in which said film is optically opaque, said substrate is optically transparent, and said probe beam and said pump beam travel through said substrate to impinge upon said boundary.
Claim 18
Dependent Claim
50 words
The optical stress pulse generation and detection system of claim 14 in which said film is optically opaque, said substrate is optically transparent, one said beam travels through said substrate to impinge upon said boundary, and the other said beam impinges upon the surface of said film opposite said boundary.
Claim 19
Dependent Claim
40 words
The optical stress pulse generation and detection system of claim 14 in which said film is optically transparent, said substrate is optically opaque, and said pump beam and said probe beam travel through said film to impinge upon said boundary.
Claim 20
Dependent Claim
32 words
The optical stress pulse generation and detection system of claim 14 in which said test sample further includes an opto-acoustically active medium disposed on the surface of said film opposite said boundary.
Claim 21
Dependent Claim
25 words
The optical stress pulse generation and detection system of claim 19 in which said pump beam and said probe beam impinge upon said active medium.
Claim 22
Dependent Claim
20 words
The optical stress pulse generation and detection system of claim 14 in which said substrate is an opto-acoustically active medium.
Claim 23
Dependent Claim
31 words
The optical stress pulse generation and detection system of claim 21 in which said pump beam and said probe beam impinge upon the surface of said active medium opposite said boundary.
Claim 24
Dependent Claim
24 words
The optical stress pulse generation and detection system of claim 14 in which said film has a thickness from 50 Angstroms to 100 microns.
Claim 25
Dependent Claim
22 words
The optical stress pulse generation and detection system of claim 1 in which said probe beam source provides a continuous radiation beam.
Claim 26
Dependent Claim
24 words
The optical stress pulse generation and detection system of claim 24 in which said pump beam source provides at least two discrete pump pulses.
Claim 27
Dependent Claim
29 words
The optical stress pulse generation and detection system of claim 25 in which said pump beam source provides radiation having an average power of 10 μW to 1 kW.
Claim 28
Dependent Claim
22 words
The optical stress pulse generation and detection system of claim 1 in which said probe beam source provides short duration radiation pulses.
Claim 29
Dependent Claim
29 words
The optical stress pulse generation and detection system of claim 27 in which said probe beam source provides probe beam pulses having a duration of 0.01 to 100 psec.
Claim 30
Dependent Claim
24 words
The optical stress pulse generation and detection system of claim 1 in which said pump beam includes wavelengths from 10 angstroms to 100 microns.
Claim 31
Dependent Claim
28 words
The optical stress pulse generation and detection system of claim 1 in which said pump beam and said probe beam impinge upon the same location at said sample.
Claim 32
Dependent Claim
39 words
The optical stress pulse generation and detection system of claim 1 in which said means for directing and said means for guiding include a common lens system for focussing said pump beam and said probe beam onto said sample.
Claim 33
Dependent Claim
33 words
The optical stress pulse generation and detection system of claim 1 in which said means for guiding shifts the position of impingement of said probe beam relative to that of said pump beam.
Claim 34
Dependent Claim
21 words
The optical stress pulse generation and detection system of claim 1 in which said probe beam is transmitted by said sample.
Claim 35
Dependent Claim
21 words
The optical stress pulse generation and detection system of claim 1 in which said probe beam is reflected by said sample.
Claim 36
Independent Claim
153 words
A system for non-destructively measuring physical properties of a sample in which both generation and detection of stress pulses is accomplished optically, comprising: a radiation source for providing a pulsed source beam, each pulse having a duration of 0.01 to 100 psec; beam splitting means for directing a first portion of said source beam to form a pump beam having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in said sample and directing a second portion to form a probe beam; means for directing said pump beam to a surface of said sample to generate said stress pulse in said sample; means for guiding said probe beam to a location at said sample to intercept said stress pulse; and means for detecting a change in an optical parameter of said probe beam representative of the change in optical constants induced by said stress pulse in said sample.
Claim 37
Independent Claim
153 words
A system for non-destructively measuring physical properties of a sample in which both generation and detection of stress pulses is accomplished optically, comprising: a radiation source for providing a pulsed source beam, each pulse having a duration of 0.01 to 100 psec; beam splitting means for directing a first portion of said source beam to form a pump beam having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in said sample and directing a second portion to form a probe beam; means for directing said pump beam to a surface of said sample to generate said stress pulse in said sample; means for guiding said probe beam to a location at said sample to intercept said stress pulse; and means for detecting a change in an optical parameter of said probe beam representative of the change in optical constants induced by said stress pulse in said sample.
Claim 38
Independent Claim
123 words
A method for optically and non-destructively generating and detecting the propagation of a stress pulse in a sample, comrpising: producing a pulsed pump beam including short duration radiation pulses having a duration of 0.01 to 100 psec, and having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample; producing a probe radiation beam; directing the pump beam to a surface of the sample to generate said stress pulse in the sample; guiding the probe beam to a location at the sample to intercept the stress pulse; and detecting the change in optical constants induced by the stress pulse in the sample by measuring the intensity of the probe beam after it intercepts the stress pulse.
Claim 39
Independent Claim
123 words
A method for optically and non-destructively generating and detecting the propagation of a stress pulse in a sample, comrpising: producing a pulsed pump beam including short duration radiation pulses having a duration of 0.01 to 100 psec, and having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample; producing a probe radiation beam; directing the pump beam to a surface of the sample to generate said stress pulse in the sample; guiding the probe beam to a location at the sample to intercept the stress pulse; and detecting the change in optical constants induced by the stress pulse in the sample by measuring the intensity of the probe beam after it intercepts the stress pulse.
Claim 40
Independent Claim
143 words
A method for optically and non-destructively generating and detecting the propagation of a stress pulse in a sample, comprising: producing a pulsed source beam having short duration pulses of radiation having a duration of 0.01 to 100 psec; diverting a first portion of the source beam to form a pump beam having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample; diverting a second portion of the source beam to form a probe beam; directing the pump beam to a surface of the sample to generate the stress pulse in the sample; guiding the probe beam to a location at the sample to intercept the stress pulse; detecting the change in optical constants induced by the stress pulse in the sample by measuring the intensity of the probe beam after it intercepts the stress pulse.
Claim 41
Independent Claim
143 words
A method for optically and non-destructively generating and detecting the propagation of a stress pulse in a sample, comprising: producing a pulsed source beam having short duration pulses of radiation having a duration of 0.01 to 100 psec; diverting a first portion of the source beam to form a pump beam having an intensity and at least one wavelength selected to non-destructively generate a stress pulse in a sample; diverting a second portion of the source beam to form a probe beam; directing the pump beam to a surface of the sample to generate the stress pulse in the sample; guiding the probe beam to a location at the sample to intercept the stress pulse; detecting the change in optical constants induced by the stress pulse in the sample by measuring the intensity of the probe beam after it intercepts the stress pulse.
References Cited (Backward Citations)
US4484820A
Cited
US4579463A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-11-30 | 1991-06-01 | 1991-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-11-30 | 1995-06-01 | 1995-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-11-30 | 1999-06-01 | 1999-12-01 | $7700.00 | Window Closed / Lapsed |