US4683376A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Opposing field spectrometer for electron beam mensuration technology
Assignee: Advantest Corp
•
Filing: 1985-09-09
•
Granted: 1987-07-28
•
Expires: 2005-09-09
Abstract
Abstract An electrostatic opposing field spectrometer has an extraction electrode (AN) and an opposing field electrode arrangement with a pair of planar opposing field electrodes (EG1 and EG2) mounted to an outer electrode part (EM) at either end of a truncated conical shaped bore extending therethrough, where the smaller opening of the bore is in the direction of the extraction electrode (AN). The planar opposing field electrodes (EG1 and EG2), in conjunction with the bore surface, generates substantially spherical equi-potential lines (A1 and A2) which transmit a larger solid angle distribution of secondary electrons (SE) triggered at a measuring point (M) on the specimen surface (PR).
Inventors
- 👤 Hans-Peter Feuerbaum
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:00
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/05; G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/305; H01J37/26; H01J37/266; H01J37/268
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
132 words
An electrostatic opposing field spectrometer having a primary beam for generating secondary particles when focused on a specimen, comprising: an extraction electrode and an opposing field electrode arrangement wherein said opposing field electrode arrangement includes at least one essentially planar opposing field electrode, and wherein said opposing field electrode arrangement, so as to accommodate the angular distribution of secondary particles, includes an outer electrode part arranged at the edge of said at least one essentially planar opposing field electrode, said outer electrode part has an inside wall at the edge of said at least one essentially planar opposing field electrode wherein said inside wall is closer to the primary beam at a portion toward said extraction electrode and spaced farther from the primary beam at a portion away from said extraction electrode.
Claim 2
Dependent Claim
132 words
An electrostatic opposing field spectrometer having a primary beam for generating secondary particles when focused on a specimen, comprising: an extraction electrode and an opposing field electrode arrangement wherein said opposing field electrode arrangement includes at least one essentially planar opposing field electrode, and wherein said opposing field electrode arrangement, so as to accommodate the angular distribution of secondary particles, includes an outer electrode part arranged at the edge of said at least one essentially planar opposing field electrode, said outer electrode part has an inside wall at the edge of said at least one essentially planar opposing field electrode wherein said inside wall is closer to the primary beam at a portion toward said extraction electrode and spaced farther from the primary beam at a portion away from said extraction electrode.
Claim 3
Dependent Claim
24 words
An electrostatic opposing field spectrometer as claimed in claim 1, wherein said at least one essentially planar opposed field electrode is a net electrode.
Claim 4
Dependent Claim
42 words
An electrostatic opposing field spectrometer as claimed in claim 1, wherein said at least one essentially planar opposing field electrode is bounded by said outer electrode part and wherein said outer electrode part is solid and defines a truncated cone shaped bore.
Claim 5
Dependent Claim
37 words
An electrostatic opposing field spectrometer as claimed in claim 3, further comprising first and second essentially planar opposing field electrodes mounted at respective upper and lower edges of said truncated cone-shaped bore of said outer electrode part.
Claim 6
Dependent Claim
22 words
An electrostatic opposing field spectrometer as claimed in claim 3, wherein said truncated cone-shaped bore in said outer electrode part is circular.
Claim 7
Dependent Claim
16 words
An electrostatic opposing field spectrometer as claimed in claim 1, wherein said extraction electrode is planar.
Claim 8
Dependent Claim
21 words
An electrostatic opposing field spectrometer as claimed in claim 1, wherein said planar extraction electrode forms part of an extraction network.
Claim 9
Dependent Claim
77 words
An electrostatic opposing field spectrometer for undertaking measurements by means of an electron beam probe at various points on a test specimen, comprising: a substantially planar extraction electrode, a solid outer electrode portion forming a shaped bore therethrough, to define a smaller opening and a larger opening in said solid outer electrode portion, said smaller opening being in the direction of said extraction electrode, and at least one opposing field electrode mounted extending across said shaped bore.
Claim 10
Dependent Claim
77 words
An electrostatic opposing field spectrometer for undertaking measurements by means of an electron beam probe at various points on a test specimen, comprising: a substantially planar extraction electrode, a solid outer electrode portion forming a shaped bore therethrough, to define a smaller opening and a larger opening in said solid outer electrode portion, said smaller opening being in the direction of said extraction electrode, and at least one opposing field electrode mounted extending across said shaped bore.
Claim 11
Dependent Claim
30 words
An electrostatic opposing field spectrometer as claimed in claim 8, further comprising: an opposing field electrode extending across each of said smaller and larger openings in said outer electrode portion.
Claim 12
Dependent Claim
18 words
An electrostatic opposing field spectrometer as claimed in claim 9, wherein said opposing field electrodes are substantially planar.
Claim 13
Dependent Claim
21 words
An electrostatic opposing field spectrometer as claimed in claim 8, wherein said outer electrode portion defines a centrally-located circular truncated-conical bore.
References Cited (Backward Citations)
US3694652A
Cited
US3845305A
Cited
US3961190A
Cited
US4097738A
Cited
US4442355A
Cited
US4464571A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-07-27 | 1991-01-26 | 1991-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-07-27 | 1995-01-26 | 1995-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-07-27 | 1999-01-26 | 1999-07-28 | $7700.00 | Window Closed / Lapsed |