US4672023A
Expired / Lapsed
US
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Method for planarizing wafers
Assignee: HP Inc
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Filing: 1985-10-21
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Granted: 1987-06-09
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Expires: 2005-10-21
Abstract
Abstract A method for filling indentations to planarize the surface of a wafer is disclosed. The method includes three steps: (1) coating the wafer surface with a layer of positive photoresist that fills the indentations and covers the surface of the wafer; (2) exposing the layer of photoresist to light or other radiation source of such intensity and duration that the layer of photoresist is exposed down to the surface of the wafer but not into the indentations; and (3) removing the exposed portion of the photoresist by using a developer, resulting in a planarized wafer containing indentations filled with unexposed photoresist. Once the wafer has been planarized by this method, overstructures can be formed over the top of the photoresist filled indentations.
Inventors
- 👤 Charles C. Leung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:15
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/0145; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
139 words
A method for planarizing the surface of a wafer containing indentations, said method comprising the steps of: coating the wafer surface to be planarized by applying a layer of positive photoresist that fills the indentations and covers the surface of the wafer, said layer of positive photoresist having a substantially uniform thickness over the wafer surface except for an increased thickness at the indentations; uniformly exposing said layer of positive photoresist to a source of exposure radiation, wherein said exposure radiation penetrates said layer of positive photoresist down to the surface of the wafer but not all the way into the depths of the indentations; and developing said layer of positive photoresist to remove the exposed portion of said layer from the surface of the wafer, resulting in a planarized wafer containing indentations substantially filled with unexposed positive photoresist.
Claim 2
Independent Claim
139 words
A method for planarizing the surface of a wafer containing indentations, said method comprising the steps of: coating the wafer surface to be planarized by applying a layer of positive photoresist that fills the indentations and covers the surface of the wafer, said layer of positive photoresist having a substantially uniform thickness over the wafer surface except for an increased thickness at the indentations; uniformly exposing said layer of positive photoresist to a source of exposure radiation, wherein said exposure radiation penetrates said layer of positive photoresist down to the surface of the wafer but not all the way into the depths of the indentations; and developing said layer of positive photoresist to remove the exposed portion of said layer from the surface of the wafer, resulting in a planarized wafer containing indentations substantially filled with unexposed positive photoresist.
Claim 3
Dependent Claim
47 words
A method as recited in claim 1 wherein the wafer is a flat circular wafer, and wherein said step of coating the wafer surface includes the step of spinning the wafer while applying the positive photoresist in order to obtain a uniformly thick layer of positive photoresist.
Claim 4
Dependent Claim
46 words
A method as recited in claim 1 further comprising the steps of forming a structure on the surface of the wafer and on top of the indentations filled with unexposed positive photoresist, and thereafter removing said unexposed positive photoresist from the indentations using a resist stripper.
Claim 5
Dependent Claim
25 words
A method as recited in claim 3 wherein said step of removing said unexposed positive photoresis includes the step of oxygen plasma or solvent stripping.
Claim 6
Dependent Claim
57 words
A method as recited in claim 1 further comprising the steps of selecting a thickness for the layer of positive photoresist and selecting the frequency, intensity, and duration of said exposure radiation so that said exposure radiation penetrates said layer of positive photoresist at least down to the surface of the wafer but not into the indentations.
Claim 7
Dependent Claim
78 words
A method as recited in claim 1 wherein said step of coating the wafer surface includes the step of coating the wafer surface with type AZ-1470 esist and spinning the wafer at a rotational speed of about 5000 revolutions per minute to obtain a layer thickness of approximately one micrometer, and wherein said step of uniformly exposing includes the step of exposing said layer of positive photoresist using deep ultraviolet light at a wavelength of about 220 nanometers.
Claim 8
Dependent Claim
47 words
A method as recited in claim 6 wherein said step of exposing with deep ultraviolet light includes the step of exposing said layer of positive photoresist with deep ultraviolet light for a period of approximately one minute at an intensity of approximately six milliwatts per square centimeter.
Claim 9
Independent Claim
131 words
A method for planarizing the surface of a wafer containing indentations, said method comprising the steps of: coating the wafer surface to be planarized by applying a layer of positive photoresist that fills the indentations and covers the surface of the wafer, said layer of positive photoresist having a substantially uniform thickness over the wafer surface except for an increased thickness at the indentations; uniformly exposing said layer of positive photoresist to a source of exposure radiation; developing said layer of positive photoresist to remove the exposed portion of said layer; repeating said steps of exposing and developing said layer of positive photoresist until said layer of positive photoresist is removed down to the surface of the wafer, resulting in a planarized wafer containing indentations substantially filled with unexposed positive photoresist.
Claim 10
Independent Claim
131 words
A method for planarizing the surface of a wafer containing indentations, said method comprising the steps of: coating the wafer surface to be planarized by applying a layer of positive photoresist that fills the indentations and covers the surface of the wafer, said layer of positive photoresist having a substantially uniform thickness over the wafer surface except for an increased thickness at the indentations; uniformly exposing said layer of positive photoresist to a source of exposure radiation; developing said layer of positive photoresist to remove the exposed portion of said layer; repeating said steps of exposing and developing said layer of positive photoresist until said layer of positive photoresist is removed down to the surface of the wafer, resulting in a planarized wafer containing indentations substantially filled with unexposed positive photoresist.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-06-08 | 1990-12-08 | 1991-06-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-08 | 1994-12-08 | 1995-06-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-08 | 1998-12-08 | 1999-06-09 | $7700.00 | Window Closed / Lapsed |