Patent US4679689A successfully refreshed from Google Patents.
US4679689A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Processing, shipping and/or storage container for photomasks and/or wafers
Assignee: SPX Technologies Inc
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Filing: 1985-09-03
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Granted: 1987-07-14
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Expires: 2005-09-03
Abstract
Abstract This invention pertains to a system for holding Photomasks and/or wafers in a clean environment during processing, shipment and/or storage. The apparatus of the invention comprises a processing holder that may be used for the internal processing of photomasks and/or wafers, as well as being used as the inner portion of a photomask and/or wafer shipping and storage container.
Inventors
- 👤 Eugene R. Blome
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:00
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/10; H10P72/19; H10P72/1904; G; G03; G03F; G03F1/00; G03F1/66; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/70741; H10P72/1922; Y; Y10; Y10S; Y10S206/00; Y10S206/832
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
220 words
A system for holding photomasks and/or wafers in a clean environment during processing, shipment and/or storage of said photomasks and/or wafers said system comprises: a first processing tray having grooves in which a lower portion of the edges of said photomasks and/or wafers are inserted, said first tray has an opening along its bottom surface permitting the escape of chemicals that are used in the processing of said photomasks and/or wafers; a second processing tray having grooves, said second tray positioned above said first tray so that the grooves of said second tray will hold a upper portion of the edges of said photomasks and/or wafers, said second tray has an opening along its top surface so that said second tray may be used to permit the escape of chemicals that are used in the processing of said photomasks and/or wafers; means for connecting said first tray to said second tray, so that said photomasks and/or wafers will be held firmly in place; and a container which contains one or more inflatable diaphragms connected to the inside surface of said container, in which said first and second trays and said means are inserted, whereby when said container is closed, said one or more diaphragms inflate causing said wafers and/or photomasks to be securely held within said first and second trays.
Claim 2
Independent Claim
220 words
A system for holding photomasks and/or wafers in a clean environment during processing, shipment and/or storage of said photomasks and/or wafers said system comprises: a first processing tray having grooves in which a lower portion of the edges of said photomasks and/or wafers are inserted, said first tray has an opening along its bottom surface permitting the escape of chemicals that are used in the processing of said photomasks and/or wafers; a second processing tray having grooves, said second tray positioned above said first tray so that the grooves of said second tray will hold a upper portion of the edges of said photomasks and/or wafers, said second tray has an opening along its top surface so that said second tray may be used to permit the escape of chemicals that are used in the processing of said photomasks and/or wafers; means for connecting said first tray to said second tray, so that said photomasks and/or wafers will be held firmly in place; and a container which contains one or more inflatable diaphragms connected to the inside surface of said container, in which said first and second trays and said means are inserted, whereby when said container is closed, said one or more diaphragms inflate causing said wafers and/or photomasks to be securely held within said first and second trays.
Claim 3
Dependent Claim
46 words
The system claimed in claim 1 wherein said first tray further includes: a wall within said first tray, that divides said first tray into two compartments wherein a number of grooves are on each side of said wall; and a slot which exists within said wall.
Claim 4
Dependent Claim
46 words
The system claimed in claim 2 wherein said second tray further includes: a wall within said second tray, that divides said second tray into two compartments wherein a number of grooves are on each side of said wall; and a slot which exists within said wall.
Claim 5
Dependent Claim
42 words
The system claimed in claim 3 wherein said means for connecting further includes: a coupling device having one or more guides along its periphery; and a rod which, when inserted into said guides will connect said first tray to said second tray.
Claim 6
Dependent Claim
61 words
The system claimed in claim 4 wherein said coupling device further includes: a member that has a bottom flanged surface that is inserted into the slot within said first tray; a protrusion along the surface of said member which is inserted below the slot of said second tray; and a top end that rests above the slot of said second tray.
Claim 7
Dependent Claim
27 words
The system claimed in claim 5 wherein a handle is connected to said member so that said first and second trays may be carried by said handle.
Claim 8
Dependent Claim
12 words
The system claimed in claim 1 wherein said container is cylindrically shaped.
Claim 9
Dependent Claim
28 words
The system claimed in claim 7 wherein said container comprises a first section and a second section and means for connecting said first section to said second section.
Claim 10
Dependent Claim
16 words
The system claimed in claim 1 wherein said container is made of conductive glass filled polypropylene.
Claim 11
Dependent Claim
17 words
The system claimed in claim 7 wherein said container is made of black conductive glass filled polypropylene.
Claim 12
Dependent Claim
17 words
The system claimed in claim 8 wherein said container is made of black conductive glass filled polypropylene.
Claim 13
Dependent Claim
41 words
The system claimed in claim 1 wherein said holding means comprises: four elements containing grooves for holding portions of the edges of photomasks and/or wafers, wherein said four elements are connected at right angles to each other by a locking means.
Claim 14
Dependent Claim
17 words
The system claimed in claim 12 wherein said locking means comprises a plurality of nuts and bolts.
Claim 15
Dependent Claim
18 words
The system claimed in claim 1 further including a preformed package in which said container is vacuum sealed.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-07-13 | 1991-01-12 | 1991-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-07-13 | 1995-01-12 | 1995-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-07-13 | 1999-01-12 | 1999-07-14 | $7700.00 | Window Closed / Lapsed |