Method for prevention of autodoping of epitaxial layers

Claim 2

In a method of manufacturing a semiconductor device having an epitaxial layer and subsequent layers which are not contaminated by dopants diffused from a doped substrate, the improvement comprising preparing a substrate for device formation comprising, in the order listed, the steps of: forming a first layer of a cleanly etchable material over front side and back side surfaces of a doped semiconductor substrate; forming a second layer of a dopant diffusion barrier material over front side and back side surfaces of the first layer, the second layer of dopant diffusion barrier material being provided in sufficient thickness to survive all subsequent removal steps; selectively etching the second layer from the front side surface without removing the first layer therefrom; selectively wet etching the first layer from the front side of the doped substrate without removing additional second layer dopant diffusion barrier material, to reveal a defect-free substrate surface; growing an epitaxial semiconductor layer on the defect-free surface on the front side of the doped semiconductor substrate; and retaining the second layer dopant diffusion barrier and the first layer of cleanly etchable material on the back side surface of the doped semiconductor substrate as the remaining device layers are formed and removed.

Claim 3

The method of claim 1 wherein at least one non-protected layers is present on the doped substrate before said first layer is formed.

Claim 4

The method of claim 1 wherein the cleanly etchable material is silicon dioxide.

Claim 5

The method of claim 1 wherein the dopant diffusion barrier material is selected from the group consisting of silicon nitride and polysilicon.

Claim 6

In a method of manufacturing a semiconductor device having an epitaxial silicon layer and subsequent layers which are not contaminated by dopants diffused from a doped silicon substrate, comprising preparing a substrate for device formation by the following steps in the order listed: forming a first layer of silicon dioxide over front side and back side surfaces of a doped silicon semiconductor substrate; forming a second layer of a dopant diffusion barrier material consisting of silicon nitride over front side and back side surfaces of the first layer, the second layer of dopant diffusion barrier material being provided in sufficient thickness to survive all subsequent removal steps; selectively dry etching the second layer from the front side surface without removing the first layer therefrom; selectively wet etching the first layer from the front side of the doped silicon substrate without removing additional second layer dopant diffusion barrier material, to reveal a defect-free substrate front side; growing a silicon epitaxial layer on the defect-free front side of the doped silicon substrate; and retaining the second layer of dopant diffusion barrier material and first layer of silicon dioxide on the back side of the doped silicon semiconductor substrate during the subsequent formation and partial removal of the remainder of the layers.

Claim 7

In a method of manufacturing a semiconductor device having an epitaxial silicon layer and subsequent layers which are not contaminated by dopants diffused from a doped silicon substrate, comprising preparing a substrate for device formation by the following steps in the order listed: forming a first layer of silicon dioxide over front side and back side surfaces of a doped silicon semiconductor substrate; forming a second layer of a dopant diffusion barrier material consisting of silicon nitride over front side and back side surfaces of the first layer, the second layer of dopant diffusion barrier material being provided in sufficient thickness to survive all subsequent removal steps; selectively dry etching the second layer from the front side surface without removing the first layer therefrom; selectively wet etching the first layer from the front side of the doped silicon substrate without removing additional second layer dopant diffusion barrier material, to reveal a defect-free substrate front side; growing a silicon epitaxial layer on the defect-free front side of the doped silicon substrate; and retaining the second layer of dopant diffusion barrier material and first layer of silicon dioxide on the back side of the doped silicon semiconductor substrate during the subsequent formation and partial removal of the remainder of the layers.

Claim 8

The method of claim 5 wherein one or more non-protected silicon layers is present on the doped silicon substrate before said first layer is formed.