US4705740A — Radiation-polymerizable mixture, copolymer contai…

Claim 1

Independent Claim 203 words

A radiation-polymerizable mixture suitable for producing a transferable, dry photoresist film, comprising (a) 30 to 70% by weight of a first compound capable of undergoing free radical polymerization, said first compound containing at least two terminal ethylenically unsaturated groups and having a boiling point above 100° C. under atmospheric pressure, (b) 0.01 to 10% by weight of a second compound capable of initiating said polymerization of said first compound when exposed to actinic radiation, and (c) 20 to 70% by weight of a water-insoluble copolymer which is soluble in aqueous alkaline solutions and which comprises (c1) 20 to 60 mole-% of acrylic acid or methacrylic acid, (c2) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylate (c2) having a glass transition temperature of not more than 20° C., and (c3) 3 to 20 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (c1) and said methacrylate (c2), a homopolymer of said compound (c3) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.

Claim 2

Dependent Claim 203 words

A radiation-polymerizable mixture suitable for producing a transferable, dry photoresist film, comprising (a) 30 to 70% by weight of a first compound capable of undergoing free radical polymerization, said first compound containing at least two terminal ethylenically unsaturated groups and having a boiling point above 100° C. under atmospheric pressure, (b) 0.01 to 10% by weight of a second compound capable of initiating said polymerization of said first compound when exposed to actinic radiation, and (c) 20 to 70% by weight of a water-insoluble copolymer which is soluble in aqueous alkaline solutions and which comprises (c1) 20 to 60 mole-% of acrylic acid or methacrylic acid, (c2) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylate (c2) having a glass transition temperature of not more than 20° C., and (c3) 3 to 20 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (c1) and said methacrylate (c2), a homopolymer of said compound (c3) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.

Claim 3

Dependent Claim 18 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said compound (c3) is styrene or a substituted styrene.

Claim 4

Dependent Claim 21 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said first compound is an acrylate or methacrylate of a polyhydric alcohol.

Claim 5

Dependent Claim 25 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said copolymer contains 20 to 60 mole % of units derived from an α,β-unsaturated carboxylic acid.

Claim 6

Dependent Claim 18 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said acid (c1) is acrylic acid or methacrylic acid.

Claim 7

Dependent Claim 25 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said copolymer possesses a glass transition temperature in the range of about 35° and 70° C.

Claim 8

Dependent Claim 20 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said copolymer has an acid number between about 170 and 250.

Claim 9

Dependent Claim 111 words

A copolymer comprising (i) 20 to 60 mole-% of acrylic acid or methacrylic acid, (ii) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylate (ii) having a glass transition temperature of not more than 20° C., and (iii) 3 to 20 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (i) and said methacrylate (ii), a homopolymer of said compound (iii) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.

Claim 10

Dependent Claim 111 words

A copolymer comprising (i) 20 to 60 mole-% of acrylic acid or methacrylic acid, (ii) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylate (ii) having a glass transition temperature of not more than 20° C., and (iii) 3 to 20 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (i) and said methacrylate (ii), a homopolymer of said compound (iii) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.

Claim 11

Dependent Claim 68 words

A process for producing a copolymer, comprising the step of polymerizing a monomeric mixture comprised of an α,β-unsaturated aliphatic carboxylic acid and an alkyl methacrylate which comprises an alkyl group containing at least 4 carbon atoms, said polymerizing being effected by mass polymerization in the presence of a free radical polymerization initiator, to produce a copolymer comprised of at least said unsaturated carboxylic acid and said alkyl methacrylate.

Claim 12

Dependent Claim 68 words

A process for producing a copolymer, comprising the step of polymerizing a monomeric mixture comprised of an α,β-unsaturated aliphatic carboxylic acid and an alkyl methacrylate which comprises an alkyl group containing at least 4 carbon atoms, said polymerizing being effected by mass polymerization in the presence of a free radical polymerization initiator, to produce a copolymer comprised of at least said unsaturated carboxylic acid and said alkyl methacrylate.

Claim 13

Dependent Claim 46 words

A process as claimed in claim 9, wherein said mixture further comprises at least one monomeric ethylenically unsaturated compound which is copolymerizable with said unsaturated carboxylic acid and said alkyl methacrylate, a homopolymer of said compound having a glass transition temperature of at least 80° C.

Claim 14

Dependent Claim 20 words

A process as claimed in claim 9, wherein said polymerizing is carried out in the presence of a chain regulator.

Claim 15

Dependent Claim 202 words

A transferable, dry photoresist film comprised of a radiation-polymerizable mixture comprising (a) 30 to 70% by weight of a first compound capable of undergoing free radical polymerization, said first compound containing at least two terminal ethylenically unsaturated groups and having a boiling point above 100° C. under atmospheric pressure, (b) 0.01 to 10% by weight of a second compound capable of initiating said polymerization of said first compound when exposed to actinic radiation, and (c) 20 to 70% by weight of a water-insoluble copolymer which is soluble in aqueous alkaline solutions and which comprises (c1) 20 to 60 mole-% of acrylic acid and methacrylic acid, (c2) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylic (c2) having a glass transition temperature of not more than 20° C., and (c3) 3 to 20 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (c1) and said methacrylate (c2), a homopolymer of said compound (c3) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.

Claim 16

Dependent Claim 202 words

A transferable, dry photoresist film comprised of a radiation-polymerizable mixture comprising (a) 30 to 70% by weight of a first compound capable of undergoing free radical polymerization, said first compound containing at least two terminal ethylenically unsaturated groups and having a boiling point above 100° C. under atmospheric pressure, (b) 0.01 to 10% by weight of a second compound capable of initiating said polymerization of said first compound when exposed to actinic radiation, and (c) 20 to 70% by weight of a water-insoluble copolymer which is soluble in aqueous alkaline solutions and which comprises (c1) 20 to 60 mole-% of acrylic acid and methacrylic acid, (c2) 25 to 80 mole-% of an alkyl methacrylate having at least 4 carbon atoms in the alkyl group, a homopolymer of said methacrylic (c2) having a glass transition temperature of not more than 20° C., and (c3) 3 to 20 mole-% of a monomeric ethylenically unsaturated compound which is copolymerizable with said acid (c1) and said methacrylate (c2), a homopolymer of said compound (c3) having a glass transition temperature of at least 80° C., wherein said copolymer has a mean molecular weight in the range from about 65,000 to 150,000 and is prepared by mass polymerization.

Claim 17

Dependent Claim 19 words

A photoresist film as claimed in claim 12, said film having a thickness of about 10 to 80 μm.

Claim 18

Dependent Claim 18 words

A photoresist film as claimed in claim 13, wherein said thickness is between about 20 and 60 μm.

Claim 19

Dependent Claim 20 words

A photoresist film as claim in claim 12, wherein said film consists essentially of said constituents (a), (b) and (c).

Claim 20

Dependent Claim 20 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said mixture consists essentially of said constituents (a), (b) and (c).

Claim 21

Dependent Claim 29 words

A radiation-polymerizable mixture as claimed in claim 1, wherein said copolymer (c) has a kinematic viscosity (15% strength in ethanol) of between about 23 and 74 mm 2 /s.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1990-11-09	1991-05-11	1991-11-10	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1994-11-09	1995-05-11	1995-11-10	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1998-11-09	1999-05-11	1999-11-10	$7700.00	Window Closed / Lapsed

Radiation-polymerizable mixture, copolymer contained therein, and a process for the preparation of the copolymer

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