US4699082A — Apparatus for chemical vapor deposition

Claim 1

Independent Claim 67 words

Coating apparatus comprising: coating chamber means having inlet means and outlet means and having heating means; halogenation chamber means within and connected to the coating chamber means having inlet means and reactor heating means; means for isolating the halogenation chamber means from the coating chamber means, the isolation means being removable; particle container means in the halogenation chamber means; and access means for the coating chamber means.

Claim 2

Dependent Claim 67 words

Coating apparatus comprising: coating chamber means having inlet means and outlet means and having heating means; halogenation chamber means within and connected to the coating chamber means having inlet means and reactor heating means; means for isolating the halogenation chamber means from the coating chamber means, the isolation means being removable; particle container means in the halogenation chamber means; and access means for the coating chamber means.

Claim 3

Dependent Claim 98 words

Apparatus for producing metal cotaings comprising: coating chamber means having carrier gas inlet means and gas outlet means and having substrate heating means for heating a substrate to metal sub-halide coating temperature; halogenation chamber means within and connected to the coating chamber means having a halogenation gas inlet means and having reaction heating means for causing rection producing gaseous metallic sub-halides; isolation means for interrupting the connection between the reaction chamber and the halogenation chamber, the isolation means being removable; metal particle container means located in the halogenation chamber means; and access means for the reaction chamber means.

Claim 4

Dependent Claim 98 words

Apparatus for producing metal cotaings comprising: coating chamber means having carrier gas inlet means and gas outlet means and having substrate heating means for heating a substrate to metal sub-halide coating temperature; halogenation chamber means within and connected to the coating chamber means having a halogenation gas inlet means and having reaction heating means for causing rection producing gaseous metallic sub-halides; isolation means for interrupting the connection between the reaction chamber and the halogenation chamber, the isolation means being removable; metal particle container means located in the halogenation chamber means; and access means for the reaction chamber means.

Claim 5

Dependent Claim 17 words

The apparatus according to claim 2, wherein the halogenation chamber means being below the coating chamber means.

Claim 6

Dependent Claim 28 words

The apparatus according to claim 2, wherein the metal particle container means having metal particles from Group IVB, VB or VIB of the Periodic Table of the Elements.

Claim 7

Dependent Claim 15 words

The apparatus according to claim 4, wherein the metal particles being titanium, zirconium or hafnium.

Claim 8

Dependent Claim 15 words

The apparatus according to claim 2, wherein the coating chamber means including flow control means.

Claim 9

Dependent Claim 15 words

The apparatus according to claim 2, wherein the halogenation chamber means including flow control means.

Claim 10

Dependent Claim 15 words

The apparatus according to claim 2, wherein the halogenation chamber means including pressure control means.

Claim 11

Dependent Claim 19 words

The apparatus according to claim 2, wherein the coating chamber means including a rack means for supporting a substrate.

Claim 12

Dependent Claim 16 words

The apparatus according to claim 2, wherein the coating chamber means including a vacuum pumping means.

Claim 13

Dependent Claim 19 words

The apparatus according to claim 10, wherein the vacuum pumping means including a piston pump, blower, filter and scrubber.

Claim 14

Dependent Claim 22 words

The apparatus according to claim 10, wherein the vacuum pumping means being isolated from the coating chamber means by an electropneumatic valve.

Claim 15

Dependent Claim 14 words

The apparatus according to claim 2, wherein the isolation means being a metal disc.

Claim 16

Dependent Claim 21 words

The apparatus according to claim 13, wherein the metal disc being movable axially along the major axis of the halogenation chamber.

Claim 17

Dependent Claim 17 words

The apparatus according to claim 2, wherein the halogenation chamber means including a quartz glass liner tube.

Claim 18

Dependent Claim 18 words

The apparatus according to claim 2, wherein the coating chamber means and the halogenation chamber means are cylindrical.

Claim 19

Dependent Claim 13 words

The apparatus according to claim 16, wherein the chamber means are axially aligned.

Claim 20

Dependent Claim 100 words

Apparatus for producing metal coatings comprising: coating chamber means having carrier gas inlet means and gas outlet means and having substrate heating means for heating a substrate to metal sub-halide coating temperature; halogenation chamber means within and connected to the coating chamber means having a halogenation gas inlet means and having reaction heating means for causing reaction producing gaseous metallic sub-halides; the coating chamber means including a gas distribution means connected to the halogenation chamber means and the carrier gas inlet means; metal particle container means located in the halogenation chamber means; and access means for the reaction chamber means.

Claim 21

Dependent Claim 100 words

Apparatus for producing metal coatings comprising: coating chamber means having carrier gas inlet means and gas outlet means and having substrate heating means for heating a substrate to metal sub-halide coating temperature; halogenation chamber means within and connected to the coating chamber means having a halogenation gas inlet means and having reaction heating means for causing reaction producing gaseous metallic sub-halides; the coating chamber means including a gas distribution means connected to the halogenation chamber means and the carrier gas inlet means; metal particle container means located in the halogenation chamber means; and access means for the reaction chamber means.

Claim 22

Dependent Claim 18 words

The apparatus according to claim 18, wherein the coating chamber means and gas distribution means are axially aligned.

Claim 23

Dependent Claim 42 words

The apparatus according to claim 18, wherein the gas distribution means comprises a pair of distribution pipes, one of said pair of pipes being connected to the halogenation chamber means while the other pipe being connected to the carrier gas inlet means.

Claim 24

Dependent Claim 12 words

The apparatus according to claim 20, wherein the distribution pipes are perforate.

Claim 25

Dependent Claim 15 words

The apparatus according to claim 20, wherein the apparatus includes several pairs of distribution pipes.

Claim 26

Dependent Claim 21 words

The apparatus according to claim 20, wherein the halogenation chamber means and carrier gas inlet means are separated by a septum.

Claim 27

Dependent Claim 17 words

The apparatus according to claim 23, wherein the halogenation chamber means and carrier gas inlet means coaxial.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1990-10-12	1991-04-13	1991-10-13	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1994-10-12	1995-04-13	1995-10-13	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1998-10-12	1999-04-13	1999-10-13	$7700.00	Window Closed / Lapsed

Apparatus for chemical vapor deposition

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