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Process for promoting the interlaminate adhesion of polymeric materials to metal surfaces

Assignee: International Business Machines Corp
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Filing: 1986-10-28
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Granted: 1987-08-25
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Expires: 2006-10-28
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Abstract

Abstract A method for improving the adhesion of a polymer such as an epoxy resin to a metal such as copper wherein the metal surface to be adhered is sequentially exposed to a pressurized stream of a slurry containing suspended metal oxide particles followed by treating the metal oxide treated film in a gas plasma containing a fluorohydrocarbon.

Inventors

  • 👤 Kevin K. Chan
  • 👤 Vicki J. Malueg

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 19:29
CPC Classifications
B; B32; B32B; B32B38/00; B32B38/0008; B05; B05D; B05D1/00; B05D1/62; B32B15/00; B32B15/04; B32B15/08; C; C23; C23C; C23C24/00; H; H05; H05K; H05K3/00; H05K3/38; H05K3/382; B32B37/00; B32B37/14; B32B37/24; B32B2037/246; B32B2309/00; B32B2309/04; B32B2309/12; B32B2311/00; B32B2311/12; B32B2363/00; B32B2457/00; B32B2457/08; H05K2203/00; H05K2203/02; H05K2203/025; H05K2203/09; H05K2203/095; H05K3/46; H05K3/4611

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 60 words
A method for improving the adhesion of polymeric materials to metal surfaces which comprises sequentially (i) impinging on the surface of the metal a stream of a slurry pressurized to greater than 30 psi and in which is suspended metal oxide particles and then (ii) exposing the metal oxide treated metal surface in a gaseous plasma containing a fluorohydrocarbon compound.
Claim 2
Independent Claim 60 words
A method for improving the adhesion of polymeric materials to metal surfaces which comprises sequentially (i) impinging on the surface of the metal a stream of a slurry pressurized to greater than 30 psi and in which is suspended metal oxide particles and then (ii) exposing the metal oxide treated metal surface in a gaseous plasma containing a fluorohydrocarbon compound.
Claim 3
Dependent Claim 14 words
The method of claim 1 wherein the metal oxide particles are aluminum oxide particles.
Claim 4
Dependent Claim 11 words
The method of claim 1 wherein the metal surface is copper.
Claim 5
Dependent Claim 15 words
The method of claim 1 wherein the polymeric substrate is formed from a thermosetting resin.
Claim 6
Dependent Claim 13 words
The method of claim 4 wherein the thermosetting resin is an epoxy resin.
Claim 7
Dependent Claim 29 words
The method of claim 1 wherein the slurry is comprised of aluminum oxide particles suspended in water at a concentration of about 15 to about 25 percent by weight.
Claim 8
Dependent Claim 19 words
The method of claim 1 wherein the slurry stream is pressurized to between about 40 and about 80 psi.
Claim 9
Dependent Claim 12 words
The method of claim 1 wherein the fluorohydrocarbon is CF 4 .
Claim 10
Dependent Claim 32 words
The method of claim 1 wherein the gaseous plasma is formed from a mixture of a fluorohydrocarbon and one or more gases selected from the group consisting of oxygen, nitrogen and argon.
Claim 11
Dependent Claim 37 words
The method of claim 9 wherein the gaseous plasma is formed from a mixture of about 60 to 70 volume percent fluorohydrocarbon, about 10 to 20 volume percent oxygen, and about 20 to 30 volume percent argon.
Claim 12
Dependent Claim 22 words
The method of claim 1 wherein the gaseous plasma treatment is followed by a second gaseous plasma treatment utilizing 100 percent oxygen.
Claim 13
Dependent Claim 22 words
The method of claim 11 wherein there is an interval of about 5 to about 20 minutes between the two plasma treatments.

References Cited (Backward Citations)

US3455775A Cited
US4416725A Cited
US4557796A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-08-24 1991-02-23 1991-08-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-08-24 1995-02-23 1995-08-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-08-24 1999-02-23 1999-08-25 $7700.00 Window Closed / Lapsed

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