X-y table for vacuum systems

Claim 2

A means for providing two dimensional translation within a chamber comprising: a first means mounted within said chamber, and adapted for linear motion in a first direction with respect to said chamber; a second means supported by said first means and adapted for linear motion with respect thereto in a second direction; a third means passing through the wall of said chamber, said third means being pivotally supported and engaging said second means so as to cause translation thereof in response to the pivoting of said third means; a flexible means sealably coupled between said second means and to said chamber wall in an area surrounding the passage of said third means therethrough; a fourth means mounted outside said chamber and adapted for linear motion in a third direction with respect to said chamber; and a fifth means mounted to said fourth means and adapted for linear motion with respect thereto in a fourth direction, said fifth means engaging said third means so as to cause pivoting thereof responsive to the position of said fifth means.

Claim 3

The means of claim 1 further comprised of drive means for independently controllably causing the translation of said fourth means with respect to said chamber and said fifth means with respect to said fourth means.

Claim 4

The means of claim 1 wherein said first and second directions are substantially orthogonal directions and said third and fourth directions are substantially orthogonal directions in a plane substantially parallel to the plane of said first and second directions.

Claim 5

The means of claim 3 wherein one of said first and second directions in parallel to one of said third and fourth directions.

Claim 6

The means of claim 1 wherein said third means is an elongated member having a spherical region at each end thereof, said second and fifth means each have a cylindrical bore cooperatively disposed and mating with one of said spherical regions.

Claim 7

The means of claim 1 wherein said flexible member is a bellows.

Claim 8

A means for providing two dimensional translation within a chamber comprising: a first means mounted within said chamber and adapted for linear motion in a first direction with respect to said chamber; a second means supported by said first means and adapted for linear motion with respect thereto in a second direction substantially orthogonal to said first direction; a third means passing through the wall of said chamber, said third means being pivotally supported and engaging said second means so as to cause translation thereof in response to the pivoting of said third means; a flexible means sealably coupled between said second means and to said chamber wall in an area surrounding the passage of said third means therethrough; a fourth means mounted outside said chamber and adapted for linear motion in a third direction with respect to said chamber; a fifth means mounted to said fourth means and adapted for linear motion with respect thereto in a fourth direction, substantially orthogonal to said third direction, said fifth means engaging said third means so as to cause pivoting thereof responsive to the position of said fifth means; a first lead screw member; a first lead screw nut member, one oF said last two members being supported by said chamber and the other of said members being supported by said fourth means, said first lead screw member and said first lead screw nut member being adapted for relative rotation therebetween so as to cause translation of said fourth means with respect to said chamber; a second lead screw member; and, a second lead screw nut member, one of said last two members being supported by said fourth means and the other of said members being supported by said fifth means, said second lead screw member and said second lead screw nut member being adapted for relative rotation therebetween so as to cause translation of said fifth means with respect to said fourth means.

Claim 9

A means for providing two dimensional translation within a chamber comprising: a first means mounted within said chamber and adapted for linear motion in a first direction with respect to said chamber; a second means supported by said first means and adapted for linear motion with respect thereto in a second direction substantially orthogonal to said first direction; a third means passing through the wall of said chamber, said third means being pivotally supported and engaging said second means so as to cause translation thereof in response to the pivoting of said third means; a flexible means sealably coupled between said second means and to said chamber wall in an area surrounding the passage of said third means therethrough; a fourth means mounted outside said chamber and adapted for linear motion in a third direction with respect to said chamber; a fifth means mounted to said fourth means and adapted for linear motion with respect thereto in a fourth direction, substantially orthogonal to said third direction, said fifth means engaging said third means so as to cause pivoting thereof responsive to the position of said fifth means; a first lead screw member; a first lead screw nut member, one oF said last two members being supported by said chamber and the other of said members being supported by said fourth means, said first lead screw member and said first lead screw nut member being adapted for relative rotation therebetween so as to cause translation of said fourth means with respect to said chamber; a second lead screw member; and, a second lead screw nut member, one of said last two members being supported by said fourth means and the other of said members being supported by said fifth means, said second lead screw member and said second lead screw nut member being adapted for relative rotation therebetween so as to cause translation of said fifth means with respect to said fourth means.

Claim 10

The means of claim 7 further comprised of motor drive means for independently controllably causing relative rotation between said first lead screw member and said first lead scrw nut member, and between said second lead screw member and said second lead screw nut member.

Claim 11

The means of claim 8 wherein said first and second directions are substantially orthogonal directions and said third and fourth directions are substantially orthogonal directions in a plane substantially parallel to the plane of said first and second directions.

Claim 12

The means of claim 9 wherein one of said first and second directions is parallel to one of said third and fourth directions.

Claim 13

The means of claim 8 wherein said third means is an elongated member having a spherical region at each end thereof, said second and fifth means each have a cylindrical bore cooperatively disposed and mating with one of said spherical regions.

Claim 14

The means of claim 8 wherein said flexible member is a bellows.

Claim 15

An X-Y table for providing two dimensional translation of an object within a chamber comprising: a first means mounted within said chamber on linear ball bearing means to provide linear motion of said first means with respect to said chamber in a first direction; a second means supported by said first means by linear ball bearing means to provide linear motion of said second means with respect to said first means in a second direction orthogonal to said first direction; a third means passing through the wall of said chamber, said third means being an elongate means pivotally supported approximately at its center, each of the ends of said third means having a spherical surface thereon, one end of said third means cooperatively engaging a cylindrical bore on said second means so as to cause translation of said second means in response to the pivoting of said third means; a bellows sealably coupled between said second means and said chamber wall in an area surrounding the passage of said third means therethrough; a fourth means mounted outside said chamber by linear ball bearing means to provide linear motion in a third direction with respect to said chamber, said third direction being substantially parallel to the plane defined by said first and second directions; a fifth means mounted to said fourth means by linear ball bearing means to provide linear motion of said fifth means with respect to said fourth means in a fourth direction orthogonal to said third direction, said third and fourth directions defining a plane parallel to the plane defined by said first and second directions, one end of said third means cooperatively engaging a cylindrical bore on said fifth means so as to cause pivoting of said third means in response to translation of said fifth means; a first lead screw rotationally supported by and outside said chamber, with its axis oriented in said third direction; a first lead screw nut coupled to said third means and engaging said first lead screw; first motor means supported by and outside said chamber, said first motor means being coupled to said first lead screw for controllably driving said first lead screw in rotation; a second lead screw rotationally supported by said fourth means with its axis oriented in Said fourth direction; a second lead screw nut coupled to said fifth means and engaging said second lead screw; and second motor means supported by said fourth means and being coupled to said second lead screw for controllably driving said second lead screw in rotation.

Claim 16

An X-Y table for providing two dimensional translation of an object within a chamber comprising: a first means mounted within said chamber on linear ball bearing means to provide linear motion of said first means with respect to said chamber in a first direction; a second means supported by said first means by linear ball bearing means to provide linear motion of said second means with respect to said first means in a second direction orthogonal to said first direction; a third means passing through the wall of said chamber, said third means being an elongate means pivotally supported approximately at its center, each of the ends of said third means having a spherical surface thereon, one end of said third means cooperatively engaging a cylindrical bore on said second means so as to cause translation of said second means in response to the pivoting of said third means; a bellows sealably coupled between said second means and said chamber wall in an area surrounding the passage of said third means therethrough; a fourth means mounted outside said chamber by linear ball bearing means to provide linear motion in a third direction with respect to said chamber, said third direction being substantially parallel to the plane defined by said first and second directions; a fifth means mounted to said fourth means by linear ball bearing means to provide linear motion of said fifth means with respect to said fourth means in a fourth direction orthogonal to said third direction, said third and fourth directions defining a plane parallel to the plane defined by said first and second directions, one end of said third means cooperatively engaging a cylindrical bore on said fifth means so as to cause pivoting of said third means in response to translation of said fifth means; a first lead screw rotationally supported by and outside said chamber, with its axis oriented in said third direction; a first lead screw nut coupled to said third means and engaging said first lead screw; first motor means supported by and outside said chamber, said first motor means being coupled to said first lead screw for controllably driving said first lead screw in rotation; a second lead screw rotationally supported by said fourth means with its axis oriented in Said fourth direction; a second lead screw nut coupled to said fifth means and engaging said second lead screw; and second motor means supported by said fourth means and being coupled to said second lead screw for controllably driving said second lead screw in rotation.