US4702992A
Expired / Lapsed
US
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Method of preparing photoresist material with undercoating of photoextinction agent and condensation product
Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1985-03-06
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Granted: 1987-10-27
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Expires: 2005-03-06
Abstract
Abstract The undercoating composition of the invention, useful for providing an undercoating layer for a top coat of a photosensitive resist layer on a substrate surface, comprises, as a principal ingredient thereof, a condensation product obtained by the condensation reaction between a hydroxy-substituted diphenylamine and a melamine compound substituted on the nitrogen atoms with methylol groups and/or alkoxymethyl groups. The undercoating obtained of the composition is highly resistant against the attack by the overcoating solution applied thereon so that the fidelity of the pattern reproduction by the photolithographic technique is greatly improved by virtue of the absence of any disorder at the interface between the undercoating and top coat layers. The advantage is further increased when the undercoating composition further comprises a photoextinctive agent, e.g. a dye, having absorptivity in the wave length region where the photosensitive resist of the top coat has sensitivity.
Inventors
- 👤 Wataru Ishii
- 👤 Shozo Miyazawa
- 👤 Shinji Tsuchiya
- 👤 Hisashi Nakane
- 👤 Akira Yokota
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; G03F7/094
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
162 words
A method for the preparation of a photoresist comprising a silicon substrate having on one surface thereof a first undercoating layer and, on the undercoating layer a second topcat photoresist layer, said method comprising the steps of: 1. coating the substrate with a first undercoating layer containing at least 1% by weight of a photoextinctive agent having absorptivity to light in the wave length region where the photosensitive resist in the second topcat photoresist layer has sensitivity to light, and a condensation product formed by a condensation reaction in the presence of an acid between a hydroxydiphenylamine compound represented by the formula ##STR8## in which R is a hydrogen atom or a hydroxyl group and a melamine compound of the formula ##STR9## in which R 1 is selected from the group consisting of a hydrogen atom, methylol and alkoxymethyl groups, at least one of the groups being methylol or alkoxymethyl, an alkoxy group containing from 1 to 4 carbon atoms, and 2.
Claim 2
Independent Claim
162 words
A method for the preparation of a photoresist comprising a silicon substrate having on one surface thereof a first undercoating layer and, on the undercoating layer a second topcat photoresist layer, said method comprising the steps of: 1. coating the substrate with a first undercoating layer containing at least 1% by weight of a photoextinctive agent having absorptivity to light in the wave length region where the photosensitive resist in the second topcat photoresist layer has sensitivity to light, and a condensation product formed by a condensation reaction in the presence of an acid between a hydroxydiphenylamine compound represented by the formula ##STR8## in which R is a hydrogen atom or a hydroxyl group and a melamine compound of the formula ##STR9## in which R 1 is selected from the group consisting of a hydrogen atom, methylol and alkoxymethyl groups, at least one of the groups being methylol or alkoxymethyl, an alkoxy group containing from 1 to 4 carbon atoms, and 2.
Claim 3
Dependent Claim
56 words
thereafter coating topcoat layer of photoresist without destroying the integrity of the undercoating layer; provided that, the amount of melamine compound is from 1% to 60% by weight based on the total weight of the hydroxydiphenylamine compound and the melamine compound, and that the photoextinctive agent absorbs light in the wave length region in which the
Claim 4
Dependent Claim
56 words
thereafter coating topcoat layer of photoresist without destroying the integrity of the undercoating layer; provided that, the amount of melamine compound is from 1% to 60% by weight based on the total weight of the hydroxydiphenylamine compound and the melamine compound, and that the photoextinctive agent absorbs light in the wave length region in which the
Claim 5
Dependent Claim
35 words
photosensitive resist of the topcoat layer is sensitive to light. 2. A method as in claim 1 wherein the amount of melamine compound is from 25% to 55% by weight based on the total weight.
Claim 6
Dependent Claim
17 words
A method as in claim 1 wherein the melamine compound contains from 2 to 4 methylol groups.
Claim 7
Dependent Claim
17 words
A method as in claim 1 wherein the melamine compound contains from 1 to 4 alkoxymethyl groups.
Claim 8
Dependent Claim
26 words
The method as claimed in claim 1 wherein the hydroxydiphenylamine compound as the component (a) is selected from the class consisting of 2-, 3- and 4-hydroxydiphenylamines.
Claim 9
Dependent Claim
32 words
The method as claimed in claim 1 wherein the amount of the photoextinctive agent is in the range from 5 to 40% by weight based on the amount of the condensation product.
Claim 10
Dependent Claim
25 words
The method as claimed in claim 1 wherein the acid catalyst is selected from the class consisting of phosphoric acid, sulfuric acid and mixtures thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-10-26 | 1991-04-27 | 1991-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-26 | 1995-04-27 | 1995-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-26 | 1999-04-27 | 1999-10-27 | $7700.00 | Window Closed / Lapsed |