Patent US4661968A successfully refreshed from Google Patents.
US4661968A
Expired / Lapsed
US
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Beam exposure apparatus comprising a diaphragm drive for an object carrier
Assignee: FEI Co
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Filing: 1985-10-31
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Granted: 1987-04-28
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Expires: 2005-10-31
Abstract
Abstract A beam exposure apparatus is set forth comprising a mechanism for displacing an object being irradiated. This mechanism involves a drive mechanism. The drive mechanism may be rigidly connected to a wall of the apparatus, and a secondary shaft of the drive mechanism is connected by a friction coupling to a part of the object carrier which is to be positioned. The drive mechanism is driven by a direct current drive motor which is powered by a pulsed direct current. The object can be thus positioned with a step accuracy of approximately 0.2 micron. Such positioning can be measured with this accuracy be means of an inductive position detector.
Inventors
- 👤 Willem Wondergem
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:04
CPC Classifications
F; F16; F16J; F16J15/00; F16J15/50; H; H01; H01J; H01J37/00; H01J37/02; H01J37/20
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
91 words
In a beam exposure device comprising means for generating an electromagnetic beam, an object receiving said beam in an enclosed space, detecting means for detecting radiation from said object, and means for positioning said object, the improvement comprising said means for positioning comprising an object carrier for carrying said object, a first shaft coupled to said object carrier for moving said object carrier and said object in said beam, a diaphragm for moving said first shaft, a second shaft for moving said diaphragm, and motor means for moving said second shaft.
Claim 2
Dependent Claim
91 words
In a beam exposure device comprising means for generating an electromagnetic beam, an object receiving said beam in an enclosed space, detecting means for detecting radiation from said object, and means for positioning said object, the improvement comprising said means for positioning comprising an object carrier for carrying said object, a first shaft coupled to said object carrier for moving said object carrier and said object in said beam, a diaphragm for moving said first shaft, a second shaft for moving said diaphragm, and motor means for moving said second shaft.
Claim 3
Dependent Claim
52 words
A beam exposure device according to claim 1, wherein a supporting plate is connected by a pin to an end of said first shaft opposite to said object carrier, said supporting plate being adjacent said diaphragm, said diaphragm contacting both said supporting plate and edges of said end of said first shaft.
Claim 4
Dependent Claim
57 words
A beam exposure device according to claim 2, wherein said second shaft is coupled to said diaphragm by a bearing disc and a plurality of balls supported on said diaphragm, said second shaft and said bearing disc and plurality of balls being at an opposite side of said diaphragm from said first shaft and said supporting plate.
Claim 5
Dependent Claim
33 words
A beam exposure device according to claim 1 or claim 2 or claim 3, wherein said enclosed space is provided by a walled structure, said diaphragm forming a part of said walled structure.
Claim 6
Dependent Claim
14 words
A beam exposure device according to claim 4, wherein said enclosed space is evacuated.
Claim 7
Dependent Claim
21 words
A beam exposure device according to claim 4, wherein a seal containing a metal connects said diaphragm to said walled structure.
Claim 8
Dependent Claim
30 words
A beam exposure device according to claim 1 or claim 2 or claim 3, wherein said motor means includes a direct current motor having a pulsed direct current supply source.
Claim 9
Dependent Claim
25 words
A beam exposure device according to claim 7, wherein an inductive position detector is provided for measuring displacement of said object on said object carrier.
Claim 10
Dependent Claim
28 words
A beam exposure device according to claim 1 or claim 2 or claim 3, wherein said first shaft is connected to said object carrier by a friction coupling.
Claim 11
Dependent Claim
40 words
A beam exposure device according to claim 9, wherein said friction coupling includes at least two friction wheels, rod means for driving said object carrier coupled between said friction wheels, and said first shaft being coupled between said friction wheels.
Claim 12
Dependent Claim
31 words
A beam exposure device according to claim 1 or claim 2 or claim 3, wherein said electromagnetic beam is an electron beam, and said object is displaced in said electron beam.
Claim 13
Dependent Claim
32 words
A beam exposure device according to claim 1 or claim 2 or claim 3, wherein said electromagnetic beam is an X-ray beam, and said object is rotatably displaced in said X-ray beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-27 | 1990-10-27 | 1991-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-27 | 1994-10-27 | 1995-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-27 | 1998-10-27 | 1999-04-28 | $7700.00 | Window Closed / Lapsed |