US4701995A
Expired / Lapsed
US
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Method of making a nonplanar buried-heterostructure distributed-feedback laser
Assignee: Nokia Bell Labs
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Filing: 1986-10-29
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Granted: 1987-10-27
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Expires: 2006-10-29
Abstract
Abstract A buried-heterostructure distributed feedback laser is described, including a grating structure at a surface of a nonplanar cladding layer. The grating structure can be made by transfer of a pattern by ion milling, the pattern being defined in an ion-beam resist layer, e.g., by direct-writing electron-beam exposure. Low-threshold, high-power lasers are obtained with a commercially favorable yield.
Inventors
- 👤 Gerald J. Dolan
- 👤 Ralph A. Logan
- 👤 Henryk Temkin
- 👤 Daniel P. Wilt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:04
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/12; H01S5/20; H01S5/22; H01S5/227; H01S5/2275
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
48 words
Method for making a distributed feedback laser, said method comprising forming a buried heterostructure on a substrate by sequential deposition of layers including an active layer and a cladding layer, said method comprising a step of producing a grating structure on a nonplanar surface of said cladding layer.
Claim 2
Dependent Claim
48 words
Method for making a distributed feedback laser, said method comprising forming a buried heterostructure on a substrate by sequential deposition of layers including an active layer and a cladding layer, said method comprising a step of producing a grating structure on a nonplanar surface of said cladding layer.
Claim 3
Dependent Claim
24 words
Method of claim 1 in which said grating structure is produced by transfer of a pattern defined in a resist layer on said surface.
Claim 4
Dependent Claim
18 words
Method of claim 2 in which said structure is defined by electron-beam direct writing in said resist layer.
Claim 5
Dependent Claim
18 words
Method of claim 2 in which said structure is made by transfer of said pattern by ion-beam milling.
Claim 6
Dependent Claim
18 words
Method of claim 1 in which said structure is produced by ion-beam direct writing in said cladding layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-10-26 | 1991-04-27 | 1991-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-26 | 1995-04-27 | 1995-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-26 | 1999-04-27 | 1999-10-27 | $7700.00 | Window Closed / Lapsed |