Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
157 words
A Schottky power diode comprising: a semiconductor substrate haing a given band gap, said semiconductor substrate comprising monocrystalline silicon material, an insulating layer disposed on said substrate, a semi-insulating intermediate layer at least partly disposed on said insulating layer, and a Schottky contact disposed on said intermediate layer, said intermediate layer being disposed between said Schottky contact and said substrate, said intermediate layer having a density of localized states from 10 17 to 10 20 eV cm -3 , said intermediate layer having a band gap larger than said given band gap in said semiconductor substrate, said intermediate layer having a resistivity of between 10 5 and 10 11 ohm cm, said intermediate layer being partly disposed on said insulating layer and being partly disposed on said substrate in a window formed in said insulating layer and said Schottky contact extending beyond the edge of said window formed in said insulating layer on to said intermediate layer.
Claim 2
Dependent Claim
157 words
A Schottky power diode comprising: a semiconductor substrate haing a given band gap, said semiconductor substrate comprising monocrystalline silicon material, an insulating layer disposed on said substrate, a semi-insulating intermediate layer at least partly disposed on said insulating layer, and a Schottky contact disposed on said intermediate layer, said intermediate layer being disposed between said Schottky contact and said substrate, said intermediate layer having a density of localized states from 10 17 to 10 20 eV cm -3 , said intermediate layer having a band gap larger than said given band gap in said semiconductor substrate, said intermediate layer having a resistivity of between 10 5 and 10 11 ohm cm, said intermediate layer being partly disposed on said insulating layer and being partly disposed on said substrate in a window formed in said insulating layer and said Schottky contact extending beyond the edge of said window formed in said insulating layer on to said intermediate layer.
Claim 3
Dependent Claim
17 words
A Schottky power diode according to claim 1, wherein said intermediate layer is formed of amorphous silicon.
Claim 4
Dependent Claim
17 words
A Schottky power diode according to claim 1, wherein said intermediate layer is formed of amorphous germanium.
Claim 5
Dependent Claim
19 words
A Schottky power diode according to claim 1, wherein said intermediate layer is between 10 and 50 nm thick.
Claim 6
Dependent Claim
26 words
A Schottky power diode according to claim 2, wherein said amorphous silicon layer is formed of vapor-deposited silicon containing between 2 and 40 atom percent oxygen.
Claim 7
Dependent Claim
27 words
A Schottky power diode according to claim 2, wherein said amorphous silicon layer is a glow discharge-deposited layer and contains between 5 and 20 atom percent hydrogen.