Patent US4701592A successfully refreshed from Google Patents.
US4701592A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser assisted deposition and annealing
Assignee: Boeing North American Inc
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Filing: 1980-11-17
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Granted: 1987-10-20
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Expires: 2000-11-17
Abstract
Abstract Disclosed is an apparatus for depositing a layer of a material on a substrate and annealing the deposited layer, including a Q-switched Nd: YAG laser for providing a coherent light output. An up collimator is situated in the path of the coherent light output to increase the cross sectional area of the output, while a beam divider separates the output into first and second coherent beams. First and second lenses are adjustably positioned in the paths of the beams to focus the first beam on a source of the material and the second beam on the substrate. First and second x-y scanners are provided for scanning the first and second beams. A vacuum chamber includes a connection for a vacuum source and windows to admit the first and second beams into the chamber. A source support positions a source of the material within the chamber in the path of the first beam and a substrate support positions the substrate in the path of the second beam and at least 45° away from the normal to the surface of the source.
Inventors
- 👤 Jeffrey T. Cheung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 12:18
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5806; C23C14/5813; C23C14/22; C23C14/225; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
165 words
An apparatus for depositing a layer of a material on a substrate and annealing the deposited layer, comprising: a vacuum chamber for connection to a vacuum source; a source support for positioning a source of the material within said chamber in the path of a first coherent beam of light; and a substrate support for positioning the substrate within said chamber in the path of a second coherent beam of light and located such that the substrate is offset from a normal to the source surface by a fixed distance so that the substrate is outside of a conical volume extending from the source surface and bounded by a conical surface making an angle of 45° with respect to the source normal with respect to the source so that particles ejected from the source by said first coherent beam of light in a direction making an angle of less than 45° with respect to the normal to the source surface cannot deposit on the substrate.
Claim 2
Independent Claim
165 words
An apparatus for depositing a layer of a material on a substrate and annealing the deposited layer, comprising: a vacuum chamber for connection to a vacuum source; a source support for positioning a source of the material within said chamber in the path of a first coherent beam of light; and a substrate support for positioning the substrate within said chamber in the path of a second coherent beam of light and located such that the substrate is offset from a normal to the source surface by a fixed distance so that the substrate is outside of a conical volume extending from the source surface and bounded by a conical surface making an angle of 45° with respect to the source normal with respect to the source so that particles ejected from the source by said first coherent beam of light in a direction making an angle of less than 45° with respect to the normal to the source surface cannot deposit on the substrate.
Claim 3
Dependent Claim
25 words
The apparatus of claim 1, wherein: said source support further comprises a rotating source support; and said substrate support further comprises a rotating substrate support.
Claim 4
Dependent Claim
37 words
The apparatus of claim 2, further comprising: a first source of heat on said substrate support for heating the substrate; and a second source of heat on said source support for heating said source of the material.
Claim 5
Dependent Claim
32 words
The apparatus of claim 3, further comprising a cooled panel positioned behind said substrate support with respect to said source support to prevent multiple collisions of the evaporated material with the substrate.
Claim 6
Dependent Claim
66 words
The apparatus of claim 1, further comprising: a laser for providing a coherent light output; a beam divider for separating said coherent light output into said first and second coherent beams of light; a first window in said vacuum chamber for admitting said first coherent beam into said chamber; and a second window in said vacuum chamber for admitting said second coherent beam into said chamber.
Claim 7
Dependent Claim
30 words
The apparatus of claim 5 further comprising an up collimator situated in the path of said coherent light output for increasing the cross sectional area of said coherent light output.
Claim 8
Dependent Claim
48 words
The apparatus of claim 6, further comprising: a first lens situated in the path of said first coherent beam to focus said first beam on said source; and a second lens situated in the path of said second coherent beam to focus said second beam on said substrate.
Claim 9
Dependent Claim
23 words
The apparatus of claim 7, wherein said first and second lenses are adjustable to control the foci of said first and second beams.
Claim 10
Dependent Claim
57 words
The apparatus of claim 8, further comprising: a first x-y scanner situated in the path of said first coherent beam of light for scanning said first beam over said source of the material; and a second x-y scanner situated in the path of said second coherent beam of light for scanning said second beam over the substrate.
Claim 11
Dependent Claim
16 words
The apparatus of claim 9, wherein said first and second x-y scanners further comprise galvanometric scanners.
Claim 12
Dependent Claim
15 words
The apparatus of claim 10, wherein said laser further comprises a Q-switched solid state laser.
Claim 13
Dependent Claim
14 words
The apparatus of claim 11, wherein said laser further comprises an Nd: YAG laser.
Claim 14
Dependent Claim
92 words
The apparatus of claim 5, further comprising: a second beam divider for separating said first coherent beam of light into a third coherent beam of light and a fourth coherent beam of light, said third coherent beam passing through said first window into said chamber and impinging on said source of the material; a third window in said vacuum chamber for admitting said fourth beam; and a second source support for positioning a second source of a second material within said chamber in the path of said fourth coherent beam of light.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-10-19 | 1991-04-20 | 1991-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-19 | 1995-04-20 | 1995-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-19 | 1999-04-20 | 1999-10-20 | $7700.00 | Window Closed / Lapsed |