Patent US4696837A successfully refreshed from Google Patents.
US4696837A
Expired / Lapsed
US
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Chemical vapor deposition method of producing fluorine-doped tin oxide coatings
Assignee: Arkema Inc
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Filing: 1985-11-12
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Granted: 1987-09-29
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Expires: 2005-11-12
Abstract
Abstract In accordance with the invention, there is provided herein an improved chemical vapor deposition method for forming fluorine-doped tin oxide coatings using a liquid coating composition which includes a reactive organic fluorine dopant and an organotin compound. The method is carried out under a defined set of process conditions such that the coating produced has a minimum and constant sheet resistance which is substantially independent of deposition temperature.
Inventors
- 👤 Goerg H. Lindner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:20
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/245; C03C17/2453; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/407
Claims Analysis
Total Claims: 63
Claim 1
Independent Claim
248 words
An improved chemical vapor deposition method of producing a fluorine-doped tin oxide coating which has a minimum and constant sheet resistance under different process conditions, comprising: (a) forming a liquid coating composition comprising: (1) an organic fluorine dopant wherein at least one fluorine atom is located alpha or beta to a functional group wherein carbon is bonded to oxygen selected from carboxylic acid, anhydride, ester, alcohol, ketone, acid halide, or ether; and (2) an organotin compound, which is an alkyltin trichloride, a dialkyltin dichloride an alkyldichlorotin acetate, a dialkylchlorotin diacetate, or an ester tin trichloride; or tin tetrachloride; (b) vaporizing said liquid coating composition into a wet carrier gas to form a vapor mixture of carrier gas, water, organic fluorine dopant and said organotin compound or said tin tetrachloride; and (c) decomposing said vapor mixture on a substrate to form said coating, characterized in that: the vapor concentrations of said components are such that a parameter M, defined as: ##EQU2## where (AIR) is the concentration of the carrier gas, in moles 1 hr, (H 2 O) is the concentration of water in the carrier gas, in moles 1 hr, (OFD) is the concentration of organic fluorine dopant in the carrier gas, in moles 1 hr, and (O) is the concentration of organotin compound in the carrier gas, in moles 1 hr, has a value of less than 50,000, thereby to produce a fluorine-doped tin oxide coating having a minimum and constant sheet resistance for said values of M.
Claim 2
Dependent Claim
248 words
An improved chemical vapor deposition method of producing a fluorine-doped tin oxide coating which has a minimum and constant sheet resistance under different process conditions, comprising: (a) forming a liquid coating composition comprising: (1) an organic fluorine dopant wherein at least one fluorine atom is located alpha or beta to a functional group wherein carbon is bonded to oxygen selected from carboxylic acid, anhydride, ester, alcohol, ketone, acid halide, or ether; and (2) an organotin compound, which is an alkyltin trichloride, a dialkyltin dichloride an alkyldichlorotin acetate, a dialkylchlorotin diacetate, or an ester tin trichloride; or tin tetrachloride; (b) vaporizing said liquid coating composition into a wet carrier gas to form a vapor mixture of carrier gas, water, organic fluorine dopant and said organotin compound or said tin tetrachloride; and (c) decomposing said vapor mixture on a substrate to form said coating, characterized in that: the vapor concentrations of said components are such that a parameter M, defined as: ##EQU2## where (AIR) is the concentration of the carrier gas, in moles 1 hr, (H 2 O) is the concentration of water in the carrier gas, in moles 1 hr, (OFD) is the concentration of organic fluorine dopant in the carrier gas, in moles 1 hr, and (O) is the concentration of organotin compound in the carrier gas, in moles 1 hr, has a value of less than 50,000, thereby to produce a fluorine-doped tin oxide coating having a minimum and constant sheet resistance for said values of M.
Claim 3
Dependent Claim
15 words
A process according to claim 1 wherein M has a value of 20,000 or less.
Claim 4
Dependent Claim
22 words
A process according to claim 1 in which the sheet resistance is about 25 ohms/sq. at a thickness of about 180-210 nm.
Claim 5
Dependent Claim
27 words
A process according to claim 1 in which the liquid coating composition comprises 2-10 wt. % of said organic fluorine dopant, and 90-98% of said organotin compound.
Claim 6
Dependent Claim
20 words
A process according to claim 1 wherein said liquid coating composition includes 1-10 wt. % of a polar organic compound.
Claim 7
Dependent Claim
34 words
A process according to claim 5 wherein said composition includes 2-10 wt. % of said organic fluorine dopant, 80-97 wt. % of said organotin compound, and 1-10 wt. % of said polar organic compound.
Claim 8
Dependent Claim
18 words
A process according to claim 6 wherein said polar organic compound is acetic anhydride, ethyl acetate or methylisobutylketone.
Claim 9
Dependent Claim
13 words
A process according to claim 1 wherein said vaporization temperature is 100°-400° C.
Claim 10
Dependent Claim
17 words
A process according to claim 1 wherein said deposition temperature is above 400° and below 700° C.
Claim 11
Dependent Claim
11 words
A process according to claim 1 wherein said substrate is glass.
Claim 12
Dependent Claim
20 words
The product of the process of claim 1 having a substantially minimum and constant sheet resistance with increasing deposition temperature.
Claim 13
Dependent Claim
14 words
A process according to claim 1 wherein said function group is a carboxylic acid.
Claim 14
Dependent Claim
13 words
A process according to claim 1 wherein said functional group is an anhydride.
Claim 15
Dependent Claim
13 words
A process according to claim 1 wherein said functional group is an ester.
Claim 16
Dependent Claim
13 words
A process according to claim 1 wherein said functional group is an alcohol.
Claim 17
Dependent Claim
13 words
A process according to claim 1 wherein said functional group is a ketone.
Claim 18
Dependent Claim
14 words
A process according to claim 1 wherein said functional group is an acid halide.
Claim 19
Dependent Claim
14 words
A process according to claim 1 wherein said functional compound is an alkyltin trichloride.
Claim 20
Dependent Claim
14 words
A process according to claim 1 wherein said organotin compound is a dialkyltin dichloride.
Claim 21
Dependent Claim
14 words
A process according to claim 1 wherein said organotin compound is an alkylchlorotin diacetate.
Claim 22
Dependent Claim
15 words
A process according to claim 1 wherein said organotin compound is an ester tin trichloride.
Claim 23
Dependent Claim
71 words
A process according to claim 1 wherein said liquid coating composition comprises: (a) 1-30 wt. % of a reactive organic fluorine dopant compound which is trifluoroacetic acid, trifluoroacetic anhydride, ethyl trifluoroacetoacetate, trifluoroethanol, ethyl trifluoroacetate, pentafluoropropionic acid, 2-chloro-1,1,2-trifluoroethyl methyl ether, or 1,1,1-trifluoroacetylacetone; and (b) 70-99 wt. % of an organotin compound which is an alkyltin trichloride, a dialkyltin dichloride, an alkyldichlorotin acetate, an alkylchlorotin diacetate, an ester tin trichloride; or tin tetrachloride.
Claim 24
Dependent Claim
28 words
A process according to claim 22 wherein said organotin compound is monobutyltin trichloride, methyltin trichloride, isobutyltin trichloride, dibutyltin dichloride, di-t-butyltin dichloride, butyldichlorotin acetate, butylchlorotin diacetate, or carbethoxyethyltin trichloride.
Claim 25
Dependent Claim
26 words
A process according to claim 1 in which said fluorine dopant is 2-10 wt. % and said organotin compound is 90-98 wt. % of the composition.
Claim 26
Dependent Claim
28 words
A process according to claim 1 in which said fluorine dopant is about 5 wt. % and said organotin compound is about 95 wt. % of the composition.
Claim 27
Dependent Claim
14 words
A process according to claim 22 in which said fluorine dopant is trifluoroacetic acid.
Claim 28
Dependent Claim
14 words
A process according to claim 22 in which said fluorine dopant is trifluoroacetic anhydride.
Claim 29
Dependent Claim
14 words
A process according to claim 22 in which said fluorine dopant is ethyl trifluoroacetoacetate.
Claim 30
Dependent Claim
13 words
A process according to claim 22 in which said fluorine dopant is trifluoroethanol.
Claim 31
Dependent Claim
14 words
A process according to claim 22 in which said fluorine dopant is ethyl trifluoroacetate.
Claim 32
Dependent Claim
14 words
A process according to claim 22 in which said fluorine dopant is pentafluoropropionic acid.
Claim 33
Dependent Claim
15 words
A process according to claim 22 in which said fluorine dopant is 2-chloro-1,1,2-trifluoroethyl methyl ether.
Claim 34
Dependent Claim
13 words
A process according to claim 22 in which said fluorine dopant is 1,1,1-trifluoroacetylacetone.
Claim 35
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is monobutyltin trichloride.
Claim 36
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is methyltin trichloride.
Claim 37
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is isobutyltin trichloride.
Claim 38
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is dibutyltin dichloride.
Claim 39
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is di-t-butyltin dichloride.
Claim 40
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is butyldichlorotin acetate.
Claim 41
Dependent Claim
14 words
A process according to claim 15 in which said organotin compound is butylchlorotin diacetate.
Claim 42
Dependent Claim
14 words
A process according to claim 23 in which said organotin compound is carbethoxyethyltin trichloride.
Claim 43
Dependent Claim
21 words
A process according to claim 23 in which said fluorine dopant is trifluoroacetic acid, and said organotin compound is monobutyltin trichloride.
Claim 44
Dependent Claim
23 words
A process according to claim 23 comprising 2-10 wt. % of said organic fluorine dopant and 90-98 wt. % of said organotin compound.
Claim 45
Dependent Claim
21 words
A process according to claim 43 in which said fluorine dopant is trifluoroacetic acid and said organotin compound is monobutyltin trichloride.
Claim 46
Dependent Claim
20 words
A process according to claim 43 in which said fluorine dopant is trifluoroacetic and said organotin compound is butyldichlorotin acetate.
Claim 47
Dependent Claim
21 words
A process according to claim 43 in which said fluorine dopant is ethyl trifluoroacetoacetate and said organotin compound is monobutyltin trichloride.
Claim 48
Dependent Claim
21 words
A process according to claim 43 in which said fluorine dopant is trifluoroacetic acid and said organotin compound is diisobutyltin dichloride.
Claim 49
Dependent Claim
21 words
A process according to claim 43 in which said fluorine dopant is ethyl trifluoroacetate and said organotin compound is monobutyltin trichloride.
Claim 50
Dependent Claim
21 words
A process according to claim 43 in which said fluorine dopant is pentofluoropropionic acid and said organotin compound is monobutyltin trichloride.
Claim 51
Dependent Claim
20 words
A process according to claim 43 in which said fluorine dopant is trifluoroethanol and said organotin compound is monobutyltin trichloride.
Claim 52
Dependent Claim
22 words
A process according to claim 43 in which said fluorine dopant is 2-chloro-1,1,2-trifluoroethyl methyl ether and said organotin compound is monobutyltin trichloride.
Claim 53
Dependent Claim
21 words
A process according to claim 43 in which said fluorine dopant is 1,1,1-trifluoroacetyl acetone and said organotin compound is monobutyltin trichloride.
Claim 54
Dependent Claim
17 words
A process according to claim 1 which also includes 1-10 wt. % of a polar organic compound.
Claim 55
Dependent Claim
34 words
A process according to claim 53 in which said fluorine dopant is 2-10 wt. %, said organotin compound is 80-97 wt. %, and said polar organic compound is 1-10 wt. %, of said composition.
Claim 56
Dependent Claim
28 words
A process according to claim 54 comprising 2-10 wt. % of trifluoroacetic acid, 80-97 wt. % of monobutyltin trichloride and 1-10 wt. % of a polar organic liquid.
Claim 57
Dependent Claim
20 words
A process according to claim 54 in which the polar organic compound is methylisobutyl ketone, acetic anhydride or ethyl acetate.
Claim 58
Dependent Claim
81 words
A process according to claim 1 for making high quality fluorine-doped tin oxide coatings having a low sheet resistance and high visible light transmission in which said composition comprises: (a) 1-30 wt. % of a reactive organic fluorine dopant compound where at least one fluorine atom is located alpha or beta to a functional group wherein carbon is bonded to oxygen selected from carboxylic acid, anhydride, ester, alcohol, ketone, acid halide, or ether and (b) 70-99 wt. % of tin tetrachloride.
Claim 59
Dependent Claim
47 words
A process according to claim 57 in which said composition comprises: (a) 1-30 Wt. % of an organic fluorine dopant compound which is trifluoroacetic acid, trifluoroacetic anhydride, ethyl trifluoroacetoacetate, trifluoroethanol, ethyl trifluoroacetate, pentafluoropropionic acid, 2-chloro-1,1,2-trifluoroethyl methyl ether, or 1,1,1-trifluoroacetylacetone; and (b) 70-99 wt. % of tin tetrachloride.
Claim 60
Dependent Claim
26 words
A process according to claim 57 in which said fluorine dopant is 2-10 wt. %, and said tin tetrachloride is 90-98 wt. % of the composition.
Claim 61
Dependent Claim
28 words
A process according to claim 57 in which said fluorine dopant is about 5 wt. %, and said tin tetrachloride is about 95 wt. % of the composition.
Claim 62
Dependent Claim
14 words
A process according to claim 60 in which said fluorine dopant is trifluoroacetic acid.
Claim 63
Dependent Claim
39 words
A process according to claim 1 wherein said organic fluorine dopant is present in an amount of 1-30 wt. % of said composition, and said organotin compound is present in an amount of 70-99 wt. % of said composition.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 7.5 Years (Year 8) | 1994-09-28 | 1995-03-30 | 1995-09-29 | $3760.00 | Window Closed / Lapsed |
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