US3559281A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of reclaiming processed semiconductior wafers
Assignee: Motorola Solutions Inc
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Filing: 1968-11-27
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Granted: 1971-02-02
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Expires: 1988-11-27
Abstract
Abstract A METHOD OF PROCESSING SEMICONDUCTOR WAFERS WHEREIN WAFERS HAVING EPITAXIAL LAYERS CONTAINING DIFFUSION REGIONS WHICH HAVE BEEN REJECTED DUE TO ELECTRICAL FAILURES OR VISUAL DEFECTS CAN BE ECONOMICALLY PROCESSED AND RECLAIMED FOR FURTHER DEVICE FABRICATION. THE METHOD UTILIZES THE COMBINATION OF AN EPITAXIAL LAYER AND AN OVERLYING OXIDE LAYER TO ESSENTIALLY ELIMINATE AUTO-DOPING BY IMPURITIES DIFFUSED OR CONTAINED THEREIN DURING SUBSEQUENT FABRICATION STEPS.
Inventors
- 👤 Bobby A Mayberry
- 👤 Albert E Ozias Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:52
CPC Classifications
H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/007
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-01 | 1974-08-03 | 1975-02-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-01 | 1978-08-03 | 1979-02-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-01 | 1982-08-03 | 1983-02-02 | $7700.00 | Window Closed / Lapsed |