Patent US1782121A successfully refreshed from Google Patents.
Patent US4664742A successfully refreshed from Google Patents.
US4664742A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for growing single crystals of dissociative compounds
Assignee: Japan Science and Technology Agency
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Filing: 1985-05-17
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Granted: 1987-05-12
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Expires: 2005-05-17
Abstract
Abstract The present invention provides a method for growing single crystals of a dissociative compound by pulling with a volatile component gas of the dissociative compound sealed at a controlled pressure in a heated growth chamber in which the single crystals are pulled, wherein a partition pipe having a lower density than the density of melt of the dissociative compound is disposed so as to immerse its lower end in the melt and the melt is covered with B 2 O 3 at either one of the inside or outside of the partition pipe. The method of the present invention enables the precise, appropriate control of the melt composition during the course of growing and thereby provides single crystals free from any detrimental contamination and undesirable dislocation problems. The thus obtained crystals are especially desirable for use as substrates for high speed and/or optical devices, because of their excellent semi-insulating properties.
Inventors
- 👤 Kenji Tomizawa
- 👤 Yasushi Shimanuki
- 👤 Koichi Sassa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:34
CPC Classifications
C; C30; C30B; C30B27/00; C30B27/02; C30B29/00; C30B29/10; C30B29/40
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
200 words
A method for growing a single crystal of a dissociative compound, comprising the steps of: pulling a single crystal of a dissociative compound upwardly from a central portion of an upper surface of a first melt of said dissociative compound in a crucible under the conditions that a first, central, fractional part of an area of said upper surface of said first melt is covered by and is in direct surface-to-surface contact with a second melt of B 2 O 3 and said second melt surrounds and contacts the periphery of the single crystal that is being pulled from said first melt, a second, peripheral, functional part of the area of said upper surface of said first melt is free of direct contact with said second melt, the zone of said first melt below said second fractional part of the area of said upper surface is in contact with pressurized gas of a volatile component of said dissociative compound and the zone of said first melt that is below said second fractional part of said upper surface is in fluid flow communication with the zone of said first melt that is below said first fractional part of said upper surface.
Claim 2
Independent Claim
200 words
A method for growing a single crystal of a dissociative compound, comprising the steps of: pulling a single crystal of a dissociative compound upwardly from a central portion of an upper surface of a first melt of said dissociative compound in a crucible under the conditions that a first, central, fractional part of an area of said upper surface of said first melt is covered by and is in direct surface-to-surface contact with a second melt of B 2 O 3 and said second melt surrounds and contacts the periphery of the single crystal that is being pulled from said first melt, a second, peripheral, functional part of the area of said upper surface of said first melt is free of direct contact with said second melt, the zone of said first melt below said second fractional part of the area of said upper surface is in contact with pressurized gas of a volatile component of said dissociative compound and the zone of said first melt that is below said second fractional part of said upper surface is in fluid flow communication with the zone of said first melt that is below said first fractional part of said upper surface.
Claim 3
Dependent Claim
20 words
A method according to claim 1, in which said dissociative compound is GaAs and said volatile component thereof is As.
Claim 4
Independent Claim
236 words
A method for growing a single crystal of a dissociative semiconductor compound, comprising the steps of: in a sealed growth chamber, placing into a first melt of a dissociative semiconductor compound in a crucible the lower end of an annular partition pipe having a lower density than the density of said first melt so that said pipe projects above an upper surface of said first melt and isolates a first, central, fractional area of the upper surface of said first melt from a second, peripheral, fractional area thereof, the portions of said first melt below said first and second fractional areas being in fluid flow communication with each other below the upper surface of said first melt; covering said first fractional area with a layer of a second melt of B 2 O 3 so that said second melt directly contacts and covers said central fractional area of said first melt and simultaneously maintaining said second fractional area uncovered by said second melt; exposing said second fractional area to direct contact with a pressurized ambient atmosphere containing a gas of a volatile component of said dissociative compound; and pulling a single crystal of said dissociative compound from said first melt through said second melt of B 2 O 3 so that said second melt of B 2 O 3 surrounds and contacts the periphery of the single crystal as it is pulled from said first melt.
Claim 5
Independent Claim
236 words
A method for growing a single crystal of a dissociative semiconductor compound, comprising the steps of: in a sealed growth chamber, placing into a first melt of a dissociative semiconductor compound in a crucible the lower end of an annular partition pipe having a lower density than the density of said first melt so that said pipe projects above an upper surface of said first melt and isolates a first, central, fractional area of the upper surface of said first melt from a second, peripheral, fractional area thereof, the portions of said first melt below said first and second fractional areas being in fluid flow communication with each other below the upper surface of said first melt; covering said first fractional area with a layer of a second melt of B 2 O 3 so that said second melt directly contacts and covers said central fractional area of said first melt and simultaneously maintaining said second fractional area uncovered by said second melt; exposing said second fractional area to direct contact with a pressurized ambient atmosphere containing a gas of a volatile component of said dissociative compound; and pulling a single crystal of said dissociative compound from said first melt through said second melt of B 2 O 3 so that said second melt of B 2 O 3 surrounds and contacts the periphery of the single crystal as it is pulled from said first melt.
Claim 6
Independent Claim
151 words
A method of forming a single crystal of a dissociative compound, wherein said method comprises: providing a gas-tight chamber in which is disposed a melt of a dissociative compound; providing an atmosphere of a volatile component of said dissociative compound in contact with a first peripheral portion of an upper layer of said melt to facilitate control of the composition of said melt; sealing a central surface, portion of said upper layer of said melt from contact with said atmosphere within said chamber with a layer of molten B 2 O 3 to reduce contamination of said melt and loss of volatile materials from said melt; and pulling a crystal from said second central portion of said melt through said layer of molten B 2 O 3 so that said molten B 2 O 3 surrounds and contacts the periphery of said single crystal as it is pulled from said melt.
Claim 7
Independent Claim
151 words
A method of forming a single crystal of a dissociative compound, wherein said method comprises: providing a gas-tight chamber in which is disposed a melt of a dissociative compound; providing an atmosphere of a volatile component of said dissociative compound in contact with a first peripheral portion of an upper layer of said melt to facilitate control of the composition of said melt; sealing a central surface, portion of said upper layer of said melt from contact with said atmosphere within said chamber with a layer of molten B 2 O 3 to reduce contamination of said melt and loss of volatile materials from said melt; and pulling a crystal from said second central portion of said melt through said layer of molten B 2 O 3 so that said molten B 2 O 3 surrounds and contacts the periphery of said single crystal as it is pulled from said melt.
Claim 8
Dependent Claim
103 words
A method of forming a single crystal of a dissociative compound as claimed in claim 4, wherein said sealing step comprises placing in said melt a cylindrical partition pipe capable of floating in said melt so as to define said first peripheral surface portion of said melt surrounding said partition pipe and said second central surface portion of said melt within said partition pipe, and wherein said layer of molten B 2 O 3 is placed on said second central surface portion of said melt to seal said surface of said melt and to function as a getter of impurities in said melt.
Claim 9
Dependent Claim
84 words
A method of forming a single crystal of a dissociative compound as claimed in claim 5, wherein said layer of molten B 2 O 3 is disposed within said partition pipe to seal said second central surface portion of the melt within the partition type from the atmosphere, said first peripheral surface portion of said melt being disposed outside said partition pipe, in communication with said atmosphere and the crystal is pulled from said second central surface portion of said melt within said pipe.
Claim 10
Dependent Claim
70 words
A method of forming a single crystal of a dissociative compound as claimed in claim 4, wherein said layer of B 2 O 3 is placed on the surface of said second central portion of said melt, and an annular ring is placed on the surface of said first peripheral portion of said melt, said ring having an inlet pipe which is in communication with said atmosphere and said melt.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-11 | 1990-11-10 | 1991-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-11 | 1994-11-10 | 1995-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-11 | 1998-11-10 | 1999-05-12 | $7700.00 | Window Closed / Lapsed |