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US4666818A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of patterning resist for printed wiring board

Assignee: Schneider Electric Systems USA Inc
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Filing: 1985-06-10
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Granted: 1987-05-19
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Expires: 2005-06-10
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Abstract

Abstract A method for patterning a photoresist or insulating layer on a printed wiring board utilizes two photoreactive coatings comprising a photoprocessable ultraviolet (UV) sensitive layer overlaid with a thin, unexposed, undeveloped strip base silver film. A white light x-y plotter, preferably employing an octagonal aperture, is driven directly from a CAD system to expose the film on the board in the desired pattern without affecting the underlying UV sensitive layer. The film is then developed on the board and employed as an in situ mask for the underlying UV layer during exposure of the board to a UV flood lamp. After UV exposure the film is peeled off to allow conventional processing of the selectively polymerized layer. This technique produces high resolution, inspectable onboard masks in full registration using reliable low energy plotters.

Inventors

  • 👤 Harold Lake
  • 👤 Paul E. Grandmont

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 04:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082; G03F7/004; G03F7/09; G03F7/095; G03F7/0952; H05K2203/00; H05K2203/01; H05K2203/0195; H05K2203/05; H05K2203/0502; H05K2203/0505; H05K2203/0548; H05K2203/0551; H05K3/02; H05K3/06; H05K3/061; H05K3/064; H05K3/10; H05K3/108; H05K3/22; H05K3/28

Claims Analysis

Total Claims: 41
Claim 1
Independent Claim 165 words
A process for patterning a photoprocessable layer on a substrate, comprising preparing a digital representation of a desired pattern, preparing a substrate with an upper layer of photoprocessable material sensitive to a first spectrum of directed energy, applying a layer of unexposed, undeveloped photographic imaging film sensitive to a second spectrum of directed energy to the substrate over the photoprocessable layer, selectively exposing said film on the substrate with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to energy in said first spectrum distributed substantially uniformly over the substrate through the image developed in said film layer as an in situ mask, peeling said film off of said substrate, and processing said photoprocessable layer, whereby low energy plotting can be used to create high resolution inspectable onboard masks.
Claim 2
Dependent Claim 165 words
A process for patterning a photoprocessable layer on a substrate, comprising preparing a digital representation of a desired pattern, preparing a substrate with an upper layer of photoprocessable material sensitive to a first spectrum of directed energy, applying a layer of unexposed, undeveloped photographic imaging film sensitive to a second spectrum of directed energy to the substrate over the photoprocessable layer, selectively exposing said film on the substrate with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to energy in said first spectrum distributed substantially uniformly over the substrate through the image developed in said film layer as an in situ mask, peeling said film off of said substrate, and processing said photoprocessable layer, whereby low energy plotting can be used to create high resolution inspectable onboard masks.
Claim 3
Dependent Claim 27 words
The process of claim 1, wherein processing said photoprocessable layer after exposure is accomplished by chemically removing either the exposed or unexposed portions of said photoprocessable layer.
Claim 4
Dependent Claim 18 words
The process of claim 1, wherein said first spectrum is UV and said second spectrum is visible light.
Claim 5
Dependent Claim 12 words
The process of claim 1, wherein said photoplotter is an x-y plotter.
Claim 6
Dependent Claim 19 words
The process of claim 1, wherein said photoplotter is a raster scan plotter with a triggerable source of radiation.
Claim 7
Dependent Claim 56 words
The process of claim 5, wherein said source is applied to the film in the shape of an octagon and the interscan distance is such that sides of octagons in adjacent scans are aligned and in substantial contact with each other to form a straight edged line at 0°, 45° or 90° to the scan direction.
Claim 8
Dependent Claim 22 words
The process of claim 1, wherein said film has an emulsion side and is applied with its emulsion-side adjacent said photoprocessable layer.
Claim 9
Dependent Claim 13 words
The process of claim 1, wherein said film is a dry silver film.
Claim 10
Dependent Claim 12 words
The process of claim 1, wherein said film is a heat-developable film.
Claim 11
Dependent Claim 25 words
The process of claim 1, wherein said film is a heat-developable film having an emulsion side applied with its emulsion side adjacent said photoprocessable layer.
Claim 12
Dependent Claim 10 words
The process of claim 1, wherein said substrate includes metal.
Claim 13
Dependent Claim 169 words
A process for patterning a photoprocessable layer for a substrate, comprising preparing a digital representation of a desired pattern, laminating together a layer of photoprocessable material sensitive to directed energy in a first spectrum with a layer of unexposed, undeveloped photographic imaging film sensitive to directed energy in a second spectrum to form a composite, applying said composite with the film layer on top to a substrate, selectively exposing said film layer with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to energy in said first spectrum distributed substantially uniformly over the substrate through the image developed in said film layer as an in situ mask, peeling said film off of said substrate, and processing said photoprocessable layer, whereby low energy plotting can be used to create high resolution inspectable onboard masks.
Claim 14
Dependent Claim 169 words
A process for patterning a photoprocessable layer for a substrate, comprising preparing a digital representation of a desired pattern, laminating together a layer of photoprocessable material sensitive to directed energy in a first spectrum with a layer of unexposed, undeveloped photographic imaging film sensitive to directed energy in a second spectrum to form a composite, applying said composite with the film layer on top to a substrate, selectively exposing said film layer with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to energy in said first spectrum distributed substantially uniformly over the substrate through the image developed in said film layer as an in situ mask, peeling said film off of said substrate, and processing said photoprocessable layer, whereby low energy plotting can be used to create high resolution inspectable onboard masks.
Claim 15
Dependent Claim 27 words
The process of claim 12, wherein processing said photoprocessable layer after exposure is accomplished by chemically removing either the exposed or unexposed portions of said photoprocessable layer.
Claim 16
Dependent Claim 18 words
The process of claim 12, wherein said first spectrum is UV and said second spectrum is visible light.
Claim 17
Dependent Claim 12 words
The process of claim 12, wherein said photoplotter is an x-y photoplotter.
Claim 18
Dependent Claim 19 words
The process of claim 12, wherein said photplotter is a raster scan photoplotter with a triggerable source of radiation.
Claim 19
Dependent Claim 55 words
The process of claim 16, wherein said source is applied to the film in the shape of an octagon and the interscan spacing is such that the sides of the octagon are aligned and in substantial contact with each other to form a straight edged line at 0°, 45° and 90° to the scan direction.
Claim 20
Dependent Claim 23 words
The process of claim 12, wherein said film has an emulsion side and is applied with its emulsion side adjacent said photoprocessable layer.
Claim 21
Dependent Claim 13 words
The process of claim 12, wherein said film is a dry silver film.
Claim 22
Dependent Claim 12 words
The process of claim 12, wherein said film is a heat-developable film.
Claim 23
Dependent Claim 25 words
The process of claim 12, wherein said film is a heat-developable film having an emulsion side applied with its emulsion side adjacent said photoprocessable layer.
Claim 24
Dependent Claim 10 words
The process of claim 12, wherein said substrate includes metal.
Claim 25
Independent Claim 211 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically nonconductive substrate covered by an upper layer of photoprocessable material sensitive to high energy UV radiation but insensitive to low energy radiation of substantially longer wavelength than UV, with at least a partial layer of electrically conductive metal between said substrate and said photoprocessable layer, laminating a peelable, unexposed, undeveloped photographic imaging strip base film sensitive to low energy radiation of substantially longer wavelength than UV over the photoprocessable layer, selectively exposing said film on the substrate with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to high energy UV radiation distributed substantially uniformly over the substrate through the image developed in said film as an in situ mask, peeling the film off of said substrate, and processing said photoprocessable layer by removing portions corresponding to said conductor pattern to define openings therein exposing corresponding portions of said conductive metal layer on said substrate.
Claim 26
Independent Claim 211 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically nonconductive substrate covered by an upper layer of photoprocessable material sensitive to high energy UV radiation but insensitive to low energy radiation of substantially longer wavelength than UV, with at least a partial layer of electrically conductive metal between said substrate and said photoprocessable layer, laminating a peelable, unexposed, undeveloped photographic imaging strip base film sensitive to low energy radiation of substantially longer wavelength than UV over the photoprocessable layer, selectively exposing said film on the substrate with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to high energy UV radiation distributed substantially uniformly over the substrate through the image developed in said film as an in situ mask, peeling the film off of said substrate, and processing said photoprocessable layer by removing portions corresponding to said conductor pattern to define openings therein exposing corresponding portions of said conductive metal layer on said substrate.
Claim 27
Independent Claim 226 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, forming a multilayer composite including a layer of photoprocessable material sensitive to high energy UV radiation but insensitive to low energy radiation of substantially longer wavelength than UV and an adjacent layer of peelable, unexposed, undeveloped photographic imaging strip base film sensitive to low energy radiation of substantially longer wavelength than UV, laminating said composite with the film on top to the surface of an electrically nonconductive substrate, with at least a partial layer of electrically conductive metal between said substrate and said photoprocessable layer, selectively exposing said film layer with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to high energy UV radiation in said first spectrum distributed substantially uniformly over the substrate through the image developed in said film as an in situ mask, peeling said film off of said substrate, and processing said photoprocessable layer to selectively remove portions corresponding to said conductor pattern to define openings in said photoprocessable layer which expose corresponding portions of the underlying metal layer on said substrate.
Claim 28
Independent Claim 226 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, forming a multilayer composite including a layer of photoprocessable material sensitive to high energy UV radiation but insensitive to low energy radiation of substantially longer wavelength than UV and an adjacent layer of peelable, unexposed, undeveloped photographic imaging strip base film sensitive to low energy radiation of substantially longer wavelength than UV, laminating said composite with the film on top to the surface of an electrically nonconductive substrate, with at least a partial layer of electrically conductive metal between said substrate and said photoprocessable layer, selectively exposing said film layer with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to high energy UV radiation in said first spectrum distributed substantially uniformly over the substrate through the image developed in said film as an in situ mask, peeling said film off of said substrate, and processing said photoprocessable layer to selectively remove portions corresponding to said conductor pattern to define openings in said photoprocessable layer which expose corresponding portions of the underlying metal layer on said substrate.
Claim 29
Independent Claim 209 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically conductive metal clad nonconductive substrate covered by a UV polymerizable resist layer substantially insensitive to low energy radiation of substantially longer wavelength than UV, covered by a peelable, strip base, unexposed, undeveloped photographic film sensitive to low energy radiation of substantially longer wavelength than UV, selectively exposing said film on said composite with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying UV resist layer, developing the film on the substrate, exposing the UV resist layer to a high energy UV flood lamp through the image developed in said film as an in situ mask to polymerize corresponding portions of said UV resist layer, peeling said film off of said substrate, removing the unpolymerized portions of said resist layer to define openings through said resist layer exposing corresponding portions of said metal cladding on said substrate, removing the exposed metal cladding, and removing the remaining polymerized portions of said resist layer to expose the desired conductor pattern.
Claim 30
Independent Claim 209 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically conductive metal clad nonconductive substrate covered by a UV polymerizable resist layer substantially insensitive to low energy radiation of substantially longer wavelength than UV, covered by a peelable, strip base, unexposed, undeveloped photographic film sensitive to low energy radiation of substantially longer wavelength than UV, selectively exposing said film on said composite with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying UV resist layer, developing the film on the substrate, exposing the UV resist layer to a high energy UV flood lamp through the image developed in said film as an in situ mask to polymerize corresponding portions of said UV resist layer, peeling said film off of said substrate, removing the unpolymerized portions of said resist layer to define openings through said resist layer exposing corresponding portions of said metal cladding on said substrate, removing the exposed metal cladding, and removing the remaining polymerized portions of said resist layer to expose the desired conductor pattern.
Claim 31
Independent Claim 208 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically conductive metal foil clad nonconductive substrate covered by a UV sensitive resist layer covered by a peelable, unexposed, undeveloped photographic imaging, strip base film sensitive to low energy radiation of substantially longer wavelength than UV, selectively exposing said film on said composite with an automatic photoplotter controlled by said digital representation emitting a low power beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying UV resist layer, developing the film on the substrate, exposing the UV resist layer to a UV flood lamp through the image developed in the film to polymerized corresponding portions of said UV resist, peeling said film off of said substrate, removing the unpolymerized portions of said resist layer to define openings therethrough to expose corresponding portions of said foil cladding, electroplating metal onto said exposed portions of said metal cladding thereby substantially filling the openings in said resist layer, removing the remaining polymerized portions of said resist layer, and removing the remainder of the exposed foil cladding thus leaving the plated conductor pattern.
Claim 32
Independent Claim 208 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically conductive metal foil clad nonconductive substrate covered by a UV sensitive resist layer covered by a peelable, unexposed, undeveloped photographic imaging, strip base film sensitive to low energy radiation of substantially longer wavelength than UV, selectively exposing said film on said composite with an automatic photoplotter controlled by said digital representation emitting a low power beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying UV resist layer, developing the film on the substrate, exposing the UV resist layer to a UV flood lamp through the image developed in the film to polymerized corresponding portions of said UV resist, peeling said film off of said substrate, removing the unpolymerized portions of said resist layer to define openings therethrough to expose corresponding portions of said foil cladding, electroplating metal onto said exposed portions of said metal cladding thereby substantially filling the openings in said resist layer, removing the remaining polymerized portions of said resist layer, and removing the remainder of the exposed foil cladding thus leaving the plated conductor pattern.
Claim 33
Dependent Claim 30 words
The method of claim 26, further comprising after said electroplating step, applying tin-solder to the exposed electroplate surfaces, said step of removing the remaining foil cladding being accomplished by etching.
Claim 34
Independent Claim 187 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically nonconductive substrate under a patterned electrically conductive foil layer corresponding to said conductor pattern, covered by a UV sensitive photoprocessable layer, covered in turn by a peelable, unexposed, undeveloped photographic imaging, strip base film sensitive to low energy radiation of substantially longer wavelength than UV, selectively exposing said film on said composite with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to a UV flood lamp through the image developed in said film as an in situ mask to polmerize corresponding portions of said photoprocessable layer, peeling said film off of said substrate, removing the unpolymerized portions of said photoprocessable layer to define channels therein exposing said patterned foil, and filling said channels with metal to complete said conductor pattern.
Claim 35
Independent Claim 187 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically nonconductive substrate under a patterned electrically conductive foil layer corresponding to said conductor pattern, covered by a UV sensitive photoprocessable layer, covered in turn by a peelable, unexposed, undeveloped photographic imaging, strip base film sensitive to low energy radiation of substantially longer wavelength than UV, selectively exposing said film on said composite with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the film is activated without affecting the underlying layer of photoprocessable material, developing the film on the substrate, exposing the photoprocessable layer to a UV flood lamp through the image developed in said film as an in situ mask to polmerize corresponding portions of said photoprocessable layer, peeling said film off of said substrate, removing the unpolymerized portions of said photoprocessable layer to define channels therein exposing said patterned foil, and filling said channels with metal to complete said conductor pattern.
Claim 36
Dependent Claim 28 words
The method of claim 28, wherein said step of filling the channels with metal includes bringing the surface of said processed composite into contact with a solder bath.
Claim 37
Dependent Claim 25 words
The method of claim 28, wherein said step of filling the channels with metal is accomplished by electrolessly plating metal on said exposed foil pattern.
Claim 38
Dependent Claim 30 words
The method of claim 28, wherein said photoprocessable layer is a UV resist, further comprising after filling said channels with metal, removing the remaining polymerized portions of said resist layer.
Claim 39
Dependent Claim 14 words
The method of claim 28, wherein said photoprocessable layer is a permanent dry film.
Claim 40
Independent Claim 201 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically nonconductive substrate under a conductor pattern of electrically conductive metal covered with a UV sensitive permanent dry film layer covered by a peelable, unexposed, undeveloped photographic imaging strip base film sensitive to radiation of substantially longer wavelength than UV, selectively exposing said photographic film on said composite with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the photographic film is activated without affecting the underlying layer of permanent dry film, developing the photographic film on the substrate, exposing the permanent dry film layer to a UV flood lamp through the image developed in said photographic film as an in situ mask to polymerized corresponding portions of said permanent dry film, peeling said photographic film off of said substrate, removing the unpolymerized portions of said permanent dry film to define openings therethrough exposing corresponding portions of said conductor pattern, whereby electrical connections can be made to said conductor pattern through the openings in said permanent dry film.
Claim 41
Independent Claim 201 words
A method of making a printed wiring board, comprising designing a conductor pattern using a CAD system which generates a corresponding digital representation, preparing a multilayer composite including an electrically nonconductive substrate under a conductor pattern of electrically conductive metal covered with a UV sensitive permanent dry film layer covered by a peelable, unexposed, undeveloped photographic imaging strip base film sensitive to radiation of substantially longer wavelength than UV, selectively exposing said photographic film on said composite with an automatic photoplotter controlled by said digital representation emitting a low energy beam of radiation of substantially longer wavelength than UV so that the photographic film is activated without affecting the underlying layer of permanent dry film, developing the photographic film on the substrate, exposing the permanent dry film layer to a UV flood lamp through the image developed in said photographic film as an in situ mask to polymerized corresponding portions of said permanent dry film, peeling said photographic film off of said substrate, removing the unpolymerized portions of said permanent dry film to define openings therethrough exposing corresponding portions of said conductor pattern, whereby electrical connections can be made to said conductor pattern through the openings in said permanent dry film.

References Cited (Backward Citations)

US3867150A Cited
US4168980A Cited
US4347305A Cited
US4327167A Cited
US4373018A Cited
US4515877A Cited
GB2135793A Cited
US4469777A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-05-18 1990-11-17 1991-05-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-05-18 1994-11-17 1995-05-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-05-18 1998-11-17 1999-05-19 $7700.00 Window Closed / Lapsed

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